微细孔电解加工控制方法及试验研究

基于微细电解加工的特点，介绍了一种微细电解加工系统。该系统能够将加工间隙控制到几微米到几十微米的范围内。根据电解加工以离子形式对材料去除的特性，进行微细电极、微细群电极的制备研究，并将其用于微细孔、群孔的加工中。试验分析了各工艺参数如电压、溶液浓度、加工间隙、进给速度等对微细孔电解加工精度的影响。结果表明，微细电解加工的侧面间隙随着加工电压的降低、溶液浓度的减小、脉宽变窄和初始加工间隙的减小而减小，改善了加工的定域性，加工精度得到提高。

Control and Experimental Research on Microhole Machining in Micro-ECM

The paper presented a micro-system for electrochemical micromachining(EMM).The interelectrode gap could be controlled only within several to several ten microns using this system.This study also showed the machining method of micro-electrode based on electrochemical principle.Furthermore,these electrodes were used for micro-hole and micro-multi-hole machining in EMM.Various parameters affecting the precision of the workpiece,such as voltage,concentration of electrolyte,machining gap,speed of machining,etc.were discussed in detail.Results show that the side gap decreases with the decrease of voltage,concentration electrolyte,pulse-on time and machining gap.Localization and the precision of electrochemical micromachining are improved.