微压入仪的设计与柔度分析

设计了基于仪器化压入技术的具有纳米测试精度的微压入仪,仪器集驱动、检测、控制和数据分析等功能于一体.采用音圈电机加载,无传动机构,减少了中间误差;通过高精度电容式位移传感器和应变式载荷传感器采集信号;设计了基于PID算法的闭环控制系统,编写了控制软件.通过有限元方法分析了加载时机架和试样的变形,标定了仪器柔度,仪器总体柔度约为1.8×10-8m/N,远小于目前商用仪器化压入仪的柔度,从原理上保证了测试结果的准确性.     

压电驱动型微纳米压痕测试装置的设计与试验研究

集成压电叠堆和柔性铰链设计一种微纳米压痕测试装置,分析测试装置的原理、组成和工作过程。该装置在压入方向上可实现0.05～30μm范围内线性位移输出,在无隔振和未做恒温处理的试验环境,位移传感器示数波动小于10 nm。提出一种新的机架柔度测试方法,利用该方法得到测试装置的机架柔度值为4.8 nm/mN。熔融石英材料压痕试验结果验证测试装置和机架柔度获取方法的可行性。对测试装置进行校准,利用校准后的测试装置对单晶硅片(100)晶面进行压痕试验,对应于最大压入载荷49.60 mN,当压入载荷卸载至18 mN时压痕曲线出现典型的pop-out现象,说明测试装置对于材料结构的细微变化具有较高的分析能力。根据Oliver-Pharr相关理论,计算得到单晶硅片(100)晶面在最大压入载荷为49.60 mN时的硬度为16.29 GPa,弹性模量为181.63 GPa。     

压电驱动型微纳米压痕测试装置的设计与试验研究

集成压电叠堆和柔性铰链设计一种微纳米压痕测试装置,分析测试装置的原理、组成和工作过程。该装置在压入方向上可实现0.05～30μm范围内线性位移输出,在无隔振和未做恒温处理的试验环境,位移传感器示数波动小于10 nm。提出一种新的机架柔度测试方法,利用该方法得到测试装置的机架柔度值为4.8 nm/mN。熔融石英材料压痕试验结果验证测试装置和机架柔度获取方法的可行性。对测试装置进行校准,利用校准后的测试装置对单晶硅片(100)晶面进行压痕试验,对应于最大压入载荷49.60 mN,当压入载荷卸载至18 mN时压痕曲线出现典型的pop-out现象,说明测试装置对于材料结构的细微变化具有较高的分析能力。根据Oliver-Pharr相关理论,计算得到单晶硅片(100)晶面在最大压入载荷为49.60 mN时的硬度为16.29 GPa,弹性模量为181.63 GPa。     

压入测试仪柔度标定方法研究

仪器柔度标定和位移校准是压入法测试的一项重要工作,通过对各种标定方法特点的综合比较认为Doerner-Nix法是一种理想的折中方法,结果相对可靠并易于操作。利用该法对微压入测试仪进行了标定,获得的柔度值为0．61×10-6m/N。仪器校准后得到的Si(100)弹性模量和硬度值与文献值符合较好,而未校准直接获得的2个测试值比校准后分别低21．5％和2．4％。     

纳米压入法测试薄膜力学性能的若干关键影响因素分析

纳米压入法是目前薄膜等小体积MEMS(micro-electro-mechanical system)材料力学性能评定广为使用的方法,其测试可靠性严重依赖于仪器校准及对各种误差影响因素的消除和修正.文中以Oliver-Pharr数学评定模型为基础,对包括仪器柔度、压尖几何形状偏差、初始接触点位移、尺寸效应、基底、堆积和凹陷、蠕变、表面粗糙度等在内的薄膜弹性模量和硬度纳米压入测试时的若干关键影响因素进行分析.在此基础上,分别给出相应的处理办法和数据修正措施.研究表明,只有综合考虑这些因素的影响,方能获得准确的薄膜本征力学性能参数.     

