首页 | 本学科首页   官方微博 | 高级检索  
     

SiC反射镜表面改性对TMC光学系统信噪比的影响
引用本文:陈红,王彤彤,高劲松,龚盾,王笑夷,郑宣鸣,申振峰.SiC反射镜表面改性对TMC光学系统信噪比的影响[J].光学精密工程,2009,17(12):2952-2958.
作者姓名:陈红  王彤彤  高劲松  龚盾  王笑夷  郑宣鸣  申振峰
作者单位:1. 长春光机与物理所2. 长春光学精密机械与物理研究所3. 长春光机所
摘    要:SiC(Silicon Carbide)反射镜由于固有的缺陷,在使用时会影响反射式光学系统的信噪比。采用表面改性技术后,Wyko轮廓仪测试表明SiC反射镜的粗糙度由10.42nm(Ra)降低到了0.95nm(Ra),镀制了银反射膜和增强膜后,主镜、次镜、三镜及折叠镜在0.5μm-0.8μm的可见光波段反射率>98%。计算的结果表明应用了表面改性技术后TMC反射式光学系统的信噪比提高了5%以上。

关 键 词:表面改性  SiC反射镜  信噪比  TMC
收稿时间:2009-04-22
修稿时间:2009-06-18

Surface Modification Influence of SiC Mirrors on Signal Noise Ratio of TMC Optical System
Abstract:Signal noise ratio of TMC optical system is significantly influenced by the intrinsic defects of SiC (Silicon Carbide) mirror. After applying surface modification technique, Wyko profilometer indicates the roughness of a SiC mirror is reduced from 10.42nm (Ra) to 0.95nm (Ra). Then silver coating and enhanced coating have been coated on primary mirror, secondary mirror, tertiary mirror and fold mirror. Reflectivity is higher than 98% of each mirror between 0.5μm-0.8μm wavelength. Calculation results indicate that signal noise ratio has improved 5% after surface modification.
Keywords:surface modification  SiC mirror  signal noise ratio  TMC
点击此处可从《光学精密工程》浏览原始摘要信息
点击此处可从《光学精密工程》下载全文
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号