硅基MEMS渐变式缝隙天线

为了增加天线带宽,提高天线机械稳定性,改善天线性能,提出并设计制作了一种工作在35 GHz的硅基MEMS渐变式缝隙天线。针对渐变式缝隙天线在毫米波频段介电常数高、衬底极薄、易碎、不易制作等问题,利用ICP深刻蚀工艺在衬底上形成了周期性通孔阵列,从而减小了衬底有效介电常数,增加了衬底厚度,同时利用共面波导-槽线对该天线进行馈电。仿真结果表明,该天线带宽为28.2%,增益为8.7 dB。采用微机械工艺对该天线进行加工,测得其带宽为13.2%。与传统天线相比,该天线进一步提高了天线衬底的机械稳定性,增加了天线带宽,且易于集成。

Tapered slot antenna on micromachined silicon substrate

A Tapered Slot Antenna (TSA) fed by a Coplanar Waveguide(CPW) on a high dielectric constant substrate (εr=11.9) worked at 35 Ghz is presented. The performance of the TSA is sensitive to the effective thickness and electric constant of the substrate. In consideration of thin and fragile features of the high dielectric constant substrate for millimeter-wave application, a series of very closely spaced holes are formed on the substrate by using a deep etch technology, which synthesizes a localized low dielectric-constant environment and increases the effective thickness of the substrate. Other wise, CPW-to-SLOT transitions with low insertion losses are proposed to feed this antenna. The simulation results show that the bandwidth and the gain of the antenna have been achieved 28.2% and8.7 dB,respectively. After using micromachining technologies, the measured result shows the bandwidth is 13.2%. The difference between simulation and measurement is mainly attributed to the improvement for fabrication errors and measurement loads. This CPW-fed TSA has been expected to apply to communication systems for its easy integration with the uniplanar monolithic millimeter-wave integrated circuits.