| 元胞自动机方法模拟硅的各向异性腐蚀研究 |
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| 引用本文： | 周再发,黄庆安,李伟华,王涓,孙岳明.元胞自动机方法模拟硅的各向异性腐蚀研究[J].固体电子学研究与进展,2006,26(1):128-133. |
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| 作者姓名： | 周再发 黄庆安 李伟华 王涓 孙岳明 |
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| 作者单位： | 1. 东南大学MEMS教育部重点实验室,南京,210096
2. 东南大学化学化工系,南京,210096 |
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| 基金项目： | 国家杰出青年科学基金
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国家科技攻关项目 |
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| 摘 要： | 随着计算机运算速度的提高及M EM S结构变得日渐复杂,元胞自动机(CA)方法逐渐在M EM S CAD方面显出优势。针对硅的各向异性腐蚀模拟,首先建立硅衬底表面元胞的腐蚀过程二维CA模型,然后推广为三维CA模型,从而建立了硅的各向异性腐蚀的连续CA模型。已有实验结果和理论分析证明了模型的效果。
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| 关 键 词： | 元胞自动机 腐蚀模拟 微加工技术 微电子机械系统 各向异性腐蚀 |
| 文章编号： | 1000-3819(2006)01-128-06 |
| 收稿时间： | 2004-12-28 |
| 修稿时间： | 2005-03-08 |
Study on Simulation of Silicon Anisotropic Etching Using Cellular Automata Method |
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| ZHOU Zaifa,HUANG Qing'an,LI Weihua,WANG Juan,SUN Yueming.Study on Simulation of Silicon Anisotropic Etching Using Cellular Automata Method[J].Research & Progress of Solid State Electronics,2006,26(1):128-133. |
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| Authors: | ZHOU Zaifa HUANG Qing'an LI Weihua WANG Juan SUN Yueming |
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| Affiliation: | 1.Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, 210096, CHN;2.Department of Chemistry and Chemical Engineering, Southeast University, Nanfing, 210096, CHN |
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| Abstract: | With the progress of computer computing speed and increasing complex structures for MEMS,the application of cellular automata(CA) methods in MEMS simulation is preferred,because CA method exhibits high efficiency and high accuracy when handling complex mask shapes and forming 3-D structures. A CA model is presented in two dimensions,and extended to three dimensions for silicon anisotropic etching.The effectiveness of the simulation results was confirmed using the available experimental results and theoretical analysis. |
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| Keywords: | cellular automata etching simulation micromachining MEMS anisotropic etching |
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