金属材料弹性模量的仪器化压入测试

对6061铝合金、S45C碳钢、SS316不锈钢、SS304不锈钢和黄铜五种金属材料进行了仪器化压入测试,采用纯能量法和Oliver-Pharr方法计算得到各材料的弹性模量,并与标准单轴拉伸试验结果进行了对比。结果表明:采用纯能量法得到的五种金属弹性模量与拉伸试验结果的相对误差分别为7.65%,3.99%,3.25%,-1.12%和16.47%,比Oliver-Pharr方法具有更高的测试精度,可满足金属材料弹性模量测试的工程应用要求。     

弹性模量仪器化压入测试方法比较分析

文中以弹性模量仪器化压入测试方法的力学模型、传感器性能指标对测试结果的影响、数据处理方法对测试结果的影响为切入点,对三种仪器化压入测试方法进行分析比较.纯能量方法建立的力学模型准确地解释了仪器化压入过程,对测试传感器性能参数和数据处理方法的敏感程度较低,具有一定的鲁棒性.     

高精度仪器化压入仪设计与应用

研制了一款试样参照型高精度仪器化压入仪。该仪器采用3个探头式电容位移传感器与深度测量随动盘相结合的压入深度测量方式,排除了试样小角度倾斜、机架变形以及试样支撑或夹持变形对压入深度测量的影响,从原理上保证了仪器化压入测试中最关键的基础数据即金刚石压头压入试样深度的测量准确性。压入仪的驱动装置与载荷传感器采用分离式设计方案,避免了载荷测量的热漂移问题,保证了载荷基础数据的测试精度。仪器采用自主研发的系列材料力学性能测试新原理和新方法,解决了目前国际上商用仪器化压入仪采用传统测试原理及方法所带来的力学性能参数测试精度不高的问题。利用所设计的"高精度仪器化压入仪",对6061铝合金和S45C碳钢2种材料进行了杨氏模量的仪器化压入测试,验证了所设计仪器的测试精度。     

摩擦对仪器化压入识别陶瓷弹性模量精度影响的有限元分析

利用有限元软件ABAQUS,结合仪器化压入识别材料弹性模量的Ma方法,分析了仪器化压入仿真中金刚石压头与被测材料接触面间摩擦因数对陶瓷材料弹性模量识别精度的影响。结果显示,对于两种典型陶瓷材料Si3N4和Al2O3,当摩擦因数在0~0.4范围内,识别误差随摩擦因数的增大而减小,最大误差分别为5.06%和12.38%;当摩擦因数在0~0.15之间,识别误差对其变化较为敏感,摩擦因数超过0.15后,误差值分别稳定于为3.5%和5.8%左右。说明对于陶瓷材料弹性模量的仪器化压入仿真计算,当设置压头与陶瓷材料接触面摩擦因数不小于0.15时,仿真识别精度较高且比较稳定。     

仪器化压入刚性压头有限元模型适用性问题分析

文中利用有限元软件ABAQUS分别对基于刚性压头和弹性压头的仪器化压入模型进行了建立与计算,并将刚性压头的模型仿真所得的压入比功We/Wt及仪器化压入Oliver-Pharr硬度HO-P与理想弹性压头的模型仿真结果进行对照。结果表明,刚性压头模型仿真识别压入比功We/Wt的相对误差变化范围为-2.6%~-31.8%,Oliver-Pharr硬度HO-P的相对误差变化范围为-0.3%~26.5%,其中对低强度材料进行仿真的结果与弹性压头模型相近,误差一般不超过5%,而随着材料强度的升高,其仿真误差显著增大,对于超高强度的材料的仿真计算压头弹性不可忽略,刚性压头模型应谨慎选用。     

Effect and measurement of the machine compliance in the macro range of instrumented indentation test

The contribution concerns the strong effect of the machine compliance in the upper macro range of the instrumented indentation test on hard materials. To achieve a minimum uncertainty in determination of the machine compliance the measurement and analysis needed for the determination are studied in detail. Based on the assumption that the hardness and/or the indentation modulus are force independent, four methods on the determination of the machine compliance are described. Experimental results of a commercial testing machine up to 2500 N and of a standard machine up to 200 N are analyzed. The results show that the uncertainty of the compliance is usually higher than requested for a precisely enough determination of hardness and further materials parameters. Especially for the calibration of reference materials with high hardness and/or Young’s modulus, the machine compliance should be limited in ISO 14577 part 3, 2003 [1].     

