| 用准分子激光CVD制作SnO2微透镜及其阵列的技术研究 |
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| 引用本文： | 王庆亚,马力,等.用准分子激光CVD制作SnO2微透镜及其阵列的技术研究[J].激光技术,1996,20(3):164-167. |
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| 作者姓名： | 王庆亚 马力 |
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| 作者单位： | 1.吉林大学, 电子工程系, 集成光电子国家重点实验室吉林大学实验区, 长春, 130023 |
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| 摘 要： | 本文利用准分子激光CVD技术以液态SnCl4和氧气为源制出了半径45μm的SnO2薄膜微透镜及微透镜阵列。并从反应机制和生长规律出发对这一生长技术特点和前景进行了阐述。
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| 关 键 词： | 准分子激光CVD 微透镜 微透镜阵列 |
| 收稿时间： | 1995-03-10 |
| 修稿时间： | 1995-12-26 |
Study on the fabrication technology of SnO_2 microlens and its array by using excimer laser-CVD technique |
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| Wang Qingya, Ma Li, Zhao Fanghai, Zheng Wei, Zhang Yushu, Gao Dingsan.Study on the fabrication technology of SnO_2 microlens and its array by using excimer laser-CVD technique[J].Laser Technology,1996,20(3):164-167. |
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| Authors: | Wang Qingya Ma Li Zhao Fanghai Zheng Wei Zhang Yushu Gao Dingsan |
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| Abstract: | Here we fabricate a microlens with 45μm radius and its array with liquid SnCl4 and oxygen as the sources by using excimer laser CVD technique. Acording to its growing mechanism and growing law,we also show the characteristics and the prospects of this technology. |
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| Keywords: | excimer laser-CVD microlens microlens array |
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