| 磨轮进给系统精度设计 |
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| 引用本文： | 柳滨. 磨轮进给系统精度设计[J]. 电子工业专用设备, 2006, 35(4): 31-34,50 |
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| 作者姓名： | 柳滨 |
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| 作者单位： | 中国电子科技集团公司第四十五研究所,北京,东燕部,101601 |
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| 摘 要： | 从机械设计和电气控制设计论述了晶片减薄机磨轮进给系统设计,尤其是磨轮进给系统定位精度实现的途径和关键环节。
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| 关 键 词： | 滚珠丝杠副 滚动直线导轨 传动定位刚度 定位误差 闭环伺服控制 在线检测仪 |
| 文章编号： | 1004-4507（2006）04-0031-04 |
| 收稿时间： | 2006-01-15 |
| 修稿时间： | 2006-01-15 |
Accuracy Design For Grinding Wheel Vertical Movement |
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| LIU Bin. Accuracy Design For Grinding Wheel Vertical Movement[J]. Equipment for Electronic Products Marufacturing, 2006, 35(4): 31-34,50 |
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| Authors: | LIU Bin |
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| Affiliation: | The 45th Institute of CETC, Beijing East Yanjiao, 101601, China |
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| Abstract: | According to mechanical design and electric design, this paper discusses the design for the grinding wheel vertical movement of wafer grinder. Especially put forward the achieved approach and key method to locating accuracy of the grinding wheel vertical movement. |
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| Keywords: | Ball Screws Linear guider Transmission locating rigidity Locating errors Closed loop servo- control Online detector |
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