Kinematic calibration of gantry hybrid machine tool based on estimation error and local measurement information

This paper presents the kinematic calibration of a four degrees-of-freedom (DOF) hybrid machine tool based on a novel planar 3-DOFs parallel mechanism and a long movement of the worktable. Closed-form solutions are developed for both the inverse and direct kinematics about the parallel mechanism. The error model is built and the mechanism accuracy is investigated. Two types of kinematic calibration method are proposed by a simple measurement device. The first type of calibration method is based on estimation error, and can easy improve the machine tool accuracy quickly by estimating the error trends. The second type of kinematic calibration method is based on local measurement information, which includes the position errors and does not include the pose errors of the machine tool. The calibration tests showed the effectiveness of the calibration methods, which can be useful for the similar types of parallel machine tool.     

A non-contact method for detecting on-line industrial robot position errors using a microwave doppler radar motion detector

To be useful, industrial robots must meet positioning accuracy requirements for their given applications. Off-line calibration generally improves robot positioning accuracy to levels needed for open-loop use in most industrial applications. Applications that require greater accuracy with respect to external assemblies generally turn to closed-loop control or passive compliance. However, industrial robot systems do not generally monitor in-process robot position to detect machine faults that can lead to product faults, scrap, machine damage, and additional costs. To achieve greater operational efficiencies, new non-invasive, noncontact methods for monitoring robot position are needed. The investigators developed a low-cost method for in-process industrial robot position monitoring using a Doppler motion detector and a statistical position error measure. The method detects position errors at robot repeatability levels.     

A non-contact method for detecting on-line industrial robot position errors using a microwave Doppler radar motion detector

To be useful, industrial robots must meet positioning accuracy requirements for their given applications. Off-line calibration generally improves robot positioning accuracy to levels needed for open-loop use in most industrial applications. Applications that require greater accuracy with respect to external assemblies generally turn to closed-loop control or passive compliance. However, industrial robot systems do not generally monitor in-process robot position to detect machine faults that can lead to product faults, scrap, machine damage, and additional costs. To achieve greater operational efficiencies, new non-invasive, non-contact methods for monitoring robot position are needed. The investigators developed a low-cost method for in-process industrial robot position monitoring using a Doppler motion detector and a statistical position error measure. The method detects position errors at robot repeatability levels.     

Calibration method to characterize the accuracy of phase-shifting point diffraction interferometer

Characterization of measurement accuracy of the phase-shifting point diffraction interferometer (PS∕PDI) is usually performed by two-pinhole null test. In this procedure, the geometrical coma and detector tilt astigmatism systematic errors are almost one or two magnitude higher than the desired accuracy of PS∕PDI. These errors must be accurately removed from the null test result to achieve high accuracy. Published calibration methods, which can remove the geometrical coma error successfully, have some limitations in calibrating the astigmatism error. In this paper, we propose a method to simultaneously calibrate the geometrical coma and detector tilt astigmatism errors in PS∕PDI null test. Based on the measurement results obtained from two pinhole pairs in orthogonal directions, the method utilizes the orthogonal and rotational symmetry properties of Zernike polynomials over unit circle to calculate the systematic errors introduced in null test of PS∕PDI. The experiment using PS∕PDI operated at visible light is performed to verify the method. The results show that the method is effective in isolating the systematic errors of PS∕PDI and the measurement accuracy of the calibrated PS∕PDI is 0.0088λ rms (λ = 632.8 nm).     

