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| SiC反射镜表面改性研究进展 | |
| 引用本文： | 唐惠东,李龙珠,孙媛媛,谭寿洪,许俊宇. SiC反射镜表面改性研究进展[J]. 江苏陶瓷, 2011, 0(6): 8-12 |
| 作者姓名： | 唐惠东 李龙珠 孙媛媛 谭寿洪 许俊宇 |
| 作者单位： | 1. 常州工程职业技术学院材料工程技术系,常州,213164 2. 中国科学院上海硅酸盐研究所,上海,200050 3. 徐州师范大学科文学院,徐州,221116 |
| 摘 要： | 采用SiC陶瓷作反射镜是目前国际上的一个研究热点。但是SiC陶瓷用作反射镜时存在各种类型的缺点，必须对SiC反射镜表面进行改性。本文综述了各种表面改性方法、制备机理以及优缺点，最后展望了未来SiC反射镜的发展方向：即低成本化和大型化。 |
| 关 键 词： | SiC反射镜 表面改性 CVD SiC涂层 PVD Si涂层 |
Research Development of Surface Modification of SiC Mirror |
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| Tang Huidong,Li Longzhu,Sun Yuanyuan,Tan Shouhong,Xu Junyu. Research Development of Surface Modification of SiC Mirror[J]. Jiangsu Ceramics, 2011, 0(6): 8-12 | |
| Authors: | Tang Huidong Li Longzhu Sun Yuanyuan Tan Shouhong Xu Junyu |
| Affiliation: | 1.Department of Materials Engineering Technology, Changzhou Institute of Engineering Technology, Changzhou 213164; 2.Shanghai Institute of Ceramics, Chinese Academy of Science, Shanghai 200050;3.Xuzhou Normal University Kewen Institute, Xuzhou 221116) |
| Abstract: | It is a hotspot using SiC ceramic as mirror at present. When SiC ceramic is used as mirror, there exist various defects. Surface modification must be done on the SiC mirror. The methods of surface modifica-tion, the mechanism of preparation, the disadvantages and advantages are summed up in the paper. Two as-pects of cost-effectively and large-scaled are finally prospected in developing SiC mirror. |
| Keywords: | SiCmirror surface modification CVD SiC coating PVD Si coating |
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