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Analysis of microstructure replication using vibratory assisted thermal imprint process
Authors:Sodah  Amer  Gaidys  Rimvydas  Narijauskaitė   Birutė  Šakalys  Rokas  Janušas  Giedrius  Palevičius  Arvydas  Palevičius  Paulius
Affiliation:1.Faculty of Mechanical Engineering and Design, Kaunas University of Technology, Studentu str. 56, 51424, Kaunas, Lithuania
;2.Faculty of Mathematics and Natural Sciences, Kaunas University of Technology, Studentu str. 50, 51368, Kaunas, Lithuania
;
Abstract:Microsystem Technologies - In this article, thermal imprint process for replication of high-quality microstructures on the surface of polymer is investigated. Vibrations has been previously...
Keywords:
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