Novel fabrication of extremely high aspect ratio and straight nanogap and array nanogap electrodes |
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| Authors: | Hashemi Mir Mehdi Nikfarjam Alireza Raji Hasan |
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| Affiliation: | 1.MEMS&NEMS Laboratory, Faculty of New Sciences and Technologies, University of Tehran, Tehran, P.O. Box 14395-1561, Iran
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| Abstract: | Microsystem Technologies - We reported a reproducible, simple and novel method for fabricating electrodes with high aspect ratio and highly straight nanometer size gap. The gap size could be... |
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