|
|||||
|
|
Laterally vibrating MEMS resonant vacuum sensor based on cavity-SOI process for evaluation of wide range of sealed cavity pressure |
|
| Authors: | Liu Cong Froemel Joerg Chen Jianlin Tsukamoto Takashiro Tanaka Shuji |
| Affiliation: | 1.Department of Robotics, Graduate School of Engineering, Tohoku University, Sendai, 980-8579, Japan ;2.Microsystem Integration Center, Tohoku University, Sendai, 980-8579, Japan ;3.WPI Advanced Institute for Materials Research, Tohoku University, Sendai, 980-8577, Japan ; |
| Abstract: | Microsystem Technologies - This paper reports a laterally vibrating MEMS resonant vacuum sensor which senses ambient pressure based on the squeeze-film damping effect. The single-anchored... |
| Keywords: | |
| 本文献已被 SpringerLink 等数据库收录！ | |