Simple modifications for accurate high-temperature gas exposures using scanning electron microscopy

Relatively low-cost modifications to standard commercial scanning electron microscopes (SEM) that allow accurate exposure of sample(s) to noncorrosive gases at ambient and high temperatures are outlined. Energy-dispersive spectroscopic analysis of sample(s) exposed to noncorrosive gases at high temperatures is demonstrated. Gas exposure is limited to pressures of less than 10^?4 torr (1.33 × 10^?2 Pa) as a result of limitations on SEM system operation and SEM safety interlocks. Gases are limited to noncorrosive types as a result of potential damage to system detection devices and internal mechanical parts.