| Abstract: | Ti0.5Al0.5N coatings were deposited on TC11(Ti-6.5Al-3.5Mo-1.5Zr-0.3Si) and silicon substrates using a cathode arc ion-plating system.The microstructure, composition, phase structure, and oxidation-resistance of the alloys and nitride coatings were investigated by scanning electron microscopy, X-ray diffraction, transmission electron microscopy, Auger electron spectroscopy, and thermal analyzer.The results show that the oxidation resistance of the titanium alloy is relatively limited;the compound structures of Ti mixed with Al oxides are formed during the heating process.The phases of the Ti0.5Al0.5N coatings are composed of a TiN solid solution phase.The oxidation kinetics obeys the parabolic law.During the oxidation process, the selective oxidation of Al occurs, thus protecting the underlying coating and substrate. |
