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| 谐振式硅微机械加速度计研究进展 | |
| 引用本文： | 李晶,樊尚春,李成,余朝发.谐振式硅微机械加速度计研究进展[J].传感器与微系统,2011,30(12):4-7. |
| 作者姓名： | 李晶 樊尚春 李成 余朝发 |
| 作者单位： | 1. 中北大学信息与通信工程学院,山西太原030051;北京航空航天大学仪器科学与光电工程学院,北京100191 2. 北京航空航天大学仪器科学与光电工程学院,北京,100191 3. 武汉军械士官学校枪炮系,湖北武汉,430075 |
| 摘 要： | 谐振式硅微机械加速度计作为一种新型的对加速度进行测量的传感器,是通过检测加速度施加前后谐振敏感元件谐振频率变化实现对加速度检测的。该传感器具有频率信号输出、稳定性好、灵敏度高、精度高等优点,己成为微传感器的重要发展方向之一。汇总了该传感器的国内外相关研究现状,并对加工工艺进行了总结,讨论了谐振式硅微加速度计设计中的关键技术因素,并给出了未来的发展方向。 |
| 关 键 词： | 谐振式微机械加速度计 谐振敏感元件 谐振频率 灵敏度 |
Research progress of silicon resonant MEMS accelerometer |
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| LI Jing,FAN Shang-chun,LI Cheng,YU Zhao-fa.Research progress of silicon resonant MEMS accelerometer[J].Transducer and Microsystem Technology,2011,30(12):4-7. | |
| Authors: | LI Jing FAN Shang-chun LI Cheng YU Zhao-fa |
| Affiliation: | 1.School of Information and Communication Engineering,North University of China,Taiyuan 030051,China; 2.School of Instrumentation Science & Optoelectronics Engineering,Beijing University of Aeronautics & Astronautics,Beijing 100191,China; 3.Wuhan Ordnance Non-Commissioned officer Academy,Wuhan 430075,China) |
| Abstract: | The silicon resonant micro-electro-mechanical system(MEMS) accelerometer is a new kind of sensor which is used to measure the acceleration by detecting the change of resonant frequency of the sensitive element.This kind of sensor has many advantages such as frequency signal output,high stability and sensitivity.The fabrication process is also introduced in detail.General research prospect is summarized. |
| Keywords: | resonant MEMS accelerometer resonant sensitive element resonant frequency sensitivity |
| 本文献已被 CNKI 万方数据 等数据库收录！ | |