单相激励电容式时栅角位移传感器研究

针对现有多相激励时栅角位移传感器在小体积时无法设置更多极对数进一步提升稳定性，导致精度和动态性能指标无法得到提升等问题，提出一种单相激励电容式时栅角位移测量方法。该方法采用单相激励耦合成四路空间正交的驻波信号，通过电路实现行波构造，从而实现角位移测量。文中介绍了多相激励时栅传感器存在的问题、单相激励时栅的测量原理，完成了传感器样机的研制，并通过实验验证该原理的有效性。实验结果表明，相同尺寸和相同电极数量情况下，单相激励传感器的精度和动态性能指标优于多相激励传感器，单相激励传感器精度为±20″,稳定性为10″,400 rpm转速下速度波动为±1.25%,跟随误差为±2.5″,满足直驱电机的使用要求。

Study on capacitive type time-grating angular position sensorwith single-phase excitation

Because of these shortcomings of the existing time-grating angular position sensor with multi-phase excitation, such as theaccuracy, stability and dynamic performance improved difficulty in a small volume because of the difficulty of arranging further polepairs, an angular position measurement method for capacitive type time-grating with single-phase excitation is proposed. In this method,the single-phase excitation is used to couple into four orthogonal signals in the space field, which can be constructed travelling-wave intime and space field simultaneously by a circuit. Then, an angular position measurement can be realized. In this article, theseshortcomings of time-grating with multi-phase excitation, the measurement principle of time-grating with single-phase excitation, and thesensor prototype are introduced. The effectiveness of this measurement principle is evaluated by experiments. Experimental results showthat the accuracy and dynamic performance of single-phase excitation sensors are better than multiphase excitation sensors with the samesize and the same number of electrodes. the prototype accuracy of ±20″ and stability of 10″ were obtained. Speed fluctuation of ±1. 25%and the following error is ±2. 5″ under 400 rpm can meet the requirements of direct-drive motors.