Diffractive focusing fan-out element for the parallel DNA sequencer

Various issues of creation of diffractive optical elements transforming one laser beam with small divergence to a matrix of converging beams with a diffraction size of focused spots in the plane of object illumination and their application for problems of DNA sequencing and microscopy are considered. The parameters of diffractive elements are calculated and optimized in the approximation of the Fresnel–Kirchhoff diffraction theory. Diffractive elements are fabricated by the method of direct laser writing on a photoresist by using a circular laser writing system. Experimental characteristics of a diffractive element creating a matrix consisting of 33 × 33 beams, which are focused in one plane at a distance of 210 mm, are presented. The degree of nonuniformity of beam intensities determined by the ratio of beam intensities in the central region to intensities of peripheral beams is 1/2.5, which is potentially sufficient to be used in DNA sequencing problems. The maximum distortions of spot positions in the entire focusing field is <0.15%.     

热透镜效应对激光光束聚焦的影响

利用高斯光束传播的ABCD定律,分析了热透镜效应对高斯光束聚焦的影响,对两种腔型做了数值计算和分析,并计算了不同焦距透镜对高斯光束聚焦后的腰斑半径和腰斑位置。通过计算分析表明对于同一高斯光束用短焦距透镜聚焦后得到的光斑比用长焦距透镜聚焦得到的光斑更稳定。     

Brightness enhancement of plasma ion source by utilizing anode spot for nano applications

Anode spots are known as additional discharges on positively biased electrode immersed in plasmas. The anode spot plasma ion source (ASPIS) has been investigated as a high brightness ion source for nano applications such as focused ion beam (FIB) and nano medium energy ion scattering (nano-MEIS). The generation of anode spot is found to enhance brightness of ion beam since the anode spot increases plasma density near the extraction aperture. Brightness of the ASPIS has been estimated from measurement of emittance for total ion beam extracted through sub-mm aperture. The ASPIS is installed to the FIB system. Currents and diameters of the focused beams with∕without anode spot are measured and compared. As the anode spot is turned on, the enhancement of beam current is observed at fixed diameter of the focused ion beam. Consequently, the brightness of the focused ion beam is enhanced as well. For argon ion beam, the maximum normalized brightness of 12,300 A∕m(2) SrV is acquired. The ASPIS is applied to nano-MEIS as well. The ASPIS is found to increase the beam current density and the power efficiency of the ion source for nano-MEIS. From the present study, it is shown that the ASPIS can enhance the performance of devices for nano applications.     

基于相位计算全息的完美涡旋光产生和调控方法

空间光调制器模拟锥透镜法是目前最为广泛使用的产生完美涡旋光的方法,但是该方法无法调控光束环宽,为了解决这个问题,提出了使用傅里叶空间相位计算全息法产生、调控完美涡旋光。通过理论分析和实验测量证明,改变编码相位可以实时调控完美涡旋光的光环半径、环宽和拓扑荷数。该方法光路简单,产生的光束质量高,且光路只需进行一次调整,操作简便。另外,该方法还具有通用性强的优点,可用于产生各类变形完美涡旋光。实验产生了不同参数的椭圆形完美涡旋光,实验测量结果与理论结果吻合得很好。因此,傅里叶空间相位计算全息法是一种简便、通用、实用性更强的完美涡旋光产生、调控方法。     

Application of a diffraction grating and position sensitive detectors to the measurement of error motion and angular indexing of an indexing table

In this paper, two systems for the measurement of the error motion and angular indexing of a rotary indexing table have been developed. A laser diode, a laser holder and a position sensitive detector (PSD) are integrated as a simple measuring device for the measurement of the rotary error without using a precision reference artifact (a cylinder or a sphere), multiple probes or error separation methods. The laser diode is assembled in the laser holder and fixed on the rotary table. The PSD is set up above the laser holder to detect the position of an incident laser beam from the laser diode. When the rotary table rotates, the rotary error changes the direction of the incident beam and also the position of the spot on the PSD. For the measurement of the angular indexing, a reflective diffraction grating and two PSDs are integrated as a high-resolution angle measuring device without using an autocollimator or a laser interferometer system. The diffraction grating is set at the center of the rotary table and reflects an incident laser beam into several diffractive rays. Two PSDs were set up for detecting the positions of ±1st-order diffraction rays. A simple algebraic method is used to solve the angular indexing through an optical analysis. The experimental results showed the feasibility of the proposed test devices.     

