飞秒强激光的拉曼延迟克尔非线性效应研究

飞秒强脉冲激光具有高功率、窄脉宽和宽光谱等特点,其在大气传输过程中涉及很多线性和非线性的物理机制,高阶效应对传输将产生一系列重要的影响.采用数值方法求解包含拉曼延迟响应的非线性传输方程,研究了与拉曼延迟响应时间相当的、具有几十飞秒脉宽的飞秒强激光大气传输中拉曼延迟克尔非线性效应引起的非线性折射率变化、自聚焦和光谱展宽特...     

不同水辅助方法对高温合金飞秒激光逐层逐圈切孔质量的影响

主要研究了水基和水膜辅助这两种不同水辅助方式对飞秒激光高温合金逐层逐圈切孔质量的影响,对比分析了不同水辅助方式下激光脉冲重复频率变化对微孔出入口孔径、锥度、内壁形貌和内壁粗糙度的影响。实验结果表明:水基和水膜辅助均可以改善飞秒激光制造微孔的质量,微孔锥度减小,微孔内壁粗糙度减小,且水基辅助的改善效果更明显。当激光脉冲能量为80 μJ,脉冲重复频率在100 kHz左右时,水基辅助飞秒激光制孔可以获得较好的孔内壁质量,同时相比于空气中孔的锥度减少18.04%。随着激光脉冲重复频率的增加,两种水辅助条件下微孔的出入口孔径和锥度均先减小后增大,其中水基辅助下的微孔内壁粗糙度数值变化不大,水膜辅助下微孔内壁粗糙度数值不断增加。实验结果为优化水辅助飞秒激光制孔工艺提供了参考。     

强飞秒激光大气传输成丝特性研究

基于对强飞秒激光大气传输的非线性薛定谔方程的变分法,模拟研究飞秒激光大气传输成丝特性.研究了在是否考虑多光子吸收损耗的情况下,激光成丝状态的演化。研究表明：多光子吸收损耗会破坏自聚焦与等离子体散焦之间的动态平衡,进而引起成丝的不稳定性;在不同的入射功率下,成丝的起点位置会发生移动;在实验室条件下,Pin大于等于3Pcr 时才可能形成多次聚焦成丝传输。在继续增加激光入射功率时,光束因强烈聚焦发生崩塌而成多丝结构。     

飞秒激光诱导波纹状微突起结构

利用飞秒激光振荡器产生的脉冲对镀有铬层的玻璃和石英基片进行微加工,发现两种样品表面均有波纹状的微突起结构产生。这些微突起结构离开样品表面的高度为10～300nm不等,并且随着激光功率的增大而增加,在一定功率下达到饱和状态。它们的形貌、尺寸和高度取决于入射飞秒激光的能流以及飞秒脉冲的参数。通过化学方法证明了这些微突起结构是由玻璃和石英的主要成分SiO2组成的,并非样品表面的铬元素。此外,通过选取适当的飞秒激光功率和样品加工速度,制作了两种不同周期和线宽的光栅结构,显示出飞秒激光振荡器良好的加工性能。     

金属玻璃飞秒激光烧蚀特性

采用飞秒激光对Zr基金属玻璃在空气中进行了表面烧蚀、微打孔与微细切割等过程的研究.通过扫描电镜(SEM)、能量弥散X射线(EDX)能谱分析与透射电镜(TEM)及电子衍射等方法,分析了飞秒激光烧蚀金属玻璃的表面形貌与加工区域发生的相关效应.实验与分析表明加工区域周围无熔融和液滴溅射现象,热影响区极小,并且无晶化现象发生,但飞秒激光微细加工金属玻璃时存在极薄的表面氧化现象.研究结果表明,在适当选择参数的条件下,飞秒激光烧蚀是一种极有前途的金属玻璃无晶化微细加工方法.     

Laser ablation and micromachining with ultrashort laser pulses

The mechanisms of ultrashort-pulse laser ablation of materials are discussed, and the differences to that of long laser pulses are emphasized. Ultrashort laser pulses offer both high laser intensity and precise laser-induced breakdown threshold with reduced laser fluence. The ablation of materials with ultrashort pulses has a very limited heat-affected volume. The advantages of ultrashort laser pulses are applied in precision micromachining of various materials. Some femtosecond laser pulse micromachining results, including comparison with long pulses, are presented. Ultrashort-pulse laser micromachining may have a wide range of applications where micrometer and submicrometer feature sizes are required     

飞秒激光成丝在火焰中诱导的荧光辐射及应用

飞秒激光脉冲在传输过程中, 克尔自聚焦和等离子体散焦相互作用形成了长距离的自导光通道, 该过程称为飞秒激光成丝。飞秒激光成丝在火焰中诱导的荧光辐射为燃烧诊断提供了新的可能性, 为理解燃烧过程、提高燃烧效率和减少污染物的产生提供了有用的信息。针对飞秒激光成丝诱导的荧光辐射在燃烧诊断中的应用, 介绍了飞秒激光在火焰中的传输特性以及成丝动力学过程, 陈述了飞秒激光成丝诱导非线性光谱的机理及其在高温燃烧场诊断应用中的研究现状和进展, 探讨了当前飞秒激光成丝在该领域所面临的挑战和应用前景。     

