Coherent growth and superhardness effect of AlN/TiN nanomultilayers |
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| Affiliation: | 1. State Key Laboratory of Metal Matrix Composites, Shanghai Jiao Tong University, Shanghai, 200030, PR China;2. Open Laboratory of the Ministry of Education for High Temperature Materials and Testing, Shanghai Jiao Tong University, Shanghai, 200030, PR China;1. Hunan Provincial Key Laboratory of Micro–Nano Energy Materials and Devices, Xiangtan University, Xiangtan 411105, Hunan, China;2. Department of Physics, Xiangtan University, Xiangtan 411105, Hunan, China;1. Department of Civil and Environmental Engineering, Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong;2. Division of Civil Engineering, University of Dundee, DD1 4HN, United Kingdom;1. Mork Family Department of Chemical Engineering and Materials Science, University of Southern California, Los Angeles, CA 90089-0484, USA;2. Department of Physics & Astronomy, and Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089-0484, USA;3. School of Informatics, Kainan University, Taoyuan 33857, Taiwan;1. State Key Laboratory of Continental Tectonics and Dynamics, Institute of Geology, Chinese Academy of Geological Sciences, Beijing 100037, China;2. School of Earth Sciences and Resources, China University of Geosciences Beijing, Beijing 100083, China;3. Faculty of Science, Kochi University, Akebono-cho 2-5-1, Kochi 780-8520, Japan;4. State Key Laboratory of Geological Processes and Mineral Resources, Chinese University of Geosciences, Wuhan 430074, China;1. Department of Electrical and Electronics Engineering, Birla Institute of Technology and Science, Pilani, Hyderabad Campus, Shameerpet, Telangana 500078, India;2. Department of Electrical Engineering, Indian Institute of Technology Patna, Bihar 801106, India;1. Department of Electrical Engineering, Science and Research Branch, Islamic Azad University, Tehran 1477893855, Iran;2. Photonics and Nanocrystal Research Lab. (PNRL), Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran;3. School of Engineering-Emerging Technologies, University of Tabriz, Tabriz, Iran;4. Faculty of Electrical & Computer Engineering, Advanced Devices Simulation Lab, Tarbiat Modares University, Tehran 1411713116, Iran |
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| Abstract: | The formation of metastable cubic AlN (c-AlN) and its effect on the mechanical properties of AlN/TiN nanomultilayers were studied. A series of AlN/TiN multilayers with different modulation periods were prepared by reactive magnetron sputtering. The microstructure and mechanical properties of multilayers were characterized with low-angle X-ray diffraction, transmission electron microscopy and a microhardness tester. The results show that AlN exists as a metastable cubic phase in multilayers at small modulation periods due to the “template effect” of TiN layer and forms superlattice with TiN through coherent epitaxial growth. Correspondingly, multilayers show the superhardness effect with the enhancement of hardness at small modulation periods. With the increase of modulation periods, AlN layer grows as c-AlN firstly and then its stable hexagonal structure (h-AlN) appears and grows on the already formed c-AlN. Correspondingly, the hardnesses of the multilayers decrease. The change of properties with the formation of c-AlN and the alternative strain field resulting from coherent growth of c-AlN and TiN are likely reasons for the superhardness effect of AlN/TiN multilayers. |
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