Abstract: | Orthorhombic Sc2Mo3O12 films have been successfully prepared via spin coating technique followed by annealing at 500–750 °C. The phase composition, microstructure, morphology and negative thermal behavior of the synthesized Sc2Mo3O12 films were investigated. XRD and XPS analysis indicate that as-deposited film is amorphous. Orthorhombic Sc2Mo3O12 films can be prepared after post-annealing at 500–750 °C for 1 h. The crystallinity of Sc2Mo3O12 films gradually improved with the increase of post-annealing temperature. SEM analysis shows as-deposited film is smooth and compact, and the grain size of Sc2Mo3O12 film grows up as the post-annealing temperature increases. Variable temperature XRD analysis demonstrates that the synthesized orthorhombic Sc2Mo3O12 films show stable thermo-chemical and anisotropic NTE property in 25–700 °C. The corresponding coefficients of thermal expansion (CTEs) of the orthorhombic Sc2Mo3O12 film in a, b and c directions are ?6.68 × 10?6 °C?1, 5.08 × 10?6 °C?1 and ?4.76 × 10?6 °C?1, respectively. The whole unit cell of the orthorhombic Sc2Mo3O12 film shrinks and the volumetric CTE of the Sc2Mo3O12 thin film is ?6.36 × 10?6 °C?1, and the linear CTE is about ?2.12 × 10?6 °C?1 (αv = 3αl). |