一种大厚度的三轴差分电容式硅微加速度计

介绍了一种新型三轴全差分电容式加速度计的设计和制备。设计的加速度计采用了三个共用同一玻璃衬底的大厚度差分电容式微结构，分别用于检测三个垂直方向的加速度。同时，对所设计的微结构从理论和数值上进行了详细的分析。用有限元分析工具ANSYS对器件进行了模拟，模拟结果显示出器件设计的合理性。最后，给出了制备工艺和测试结果。

A Triaxial Differential-capacitive Silicon Miniature Accelerometer with Large Height

A novel triaxial fully differential capacitive accelerometer has been designed and fabricated. The accelerometer has three independent microstructures with large height on a common glass substrate detecting the acceleration vector. The structures of the accelerometer are analysed in detail theoretically and numerically. The designed structures of the accelerometer are simulated using FEM program ANSYS. It is found that the design is feasible. At last, the fabrication and the basic performances are given.