Utilisation de la deflection photothermique pour l'etude de l'effet du chlore sur l'absorption par les etats de la bande interdite dans a-SiHCl

Chlorinated and hydrogenated amorphous silicon (a-SiHCl) have been prepared by glow-discharge of a gas mixture (SiCl₄+H₂). Optical absorption and photothermal deflection spectroscopy have been made on samples with different chlorine contents. Due to its higher sensitivity, the photothermal deflection spectroscopy shows a decrease of the gap states absorption at low energies when the chlorine content is increased.