共查询到19条相似文献,搜索用时 171 毫秒
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利用标准玻璃刻线尺和十字分划目镜,对生物显微镜物镜放大倍数校准值的测量不确定度进行评定,分析测量不确定度的来源,计算标准不确定度,最终得出扩展不确定度。 相似文献
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较为详尽地分析了紫外辐射照度标准装置中各个因素对测量结果的影响,并给出了装置测量结果的相对扩展不确定度,为紫外辐射照度计的测量校准工作不确定度的评定以及新的标准装置的研制提供参考。 相似文献
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计量型原子力显微镜纳米测量系统主要由扫描器、测针位置传感器和一体化微型激光干涉三维测量系统等部分构成.针对计量型原子力显微测量系统,采用三维激光干涉测量系统作为测量基准,以实现原子力测量系统的纳米尺度量值溯源和校准工作.建立了校准模型,分析了扫描器9项主要误差项,并将该模型应用到原子力显微镜扫描器的校准中.校准后的结果表明,除z轴位置误差不超过±2nm外,其他8项的残余误差均不超过±1nm.通过台阶高度国际比对,建立了台阶高度标准计算方法及不确定度分析模型.台阶高度国际比对的测量结果表明,计量型原子力显微镜的测量值与参考值相差均小于1.5nm. 相似文献
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白光干涉仪、共聚焦显微镜、三维扫描测量仪等基于重构法的三维显微镜在半导体电路、精密机械零部件、航天航空等领域都有着重要的应用,其横向位移测量精度是重要的计量参数,因而开展三维显微镜横向示值误差准确测量尤为重要。针对目前该类仪器校准标准器尺寸不完善、结构不适用的问题,文章研制了一套多参数的二维栅格样板标准器,可实现不同倍率三维显微镜横向示值误差的准确测量。实验证明,该标准器适用性广、准确度高,可有效解决三维显微镜横向示值误差校准标准器缺失和量传体系不完善的问题,具有较好的应用前景。 相似文献
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建立了一种基于Cr原子光刻技术的nm光栅间距比对测量定值方法。以国家自溯源光栅标准物质来建立标准样板校准溯源体系的可行性为基础,保障测量仪器更高精度、可溯源性;设计并制备了节距长度有序递增的多周期电子束直写光栅样板,满足可适配于不同分辨率的nm测量仪器的需求,名义节距值分别为200、400、600、800、1 000 nm。经国家自溯源光栅标准物质比对后的AFM完成对nm栅格标准样板的测量与表征,实验表明:电子束直写制备的光栅标准样板均匀性水平1 nm,相对不确定度低于2%,光栅均具有良好的均匀性、准确性以及稳定性,验证了研制的光栅标准样板能作为一种理想的实物标准运用于nm几何量量值溯源体系。 相似文献
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从心、脑电图机检定装置检定或校准值的测量不确定度和测量标准的不确定度方面探讨了测量标准建立过程中的测量不确定度的评定,指出了测量标准的不确定度可作为检定或校准值的测量不确定度的一个分量,应尽可能地超然于实际的被校/检设备和检定/校准方法,而检定或校准值的测量不确定度的评定应基于被检定/校对象和实际的检定/校准方法。 相似文献
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Decker JE Miles JR Madej AA Siemsen RF Siemsen KJ de Bonth S Bustraan K Temple S Pekelsky JR 《Applied optics》2003,42(28):5670-5678
An instrument for step-height measurement by multiple-wavelength interferometry is described. The addition of a 1152-nm wavelength to a multiple-wavelength scheme applying wavelengths of 633, 612, and 543 nm relaxes the tolerance range of the required preliminary measurement to +/- 140 microm, if the total uncertainty in the fringe fraction measurement can be kept below 2%. For larger fringe fraction measurement uncertainty, numerical simulations show that the integer number of interference orders can still be determined unambiguously if the range in the preliminary knowledge of the length has been correspondingly reduced. The interferometer instrument is described, and experimental data are presented in the context of long gauge block calibration at the National Research Council of Canada. 相似文献
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Matt Young Paul D. Hale Steven E. Mechels 《Journal of research of the National Institute of Standards and Technology》1993,98(2):203-216
We have developed three instruments for accurate measurement of optieal fiber cladding diameter: a contact micrometer, a scanning confocal microscope, and a white-light interference microscope. Each instrument has an estimated uncertainty (3 standard deviations) of 50 nm or less, but the confocal microscope may display a 20 nm systematic error as well. The micrometer is used to generate Standard Reference Materials that are commercially available. 相似文献
