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MEMS技术检测爆炸物的原理与研究进展?
引用本文:孔德义,诸建彬,齐永光,林丙涛,张正勇,张涛,路巍.MEMS技术检测爆炸物的原理与研究进展?[J].传感技术学报,2006,19(5):2096-2099.
作者姓名:孔德义  诸建彬  齐永光  林丙涛  张正勇  张涛  路巍
作者单位:中国科学院合肥智能机械研究所传感技术国家重点实验室,合肥,230031
摘    要:本文对国内外采用MEMS技术检测爆炸物的方法进行了分类,主要将其分为测温法、位移法、压阻法、谐振法等,分别介绍了它们的检测原理,分析了在灵敏度、选择性、抗环境干扰能力、系统集成与小型化等方面它们各自的潜在优势以及不足之处.同时,对近十年来该研究领域的进展和现状作了简要回顾,这些研究目前基本上都还处于实验室阶段,在真正达到实用化前还需要解决选择性、稳定性、抗环境干扰等技术难题.

关 键 词:MEMS  爆炸物检测
文章编号:1004-1699(2006)05-2096-04
修稿时间:2006年7月1日

Development of Explosive Detection with MEMS
KONG De-yi,ZHU Jian-bin,QI Yong-guang,LIN Bing-tao,ZHANG Zheng-yong,ZHANG Tao,LU Wei.Development of Explosive Detection with MEMS[J].Journal of Transduction Technology,2006,19(5):2096-2099.
Authors:KONG De-yi  ZHU Jian-bin  QI Yong-guang  LIN Bing-tao  ZHANG Zheng-yong  ZHANG Tao  LU Wei
Affiliation:I nstitute of I ntel l i gent Machines , Chinese A cademy of Sciences S tate Key L aboratory of Trans ducer Technology , Hef ei 230031 , China
Abstract:The development of explosive detection with MEMS technology was briefly reviewed. Various detecting methods were classified in microcalorimetric spectroscopy,displacement measuring with light reflecting,strain monitoring with piezoresistance,and resonance frequency shift measuring. The principle of each method were respectively introduced,its advantage and the disadvantage were discussed. However, research in this area is still at experimental status,qualifications such as identification accuracy,robust,noise-proof still need to be improved before application.
Keywords:MEMS
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