Residual stress of graded-index-like films deposited by radio frequency ion-beam sputtering |
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| Authors: | Chien-Jen Tang Kai Wu |
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| Affiliation: | a Department of Optics and Photonics/Thin Film Technology Center, National Central University, Chung-Li 320, Taiwan
b Department of Optoelectronic System Engineering, Minghsin University of Science and Technology, Hsin-Chu 304, Taiwan |
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| Abstract: | In this study, Ta2O5-SiO2 composite films with various proportions of Ta2O5 were prepared by radio frequency ion-beam sputtering deposition. The residual stress of each composite film was analyzed. The residual stresses of different graded-index-like layers made of composite films were studied. The results show that the residual stress of a single layered composite film was lower than that of pure SiO2 or a pure Ta2O5 film. Furthermore, when the composite film was made graded-index-like, the residual stress was reduced. |
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| Keywords: | Ta2O5-SiO2 composite film Graded-index optical filters Radio frequency ion-beam sputtering Residual stress |
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