| 类金刚石膜的制备方法和性能 |
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| 引用本文： | 李雪. 类金刚石膜的制备方法和性能[J]. 重庆理工大学学报(自然科学版), 2009, 23(6): 165-171 |
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| 作者姓名： | 李雪 |
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| 作者单位： | 绍兴文理学院物理与电子信息系; |
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| 基金项目： | 国家自然科学基金资助项目(60776004) |
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| 摘 要： | 分析了类金刚石(DLC)膜的结构、性能及影响因素,对类金刚石膜的应用进行了阐述,并对DLC的几种制备方法,包括物理气相沉积法、化学气相沉积(CVD)和等离子体增强化学气相沉积法进行了介绍.
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| 关 键 词： | 类金刚石膜 制备方法 结构 |
Preparation Method and Performance of DLCF |
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| LI Xue. Preparation Method and Performance of DLCF[J]. Journal of Chongqing University of Technology(Natural Science), 2009, 23(6): 165-171 |
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| Authors: | LI Xue |
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| Affiliation: | Department of Physics;Electronics and Information;Shaoxing University;Shaoxing 312000;China |
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| Abstract: | This paper analyzes the structure,performance and influential factors of diamond-like carbon(DLC) film,elaborates its application,and introduces the preparation methods of DLC including PCVD method,CCVD method and plasma-strengthened CCVD. |
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| Keywords: | DLCF structure performance |
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