基于光子晶体光纤飞秒激光放大器的微纳加工系统

以掺镱大模面积光子晶体光纤(PCF)飞秒激光放大器为光源组建了一套结构紧凑且运行稳定的飞秒激光微纳加工系统,中心波长为1040 nm,重复频率50 MHz,最大平均功率16 W,光栅压缩后脉冲宽度85 fs。利用该套系统在硅片、金属薄膜(Cr膜、Al膜)上演示了微图案的刻划,并与采用重复频率1 kHz的固体钛宝石飞秒激光放大器的加工结果进行对比,发现利用新组建的加工系统进行微纳加工,由于单脉冲能量较小且便于调节,使得刻划微图案时边缘加工效果更容易控制,且避免了加工过程中未加工区域受到的污染,保护了制作衬底。显示了该套系统高重复频率和高平均功率的特性及其在改善微纳加工效果及明显提高加工效率方面的优势。     

Energy transmittance of focused femtosecond pulses at different air pressures

Transmission of intense femtosecond laser pulses in air is accompanied by energy depletion. By measuring the transmitted spectra of the focused femtosecond pulses in air, we study the influence of air pressure and initial pulse energy on the spectra around the central wavelength (800 nm) after the interaction of the focused femtosecond laser with air. On this basis, the energy transmittance of the central wavelength of the femtosecond pulses is obtained. It is found that as the air pressure is lower than 1 kPa, the transmitted spectra of focused femtosecond pulses change with the pressure, but there is almost no energy depletion, while as the air pressure is higher than 1 kPa, femtosecond filamentation occurs and the energy transmittance of the central wavelength of the femtosecond pulses decreases with the increase of air pressure and pulse energy. According to the different regimes (i.e., nonfilamentation, and filamentation regimes), we discuss the effect of energy conversion and transfer on the energy transmittance. This work can help to understand the energy depletion during the transmission of ultrashort intense laser pulses in air and provide a guidance for the practical applications of femtosecond filamentation.     

偏振光飞秒双脉冲微加工

利用具有纳焦能量、高重复频率的偏振光飞秒双脉冲对金属铬膜样品进行微加工,样品表面都会产生微突起状结构,它们的宽度在0～400 ps的双脉冲时延范围内没有明显的变化,但高度却都在1～10 ps的双脉冲时延范围内呈现明显的下降,在此时延范围之外并没有明显的变化。通过加工样品的扫描电子显微镜(SEM)图片发现,对于偏振光,利用双脉冲方法,可以获得更好的加工质量。并且线偏振光得到的微突起状结构比较细长,在入射光束的偏振方向上有所伸长;圆偏振光得到的微突起状结构比较接近圆形。即在低脉冲能量、高重复频率情况下,具体的微加工特征形貌与入射光束的偏振状态有关。     

Femtosecond Laser Drilling of Alumina Wafers

The topography, radial spread, and chemical composition of the slag produced during percussion and trepanning hole drilling techniques using femtosecond laser were investigated. Results of analyses by optical microscopy, scanning electron microscopy, and energy dispersion spectroscopy are presented. While there were no significant differences in the average ablation rates observed when a near infrared femtosecond laser was used, when compared with the ultraviolet nanosecond laser ablation of alumina (Al₂O₃) ceramics, that of the femtosecond laser provided much cleaner holes. There was an absence of particulates due to re-solidification of molten material around the periphery of the hole. The slag consisted of ultrafine powders formed during condensation of the supersaturated ablation plume. This slag can easily be removed in an ultrasonic bath with a mixture of acetone and water. In combination with trepanning hole drilling, the femtosecond laser produced micro-via holes, in alumina wafers, that were free of cracks and re-cast molten material.     

基于157nm深紫外激光的蓝宝石基片微加工

为了探索157nm深紫外激光对蓝宝石材料的微加工技术,采用157nm激光微加工系统,对蓝宝石基片进行了扫描刻蚀和打孔加工,以研究激光工艺参量与刻蚀深度、表面形貌的关系,分析了157nm深紫外激光对蓝宝石材料的作用机理,并利用扫描刻蚀法在蓝宝石基片上加工了一个2维图形。由实验结果可知,157nm深紫外激光作用于蓝宝石材料是一个光化学作用与光热作用并存的加工过程,适合扫描刻蚀的加工参量为能量密度3.2J/cm2,重复频率10Hz～20Hz,扫描速率0.15mm/min;在能量密度2.5J/cm2下的刻蚀率为0.039μm/pulse。结果表明,通过对激光重复频率和扫描速度的控制可实现蓝宝石材料的精细微加工。     

飞秒激光加工不锈钢微型悬臂梁的工艺研究

为了研究飞秒激光对不锈钢材料的加工工艺,采用基于飞秒激光材料烧蚀的微细加工方法,深入研究了飞秒激光高效高质量微细加工不锈钢材料的工艺条件与参量优化,并应用于微型不锈钢悬臂梁的制作。分析了激光能量密度、激光扫描速度、重复扫描次数对加工形貌和蚀除速率的影响,制作出了高质量的微米量级的不锈钢微型悬臂梁。结果表明,飞秒激光微细加工是一种极具前途与极具柔性的微机电系统器件加工手段。     