Error analysis and compensation for the volumetric errors of a vertical machining centre using a hemispherical helix ball bar test

Machining accuracy is directly influenced by the quasi-static errors of a machine tool. Since machine errors have a direct effect upon both the surface finish and geometric shape of the finished workpiece, it is imperative to measure the machine errors and to compensate for them. A laser measurement system to identify geometric errors of a machine tool has disadvantages, such as a high cost, a long calibration time and the usage of a volumetric error synthesis model. In this study, we proposed a novel analysis of the geometric errors of a machine tool using a ball bar test without using a complicated error synthesis model. Also, a statistical analysis method was employed to derive geometric errors using a hemispherical helix ball bar test. According to the experimental result, we observed that geometric errors of the vertical machining centre were compensated by 88%.     

便携式三坐标测量仪误差标定方法

从三关节的便携式关节型三坐标测量仪入手,研究了便携式关节型三坐标测量仪的误差来源;在现有误差标定方法的基础上,提出了一种新型的机械结构误差标定方法和提高精度的措施,为进一步实现便携式关节型三坐标测量仪的误差补偿和精度的提高奠定了基础.     

Elasto-geometrical error modeling and compensation of a five-axis parallel machining robot

Parallel manipulators have the potentials of high efficiency and high precision in the field of machining and manufacturing. However, accuracy improvement of the parallel manipulator is still an essential and challenging issue, encountering two important problems. Firstly, the ignorance of elastic deformation caused by gravity or deviations of static stiffness model restricts further improvement of accuracy. To solve this problem, an elasto-geometrical error modeling method is proposed. The comprehensive effects of structural errors, elastic deformation under gravity and compliance parameter errors on pose deviations are disclosed. On this basis, the identification equation of actual structural errors and compliance parameter errors can be established. Secondly, the ill-conditioned identification matrix and the identification equation with anisotropic residual error can lead to inaccurate identification results. To solve this problem, a weighted regularization method is proposed. The identification equation with isotropic residual error is built, and accurate identification can be realized with the regularization method. Based on the proposed methods, the error compensation experiment is conducted on the prototype of a five-axis parallel machining robot using a laser tracker. Experiment results show that the accuracy of the machining robot is significantly improved after compensation. An M1_160 test piece and an S-shaped test piece are machined and measured to further validate the effectiveness of the proposed methods. The elasto-geometrical error modeling method and the weighted regularization method can be applied to other parallel manipulators’ accuracy improvement.     

数控机床全误差模型和误差补偿技术的研究

加工精度是数控机床必须保证的一项性能指标。提高机床精度是先进制造技术的重要课题，有误差避免和误差补偿两种方法。前者使机床造价大幅上升，而且精度的提高也有一定的限度。后者的精度提高几乎没有限制，对数控机床，计算机实时误差补偿技术是一种经济、有效的基本途径。基于多体系统理论，推导了多坐标数控机床，包含几何误差和热误差的全误差模型。文中介绍了坐标数控机床项误差的辨识方法(22线、14线和9线法)，还介绍了回转坐标6项误差的辨识方法。通过软件补偿，在3坐标联动和4坐标联动数控机床上实现了几何误差和热误差的补偿。实践结果表明误差模型的准确性和补偿方法的实用性。     

Limitations of laser diagonal measurements

The introduction of B5.54 and ISO230-6 machine tool performance measurement standards is increasing the popularity of laser interferometer diagonal, step diagonal and vector methods for the evaluation and compensation of machine tool errors. This is due to the potential reduction in calibration time, these methods can provide over the more conventional laser interferometer-based linear, angle and straightness measurements taken along lines parallel to the machine’s X, Y and Z axes.

This paper highlights limitations in the results produced by diagonal-based measurements and by the more recently introduced vector or step diagonal methods. The purpose of this paper is to alert potential users of these methods to their limitations so they can make informed decisions as to whether the reduction in calibration time they can provide outweighs the loss of accuracy and detail in the results. It also indicates some of the dangers in using laser diagonal data alone for the compensation of machine tool errors.