Novel 896-element infrared Schottky detector line array |
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| Authors: | Kurianski JM Theden U Green MA Storey JWV |
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| Affiliation: | Joint Microelectron. Centre, New South Wales Univ., Kensington, NSW; |
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| Abstract: | The application of a mask-level butting technique to the design and fabrication of a very long, monolithic silicide infrared (IR) charge-coupled device (CCD) line array is described. This technique gives a continuous line of 896 IR sensing elements. The number of IR detectors (the length of the array) can be varied as required at the device dicing and packaging stages. The maximum array length is limited only by the silicon wafer size and the processing yield |
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