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Hollandt J Schühle U Paustian W Curdt W Kühne M Wende B Wilhelm K 《Applied optics》1996,35(25):5125-5133
The prelaunch spectral-sensitivity calibration of the solar spectrometer SUMER (Solar Ultraviolet Measurements of Emitted Radiation) is described. SUMER is part of the payload of the Solar and Heliospheric Observatory (SOHO), which begins its scientific mission in 1996. The instrument consists of a telescope and a spectrometer capable of taking spatially and spectrally highly resolved images of the Sun in a spectral range from 50 to 161 nm. The pointing capabilities, the dynamic range, and the sensitivity of the instrument allow measurements both on the solar disk and above the limb as great as two solar radii. To determine plasma temperatures and densities in the solar atmosphere, the instrument needs an absolute spectral-sensitivity calibration. Here we describe the prelaunch calibration of the full instrument, which utilizes a radiometric transfer-standard source. The transfer standard was based on a high-current hollow-cathode discharge source. It had been calibrated in the laboratory for vacuum UV radiometry of the Physikalisch-Technische Bundesanstalt by use of the calculable spectral photon flux of the Berlin electron storage ring for synchrotron radiation (BESSY)-a primary radiometric source standard. 相似文献
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针对频域信道测量中测量仪器引入的不确定度进行了深入分析。矢量网络分析仪是频域信道测量中最重要的测量仪器,测量前必须进行自校准。深入分析不同校准方法所引入的测量不确定度是合理选择自校方法的量化依据。测量不确定度分析基于蒙特卡洛法。由于在频域信道测量中需要对多个频点进行测量,而各频点间的测量结果存在较强的相关性,因此在应用蒙特卡洛法的基础上引入了基于协方差矩阵的分析方法,从而考虑了相关性的影响,给出了更为准确合理的不确定度分析,最终有效地指导了自校方法的合理选择。实验表明,是否考虑相关性,对信道参数的测量不确定度有较大影响。基于对测量不确定度的定量分析,可以得出直通校准是更适合于信道测量的矢网自校准方法的结论。 相似文献
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Evolved vapor coulometry is a measurement technique that selectively detects water and is used to measure water content of materials. The basis of the measurement is the quantitative electrolysis of evaporated water entrained in a carrier gas stream. Although this measurement has a fundamental principle—based on Faraday’s law which directly relates electrolysis current to amount of substance electrolyzed—in practice it requires calibration. Commonly, reference materials of known water content are used, but the variety of these is limited, and they are not always available for suitable values, materials, with SI traceability, or with well-characterized uncertainty. In this paper, we report development of an alternative calibration approach using as a reference the water content of humid gas of defined dew point traceable to the SI via national humidity standards. The increased information available through this new type of calibration reveals a variation of the instrument performance across its range not visible using the conventional approach. The significance of this is discussed along with details of the calibration technique, example results, and an uncertainty evaluation. 相似文献
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激光干涉测量系统在精密测量领域占有重要地位,它对温度变化、大气变化、激光波长变化、机械安装误差和外界振动等比较敏感,影响系统的测量精度和稳定性。针对此情况,该文提出一种新型的激光干涉光路,两光臂呈完全共路结构,使干涉条纹信号具有极强的抗干扰能力;对光路进行抗干扰分析和理论推导;构建位移测量系统,进行系统测试实验和误差分析。实验表明,本系统测量分辨力0.72nm,合成标准不确定度5.2nm(k=2),运行速度0.56mm/s,量程0.01mm。 相似文献