| 碳纳米管冷阴极超高真空鞍场规的电场模拟与实验研究 |
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| 引用本文： | 盛雷梅,魏洋,柳鹏,刘亮,齐京,范守善.碳纳米管冷阴极超高真空鞍场规的电场模拟与实验研究[J].真空,2005,42(4):29-31. |
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| 作者姓名： | 盛雷梅 魏洋 柳鹏 刘亮 齐京 范守善 |
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| 作者单位： | 1. 清华-富士康纳米科技研究中心,清华大学物理系,北京,100084
2. 清华大学电子工程系,北京,100084 |
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| 摘 要： | 在静电鞍场规的基础上研制了一种碳纳米管(CNT)冷阴极鞍场规(SFG).这种冷阴极鞍场规具有电极尺寸小,吸放气率低,热效应低,功耗低的特点.本文首先计算了碳纳米管冷阴极鞍场规的电场分布,计算结果表明,二极型碳纳米管电子枪的引出栅极的正电位在低于100 V的情况下对环形阳极鞍场规的轴向电位分布影响很少;并且在现有条件下对规管参数进行了测试,实验测定的规管对空气的灵敏度是1.05 Pa-1,规管功耗由热阴极规的0.9瓦减小到7毫瓦.
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| 关 键 词： | 碳纳米管 场发射 鞍场规 电场模拟 |
| 文章编号： | 1002-0322(2005)04-0029-03 |
Experimental study and electric field simulation of a UHV saddle field gauge with a CNT field emitter |
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| SHENG Lei-mei,WEI Yang,LIU Peng,LIU Liang,QI Jing,FAN Shou-shian.Experimental study and electric field simulation of a UHV saddle field gauge with a CNT field emitter[J].Vacuum,2005,42(4):29-31. |
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| Authors: | SHENG Lei-mei WEI Yang LIU Peng LIU Liang QI Jing FAN Shou-shian |
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| Abstract: | An ion-gauge was developed on the basis of electrostatic saddle field confinement which is capable of producing long electron path and consequently efficient gas phase ionization. The ion-gauge with carbon-nanotube (CNT) field emitter shows very small electrode sizes and low outgassing/sorption rates. Its performance is as follows:grounded cathode,anode potential 1750 V, grid potential 88 V and gauge sensitivity factor 1.05 Pa~(-1) in air. The power consumption for the gauge is less than 7 mW. |
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| Keywords: | CNT(carbon nanotube) field emission saddle field gauge electric field simulation |
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