Effects of the introduction of the discrete energy loss process into Monte Carlo simulation of electron scattering

First, the single scattering model is briefly described. Next, the hybrid model is explained, which takes into consideration a part of the discrete energy loss processes. The Vriens or the Gryzinski cross section is used for core electron ionizations, and the Moller cross section for free electron excitations. The model is applied to the calculations of the energy distribution of transmitted electrons through a thin film and the depth distribution of generated x-rays. From comparisons among the calculated results with and without energy straggling and experimental data, it is found that the Gryzinski cross section shows the best result.