| 从还原副产物中提纯二氯二氢硅和三氯氢硅的新工艺 |
| |
| 引用本文： | 杨永亮,姜利霞,严大洲,肖荣晖. 从还原副产物中提纯二氯二氢硅和三氯氢硅的新工艺[J]. 有色冶金节能, 2013, 0(6): 53-56,44 |
| |
| 作者姓名： | 杨永亮 姜利霞 严大洲 肖荣晖 |
| |
| 作者单位： | 中国恩菲工程技术有限公司,北京100038 |
| |
| 摘 要： | 针对二氯二氢硅对多晶硅生长过程中的促进作用,介绍了一种从还原副产物中提纯二氯二氢硅和三氯氢硅混合物的新工艺.对比了新工艺和常规工艺的技术指标,通过生产试验和分析,验证了新工艺具有简化工艺、降低投资和节能降耗的先进性.
|
| 关 键 词： | 多晶硅 还原副产物 二氯二氢硅 三氯氢硅 |
A New Separation Technology of Dichlorosilane and Trichlorosilane from Reduction of By-products |
| |
| YANG Yong-liang,JIANG Li-xia,YAN Da-zhou,XIAO Rong-hui. A New Separation Technology of Dichlorosilane and Trichlorosilane from Reduction of By-products[J]. Energy Saving Of Non-Ferrous Metallurgy, 2013, 0(6): 53-56,44 |
| |
| Authors: | YANG Yong-liang JIANG Li-xia YAN Da-zhou XIAO Rong-hui |
| |
| Affiliation: | YANG Yong-liang, JIANG Li-xia, YAN Da-zhou, XIAO Rong-hui |
| |
| Abstract: | Based on advancement of dichlorosilane in CVD process,A new separation technology is proposed, which can obtain the mixture of dichlorosilane and trichlorosilane from the distillation of reduction of by-products. The compared technological parameters was compared with conventional process according to the product test and analysis. Simplifying technology, reducing investment and energy consumption have been,which shows that the new separation process have a great advantage. |
| |
| Keywords: | polysilicon reduction of by-products dichlorosilane trichlorosilane |
| 本文献已被 维普 等数据库收录！ |
|
