磁控溅射Ti膜对AZ91镁合金耐磨耐蚀性能的影响

目的通过表面镀Ti膜提高AZ91镁合金的耐磨性能。方法通过直流磁控溅射方法在AZ91镁合金表面镀Ti膜,用拉伸实验法在电子万能实验机上测定薄膜的附着强度,用原子力显微镜观察薄膜与基体的界面形貌,并分析不同溅射参数时膜基的结合能力。通过湿摩擦实验分析两种试样的耐磨性能,采用Js M-670l F冷场发射型扫描电子显微镜观测两种试样磨损后的表面形貌。采用动电位极化曲线测试装置测得两试样的极化曲线,从而判定其耐腐蚀能力。结果通过直流磁控溅射方法制备的Ti膜和AZ91镁合金基体的结合能力与溅射时间有关,当溅射时间为6 min时,膜基结合能力最佳,但结合其他两项参数,所制备试样采用的时间应为4 min。AZ91镁合金镀Ti膜后磨损率降低,腐蚀电流降低,腐蚀电位升高。结论直流磁控溅射方法镀Ti膜提高了AZ91镁合金的耐磨耐蚀性能。

Effects of Magnetron Sputtering Ti Films on Wear Resistance and Corrosion Resistance of AZ91 Magnesium Alloy

The work aims to improve wear resistance of AZ91 magnesium alloy by plating Ti films. Ti films were plated on AZ91 magnesium alloy in the method of DC magnetron sputtering. Adhesive strength of the films was measured on an electronic universal tester in the method of tensile experiment, film-substrate interface morphology was observed with an atomic force microscope (AFM), and film-substrate binding capacity was analyzed provided with different sputtering parameters. Wear resistance of the two samples was analyzed by performing wet friction experiment. Surface morphology of the two worn samples was observed with JsM-670lF cold field emission SEM. Polarization curves of the two samples were measured with polarization curve testing device to determine corrosion resistance. Binding capacity between the Ti films prepared in the method of DC magnetron sputtering and AZ91 magnesium alloy substrate related to sputtering duration. The film-substrate binding capacity was the best when the sputtering duration was 6 min. Allowing for other two parameters, it should take 4 min to prepare the samples in this paper. Wear rate and corrosion current both decrease while corrosion potential increases after AZ91 magnesium alloy is plated with Ti films. Both wear resistance and corrosion resistance are improved by Ti film plating in the method of DC magnetron sputtering.