Micro-forming characteristics of a Zr-based amorphous alloy with a gear-like mold

The amorphous alloy Zr₆₂Cu₁₇Ni₁₃Al₈ exhibits a supercooled liquid state over a wide temperature range under high temperatures. In this present paper, the authors studied the micro-forming ability of the alloy by compressing specimens under a miniature pattern mold with a micro-gear shape. Micro-compressive formation is a formation method in which the surface of specimens of the Zr₆₂Cu₁₇Ni₁₃Al₈ amorphous alloy is compressed under conditions of dead loads and high temperatures and maintained for a given period for the fabrication of miniature patterns with a micro-gear shape. All the experiments were carried out under a vacuum environment to prevent the specimens from suffering deleterious effects, such as air traps in the miniature patterns and oxidation at the surface of the Zr₆₂Cu₁₇Ni₁₃Al₈ amorphous alloy. The characteristics of micro-compressive formation were investigated at temperatures higher than the glass transition temperature with different experimental parameters of loads and times. In addition, the micro-forming characteristics of the gear-like shape were investigated by means of scanning electron microscopes and a 3-D surface profiler system.