| 基于PANI/PdO复合薄膜的压电甲烷传感器 |
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| 引用本文： | 李影,童敏明,唐守锋. 基于PANI/PdO复合薄膜的压电甲烷传感器[J]. 传感器与微系统, 2011, 30(8): 53-55 |
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| 作者姓名： | 李影 童敏明 唐守锋 |
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| 作者单位： | 中国矿业大学信息与电气工程学院,江苏徐州,221008 |
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| 基金项目： | 国家自然科学基金资助项目 |
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| 摘 要： | 研究了一种基于压电原理的甲烷传感器。运用化学氧化聚合法和层层自组装法制备了对甲烷气体敏感的PANI/PdO复合薄膜,通过溅射工艺将薄膜生成在压电材料上,利用敏感薄膜对甲烷的吸附改变晶振频率,从而检测出甲烷气体的含量。实验表明:压电甲烷传感器具有较好的选择性,在0%~2%的甲烷体积分数范围内具有较好的线性输出。
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| 关 键 词： | 聚苯胺 复合薄膜 压电传感器 甲烷气体 |
A piezoelectric methane sensor based on PANI/PdO composite thin film |
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| LI Ying,TONG Min-ming,TANG Shou-feng. A piezoelectric methane sensor based on PANI/PdO composite thin film[J]. Transducer and Microsystem Technology, 2011, 30(8): 53-55 |
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| Authors: | LI Ying TONG Min-ming TANG Shou-feng |
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| Affiliation: | (School of Information and Electrical Engineering,China University of Mining and Technology,Xuzhou 221008,China) |
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| Abstract: | A kind of methane sensor based on the principle of piezoelectricity is developed.The PANI/PdO composite thin film is fabricated by chemical oxidative polymerization of aniline with PdO nanoparticles,and the PANI/PdO thin films which is sensitive to methane is fabricated through layer-by-layer self-assembly method.The film is deposited on the piezoelectric material by sputtering.It accomplishes the detection of CH4 by the absorption of CH4 which can change the oscillation frequency of the piezoelectric crystal.The experimental results show that the sensor has good selectivity.And the output of the sensor has good linear relationship with the volume fraction range of CH4 0 % ~2 %. |
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| Keywords: | polyaniline(PANI) composite thin film piezoelectric sensor methane gas |
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