熔盐热析出反应金属化Si3N4与Si3N4的连接

在采用熔盐热析出反应在Ｓｉ３Ｎ４陶瓷表面沉积钛金属膜的基础上，对ＣｕＡｇ合金在金属化表面的润湿性进行了研究，结果表明，ＣｕＡｇ合金能对采用该方法金属化的Ｓｉ３Ｎ４陶瓷实现良好润湿，在此基础上，成功实现了钛金属化Ｓｉ３Ｎ４陶瓷与Ｓｉ３Ｎ４陶瓷的连接并对连接工艺进行了系统研究。连接界面的ＴＥＭ研究发现，界面上广泛存在Ｔｉ－Ｃｕ－Ｓｉ－Ｎ相并对这种相对连接强度的影响进行了讨论。

Joining of Molten Salt Reaction Metallized Si3N4 to Si3N4

Based on the deposition of titanium films on Si3N4 surface by molten salt reactions,the wetting behavior of a liquid CuAg eutectic alloy on the titanium metallized Si3N4 was studied,it was found that, the metallized sample can be fully wetted by the eutectic alloy. Based on this result, the joining of metallized Si3N4 to Si3N4 waJs successfully obtained and the joining technique was systematically studied. TEM observation on the interfacial structure of the joints found that Ti-Cu-Si-N phases widely existed at the interface and their possible effects on the shear strength of the joints were also discussed.