Electrical Characterization of a Superconducting Hot Spot Microbolometer |
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Authors: | S Cibella R Leoni G Torrioli M G Castellano A Coppa F Mattioli |
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Affiliation: | (1) Istituto di Fotonica e Nanotecnologie, CNR, Via Cineto Romano 42, 00156 Roma, Italy |
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Abstract: | We report on fabrication and electrical noise measurements of an antenna coupled hot spot microbolometer operating in vacuum
at liquid helium temperature. A noise equivalent power (NEP) of about 40 fW/Hz1/2 has been measured at the output of a home made transimpedance amplifier operating at room temperature. This result shows
the feasibility of microbolometers for a THz-range camera with a simplified electronic readout scheme
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Keywords: | Terahertz detectors Air bridge bolometers Electron beam lithography |
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