| 基于声表面波技术的微流体混合及仿真 |
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| 引用本文： | 郑利,张正,李丹,艾林,曾谦,朱红伟,国世上. 基于声表面波技术的微流体混合及仿真[J]. 传感技术学报, 2011, 24(8): 1098-1101. DOI: 10.3969/j.issn.1004-1699.2011.08.003 |
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| 作者姓名： | 郑利 张正 李丹 艾林 曾谦 朱红伟 国世上 |
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| 作者单位： | 武汉大学物理科学与技术学院,人工微纳结构教育部重点实验室,武汉430072 |
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| 摘 要： | 报道了在微流系统中使用基于叉指聚焦换能器的声表面波的一种有效方法.利用lift-off和软光刻技术在铌酸锂( LiNbO3)压电单晶片基底上制作器件.使用有限元分析软件COMSOL Multiphysics分别模拟聚焦叉指电极和平行叉指电极两种声表面波的形成和分布.通过与相同条件下的平行叉指电极比较,说明聚焦叉指电极可...
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| 关 键 词： | 声表面波 叉指换能器 模拟 混合 微流体系统 |
Microfluidic mixing and simulation via surface acoustic wave driving |
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| ZHENG Li,ZHANG Zheng,LI Dan,AI Lin,ZENG Qian,ZHU Hongwei,GUO Shishang. Microfluidic mixing and simulation via surface acoustic wave driving[J]. Journal of Transduction Technology, 2011, 24(8): 1098-1101. DOI: 10.3969/j.issn.1004-1699.2011.08.003 |
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| Authors: | ZHENG Li ZHANG Zheng LI Dan AI Lin ZENG Qian ZHU Hongwei GUO Shishang |
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| Affiliation: | Physics Department,Key Laboratory of Artificial Micro-and Nano-structures of Ministry of Education and School of Physics and Technology,Wuhan University,Wuhan 430072,China |
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| Abstract: | This work reported an effective approach using surface acoustic waves based on focused interdigital transducers(IDTs)in microfluidic systems.The device was fabricated using lift-off and soft lithography technologies on the piezoelectric LiNbO3 single-crystal substrate.Finite element analysis software(COMSOL Multiphysics)was employed to simulate the generation and distribution of the surface acoustic waves for focused and parallel IDTs,respectively.It demonstrated that the intensity of surface acoustic waves was dramatically enhanced by the focused IDTs,comparing with the parallel IDTs under the same conditions.The experiment results showed that the focused IDTs can mix polystyrene microparticles rapidly with several seconds.The device provides an affordable lab-on-chip system for biological applications. |
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| Keywords: | surface acoustic wave interdigital transducers simulation mixing microfluidec system |
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