| 薄膜型TiO_2氧传感器响应时间的测试与研究 |
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| 引用本文： | 陈玉峰,李懋强.薄膜型TiO_2氧传感器响应时间的测试与研究[J].传感器与微系统,1995(3). |
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| 作者姓名： | 陈玉峰 李懋强 |
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| 作者单位： | 中国建筑材料科学研究院高技术陶瓷研究所 |
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| 摘 要： | 讨论了氧分压测试的原理、方法，利用计算机实现了数据采集自动化．用Ｓｏｌ－ｇｅｌ方法制备出了薄膜型ＴｉＯ２氧传感器，并对传感器的响应时间进行了测试与分析，发现温度和催化剂对其响应时间有很大的影响．
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| 关 键 词： | 氧化钛薄膜，响应时间，氧分压，氧传感器 |
Measurement and Study of Response Time of TiO_2 Thin Film Oxygen Sensors |
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| Chen Yufeng, Li Maoqiang.Measurement and Study of Response Time of TiO_2 Thin Film Oxygen Sensors[J].Transducer and Microsystem Technology,1995(3). |
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| Authors: | Chen Yufeng Li Maoqiang |
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| Abstract: | The principles and methods of measurement of oxygen partial pressure were discussed. Data collecting was automatized by using a computer.The response time of TiO2 thin film oxygen sensors prepared by Sol-gel technique was measured and analyzed. It was found that temperature and catalyst had an important influence on the response time. |
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| Keywords: | TiO_2 thin film Response time Oxygen partial pressure Oxygen sensor |
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