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无线通讯用硅基微小Spiral天线的设计和制作
引用本文:郭兴龙,黄静. 无线通讯用硅基微小Spiral天线的设计和制作[J]. 传感技术学报, 2011, 24(11): 1561-1563. DOI: 10.3969/j.issn.1004-1699.2011.11.010
作者姓名:郭兴龙  黄静
作者单位:南通大学电子信息学院,江苏南通,226019
基金项目:南通大学博士科研启动资金;南通大学自然基金(10Z023)
摘    要:微小双波段天线通过采用微电子加工工艺在高电阻率硅片上被设计和制备,测试得到天线基本为全向辐射,增益为2.8 dB,谐振频率分别为7.6 GHz和20.2 GHz,反射系数分别为25 dB和23 dB,此天线的设计制造利于IC集成.文章还重点对天线的制作工艺进行了详细地介绍,对于以后此类研究具有一定的参考价值.

关 键 词:微小  Spiral天线  硅基底  IC工艺

Design and Fabrication of Miniature SpiralAntenna Based on Silicon Substrate Using Wireless Communication
GUO Xinglong,HUANG Jing. Design and Fabrication of Miniature SpiralAntenna Based on Silicon Substrate Using Wireless Communication[J]. Journal of Transduction Technology, 2011, 24(11): 1561-1563. DOI: 10.3969/j.issn.1004-1699.2011.11.010
Authors:GUO Xinglong  HUANG Jing
Affiliation:(School of Electronics and Information,Nantong University,Nantong Jiangsu 226019,China)
Abstract:In this paper,small antenna was designed and fabricated on high-resistivity silicon(HR-Si)by micro-electronics process.The result of measurement for the antenna mode is omnidirectional radiation pattern.The gain of antenna is 2.8 dB,and the resonance frequency approximately is 7.6 GHz and 20.2 GHz,respectively.The S11 of the antenna is 25 dB and 23 dB.This fabrication can be compatibled with antenna integration and CMOS process.The fabrication process of the antenna has been detailed.It is reference for such reseach.
Keywords:miniature  spiral antenna  silicon substrate  IC process
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