Phase diagram study and thermodynamic assessment of the Y2O3-YF3 system |
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| Affiliation: | 1. Department of Materials Science and Engineering, Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, South Korea;2. Research Institute of Advanced Materials (RIAM), Seoul National University, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, South Korea;1. Chaozhou Branch of Chemistry and Chemical Engineering Guangdong Laboratory, Chaozhou 521031, China;2. State Key Laboratory of Silicate Materials for Architectures, Wuhan University of Technology, Wuhan 430070, China;3. State Key Lab of Advanced Technology for Materials Synthesis and Processing, Wuhan University of Technology, Wuhan 430070, China;4. School of Science, Wuhan University of Technology, Wuhan 430070, China;1. Department of Prosthodontics, Faculty of Medicine, University of Ljubljana, Hrvatski trg 6, SI-1000 Ljubljana, Slovenia;2. Department for Nanostructured Materials, Jo?ef Stefan Institute, Jamova 39, SI-1000 Ljubljana, Slovenia;3. National Institute of Chemistry, Hajdrihova19, SI-1000 Ljubljana, Slovenia;4. Department of Materials Science, Montanuniversität Leoben, A-8700 Leoben, Austria;1. College of Materials Science and Engineering, Nanjing University of Aeronautics and Astronautics, 211106 Nanjing, China;2. Jiangsu Key Laboratory of Advanced Structural Materials and Application Technology, Nanjing Institute of Technology, China;3. Fracture and Reliability Research Institute, Tohoku University, Sendai 980–8579, Japan;4. Institute for Materials Research, Tohoku University, Sendai 980–8577, Japan;5. Key Laboratory of Aero-engine Thermal Environment and Structure, Ministry of Industry and Information Technology, Jiangsu Province Key Laboratory of Aerospace Power System,College of Energy and Power Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, PR China;1. State Key Laboratory of Superhard Materials, College of Physics, Jilin University, Changchun 130012, Jilin, China;2. Key Laboratory of Material Physics of Ministry of Education, School of Physical Engineering, Zhengzhou University, Zhengzhou 450052, Henan, China |
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| Abstract: | The phase diagram of the Y2O3-YF3 system up to 1973 K was investigated using a classical equilibration/quenching experiment and differential thermal analysis (DTA). Equilibrium phases were confirmed by electron probe microanalysis (EPMA) and X-ray diffraction (XRD) phase analysis. For the very first time, the entire range of the phase diagram of yttrium oxy-fluoride system up to 1973 K was experimentally determined. Cubic-Y2O3 phase dissolves more than 5 mol% of YF3 at 1973 K. The melting points of YOF and vernier phases are found to be higher than 1973 K and their steep liquidus in the YF3-rich region are determined. Based on new experimental phase diagram data and thermodynamic property data in the literature, the Y2O3-YF3 system was thermodynamically modeled by the CALculation of PHAse Diagram (CALPHAD) method. As applications of the thermodynamic database, metastable solubilities of YF3 in Y2O3 during plasma etching process were calculated. |
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| Keywords: | YOF Vernier phase Phase diagram CALPHAD |
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