多脉冲飞秒激光烧蚀铝靶动态特性研究

利用时间分辨阴影图研究了脉冲能量在200微焦的多脉冲飞 秒激光烧蚀铝靶的动态过程、并使用 扫描电镜研究了靶材表面烧蚀区域的形貌特征。时间分辨阴影图的记录结果表明,在不同时 间延迟条件 下,飞秒激光烧蚀铝靶形成的冲击波体积和喷射物的空间分布均随着脉冲个数的增加而发生 不同程度的变 化,尤其是单脉冲烧蚀情况下在1ns延时阴影图中观察到的近同心圆条纹会随着脉冲数目增 加逐渐变得模 糊乃至消失。烧蚀区的电子扫描显微镜图像清楚地揭示出烧蚀过程中伴随有液态铝的产生, 其溅射凝固后 在靶材表面形成小球和细丝状微纳结构。实验结果进一步证实了由前序脉冲烧蚀导致的铝靶 表面结构的改 变会对后继脉冲的烧蚀产生显著影响,从而使多脉冲烧蚀表现出明显不同于单脉冲烧蚀的特 性。这些结果 对飞秒激光脉冲沉积薄膜、直写生成表面微结构等应用的工艺参数优化具有很好的指导意义 。     

Generation and kilohertz rate amplification of synchronizedfemtosecond and picosecond laser pulses

Synchronized femtosecond and tunable picosecond laser pulses have been generated using a linear cavity configuration in both lasers. The long-term stability of the synchronization, as well as the frequency of the synchronously pumped femtosecond dye laser, is assured by active stabilization of the cavity length. Additionally, the picosecond and femtosecond pulses have been amplified in dual amplifier chains to pulse energies in the microjoule range at a 1 kHz repetition rate. The total peak intensity available for two-photon, nonlinear excitations is on the order of 10⁹ times greater than that available from unamplified beams     

不同激光脉冲作用下ZnS晶体非线性光学特性

用Z-scan技术在532 nm的皮秒激光脉冲和800 nm飞秒激光脉冲作用下分别研究了ZnS晶体的非线性吸收及非线性折射特性。实验结果表明,ZnS晶体在532 nm的皮秒激光脉冲作用下非线性吸收为双光子吸收,其非线性吸收系数为5.310-11 m/W,在800 nm的飞秒激光脉冲作用下非线性吸收为三光子吸收,非线性吸收系数为0.5910-21 m2/W2;在532 nm皮秒激光脉冲作用下,ZnS晶体的非线性折射率符号为负,自由载流子产生的非线性折射率的改变占主导,而800 nm飞秒激光脉冲作用下,ZnS晶体的非线性折射率符号为正,束缚电子产生的非线性折射率的改变为主要因素。     

飞秒激光在材料微加工中的应用

本文介绍了飞秒激光的特性以及超短脉冲激光与材料相互作用的机理，并着重指出了其与长脉冲激光的区别。飞秒激光可产生超高光强、具有精确的损伤阈值(并且损伤阈值较低较低)、很小的热影响区、几乎可精密加工所有种类材料，并且，加工精度极高，可进行亚微米尺寸的精密加工。通过分析飞秒激光材料微加工的特性，综述超短脉冲激光材料微加工的应用研究现状。     

超短脉冲强激光大气传输的非线性效应

超短脉冲强激光大气传输在光学遥感、电子对抗、以及人工放电等方面具有重要的应用．例如，利用超短脉冲强激光使得远距离处的大气局域电离，其所产生的紫外辐射可以为大气组分主动荧光光谱学研究提供光源。对短脉冲强激光在大气中的传输进行了理论分析，对超短脉冲强激光大气传输中的各种线性效应及非线性效应，诸如色散效应、非线性自聚焦效应、受激拉曼散射效应、多光子电离及隧道电离效应、电离引起的能量损耗效应、相对论聚焦、有质动力激发的等离子体尾波场等效应进行了讨论，给出了一组描述超短脉冲强激光大气传输的三维非线性传输方程，为此类问题的进一步研究提供了理论基础。     

Optimised one-step compression of femtosecond fibre laser soliton pulses around 1550nm to below 30 fs in highly nonlinear fibre

Optimised compression of femtosecond fibre laser pulses in highly nonlinear fibre is demonstrated. Specifically reported are compressed pulse durations below 30 fs using a simple setup where a single sub-10 cm segment of highly nonlinear fibre is directly spliced to the output pigtail of a commercial femtosecond fibre laser. The compressed pulse quality is confirmed through frequency resolved optical gating measurements.     

深孔激光加工研究

研究了深孔形成的物理过程,提出了一种新型的深孔加工的激光脉冲波形,用光锥方程和能量平衡关系式推导出孔深、孔径及有关激光参数,与实验结果基本相符。