Mechanism of carbon film formation in a discharge with crossed electric and magnetic fields in neon and argon

The process of carbon-film formation in a discharge with crossed electric and magnetic fields in neon and argon has been studied in a system with a cylindrical geometry of electrodes. Radial profiles of the film thickness on an edge substrate have been measured using an interferometric technique. A diffusion model of film formation is proposed, which takes into account the inert gas ion charge exchange and gas heating processes. Experimental data are compared to the results of model calculations.