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Electrical Characterization of a Superconducting Hot Spot Microbolometer
Authors:S Cibella  R Leoni  G Torrioli  M G Castellano  A Coppa  F Mattioli
Affiliation:(1) Istituto di Fotonica e Nanotecnologie, CNR, Via Cineto Romano 42, 00156 Roma, Italy
Abstract:We report on fabrication and electrical noise measurements of an antenna coupled hot spot microbolometer operating in vacuum at liquid helium temperature. A noise equivalent power (NEP) of about 40 fW/Hz1/2 has been measured at the output of a home made transimpedance amplifier operating at room temperature. This result shows the feasibility of microbolometers for a THz-range camera with a simplified electronic readout scheme
Keywords:Terahertz detectors  Air bridge bolometers  Electron beam lithography
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