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Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers |
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| Authors: | GCAM Janssen [Author Vitae] MM Abdalla [Author Vitae] [Author Vitae] BR Pujada [Author Vitae] [Author Vitae] |
| Affiliation: | a Materials Science & Engineering, TU Delft, Mekelweg 2, 2628 CD Delft, the Netherlands b Aerospace Structures & Materials, TU Delft, Kluyverweg 1, 2629 HS Delft, the Netherlands c Precision and Microsystems Engineering, TU Delft, Mekelweg 2, 2628 CD Delft, the Netherlands d Materials Innovation Institute, Mekelweg 2, 2628 CD Delft, Netherlands and Materials Science & Engineering, TU Delft, Mekelweg 2, 2628 CD Delft, the Netherlands e TNO Science and Industry, Stieltjesweg 1, 2600 AD Delft, the Netherlands |
| Abstract: | |
| Keywords: | Stress Thin film Coating Stoney Elastic anisotropy Silicon Wafer curvature |
| 本文献已被 ScienceDirect 等数据库收录！ | |