| 微机械气流式倾角传感器的研究 |
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| 引用本文： | 朴林华,崔雪梅,余全刚,王星,梅传志,张保丽.微机械气流式倾角传感器的研究[J].传感器与微系统,2011,30(12):60-61,64. |
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| 作者姓名： | 朴林华 崔雪梅 余全刚 王星 梅传志 张保丽 |
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| 作者单位： | 1. 北京信息科技大学北京市传感器重点实验室,北京,100101
2. 延边大学师范学院,吉林延吉,133002 |
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| 基金项目： | 国家自然科学基金资助项目(60772012);新世纪优秀人才支持计划资助项目(NCET);北京市重点实验室开放课题资助项目;北京市新世纪百千万人才工程培养计划资助项目;现代测控技术教育部重点实验室资助项目;北京市教委科技面上项目(KM201110772020) |
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| 摘 要： | 提出了一种能敏感倾角的微机械气流式传感器.采用微机械工艺在硅板上腐蚀出一个深槽,在深槽上设置2个有金属薄膜热敏电阻器的悬臂梁,用半圆球外壳封装成一个密闭腔体形成敏感元件；通过惠斯登电桥提取倾角电压信号；利用单片机和温度传感器构成补偿电路,实现温度补偿和线性度补偿.测试结果表明:测量范围为+30°,分辨率为优于0.1°,...
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| 关 键 词： | 微机械 倾角 气流 敏感元件 |
Research on micromachined airflow tilt sensor |
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| PIAO Lin-hua,CUI Xue-mei,YU Quan-gang,WANG Xing,MEI Chuan-zhi,ZHANG Bao-li.Research on micromachined airflow tilt sensor[J].Transducer and Microsystem Technology,2011,30(12):60-61,64. |
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| Authors: | PIAO Lin-hua CUI Xue-mei YU Quan-gang WANG Xing MEI Chuan-zhi ZHANG Bao-li |
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| Affiliation: | 1(1.Beijing Key Laboratory for Sensor,Beijing Information Science & Technology University, Beijing 100101,China; 2.Normal College,Yanbian University,Yanji 133002,China) |
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| Abstract: | Micromachine airflow tilt sensor which can be sensitive to tilt angle is described.Adopting micro-machined technique two deep groove are corroded on the silicon plate,and two cantilever beams of metal film heated hot wire is set up at each deep groove.Semicircle airtight space forms sense elements.Through Wheatstone bridge,the tilt output voltage is obtained.Single-chip computer and temperature sensor constitute compensation circuit to achieve temperature compensation and linear compensation.The test shows the sensor’s performance is as follow: measuring range is ±30°,resolution is less than 0.1°,working temperature is better than 50 ms,nonlinear is less than 0.1 %.The sensor is not only in small size but also in simply crafting.It is good in sensitive organ’s output consistency,and suitable for mass production. |
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| Keywords: | micromachine tilt angle airflow sensitive element |
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