| Abstract: | Abstract— A GxL device is a one‐dimensional light modulator suitable for laser projectors. A blazed GxL, which diffracts the incident laser beam in only one direction was developed, and a contrast ratio of 10,000:1 and a diffraction efficiency of 70% was achieved by nanometer‐order control of ribbons based on the MEMS structural simulation and using common 0.25‐μm CMOS‐compatible fabrication processes. The 1.09‐in.‐long 1080‐pixel blazed GxL was implemented in the 2005‐in. Laser Dream Theater at the 2005 World Exposition in Aichi, Japan, and performed perfectly during that period. Recently, by optimizing the posts supporting the ribbon and flattening of the sacrificial layer using chemical mechanical polishing, an ultra high contrast ratio of 34,700:1 with a 0.72‐in.‐long GxL has been realized, and a smaller ceramic module with high reliability has also been realized. The blazed GxL will be a promising technology to further advance laser‐projector performance. |