On correction of translational misalignments between section planes in 3D EBSD

Three‐dimensional electron backscatter diffraction allows obtaining the 3D image of a material from the stack of 2D sections. This is achieved by repeated application of two different beams; electron beam for electron backscatter diffraction mapping of the surface and focused ion beam for removing a thin layer of material from the surface. In most of these systems with two beams, the experiment requires stage movements for correct positioning of the sample to the respective beams. However, imperfections in this positioning are difficult to avoid, which yield small translational misalignments between the sections in the output data. In this work, we deal with an important task of correcting these misalignments between the sections such that the 3D image is recovered properly. On a simple example, we demonstrate that commonly used methods fail in case there is a structural anisotropy in the material under consideration. We propose an improved alignment algorithm which can neglect this behaviour with the use of external support information on a systematic trend in the translational misalignments. Efficiency of the algorithm is proven on a number of simulated data with different kinds of anisotropy. Application to a real data sample of a fine grained aluminium alloy is also given. The algorithm is available in an open‐source library.     

Design and control of a novel linear wire bonding head

Wire bonding has been one of the standard operations in plastic integrated circuit (IC) package assembly for a long time. With the development of IC assembly technology, the equipment of wire bonding should be improved for even higher performance. Thus, a novel linear wire bonding head driven by a permanent magnet linear motor (PMLM), instead of the rotary bonding structure, is designed to optimize the system structure and improve the performance of wire bonding. Based on two different wire bonding states, the switching control scheme corresponding to this linear structure is presented. In free motion, the position tracking control suppressing the vibration of flexible parts of the structure is performed at high speed and acceleration. In constrained motion, the active force control with direct contact force feedback is adopted for more precise bonding force compared with the indirect current feedback control in previous rotary structure. The experiment results show higher performance of wire bonding because of the combination of novel linear structure and control scheme.     

基于单目视觉的激光光束方向标定研究

在由激光位移传感器组成的测量系统中,激光光束的方向是一个关键参数.方位角和俯仰角对于一条激光光束是最为重要的两个参数.本文中提出一种基于单目视觉的激光光束方向测量方法.首先,将CCD相机放置于基础平面上方,保持相机光轴与基础平面接近于垂直状态,并利用误差为10μm的圆孔型标定板建立单目定位模型.然后将激光光束发生装置放置在基础平面上并保持位置固定,同时在基础平面上放置特制靶块,使激光光束可以投射到靶块斜面上并形成一个激光光斑.在基础平面上方放置的CCD相机可以清晰的采集到激光光斑、靶块斜面的图像,应用相关算法提取出光斑质心的二维图像坐标.沿激光光束方向以相等间距移动靶块,通过CCD相机采集每移动一次靶块在当前位置下的光斑、靶块图像.利用相关的转换公式,结合靶块本身固有参数,将光斑质心图像二维坐标转换为基础平面下的空间三维坐标.由于靶块的移动,会得到靶块不同位置下激光光斑质心的三维坐标,将这些三维坐标拟合成空间直线表征待测激光光束.拟合直线得俯仰角即为待测激光光束的俯仰角.实验中,应用高精度仪器对靶块参数进行测定,并使用高精度标定板标定相机内外参数建立相应的定位模型.测量精度主要通过单目视觉定位精度、光斑重心提取精度来保证.结果显示,待测光束的俯角最大误差达到0.02°,光束间夹角的最大误差为0.04°.     

可分离双参考光两次曝光全息法测机械变形方向

提出用可分离双参考光两次曝光全息测量物体变形方向的方法,设计的光络系统用两个平面反射镜将一束扩展激光束分成两束参考光和一束物光,藉此记录物体变形下的可分离双参考光两次曝光全息干涉图。这种干涉图含有物体变形的数值和方向的两种信息,从理论上对此作了分析,叙述了测量物体变形方向的方法,给出了试验结果。     

Magnetic quadrupole doublet focusing system for high energy ions

A high energy focused ion beam microprobe using a doublet arrangement of short magnetic quadrupole lenses was used to focus 1-3 MeV protons to spot sizes of 1x1 microm2 and 1-4.5 MeV carbon and silicon ion beams to spot sizes of 1.5x1.5 microm2. The results presented clearly demonstrate that this simple doublet configuration can provide high energy microbeams for microanalysis and microfabrication applications.     

Selective coupling of HE11 and TM01 modes into microfabricated fully metal-coated quartz probes

We report computational and experimental investigations on injection and transmission of light in microfabricated fully Aluminum-coated quartz probes. In particular, we show that a selective coupling of either the HE(11) or the TM(01) mode can be carried out by injecting focused linearly or radially polarized beams into the probe. Optical fields, emitted by the probe after a controlled injection, are characterized in intensity and phase with the help of an interferometric technique. With the help of near-field measurement, we finally demonstrate that a longitudinally polarized spot localized at the tip apex is actually produced when the TM(01) mode is coupled into the probe.     

Multibeam laser writing of diffractive optical elements

A new version of the method of direct multibeam laser writing of diffractive optical elements (DOE) is proposed and investigated. A writing area in the form of an array of focused light spots is formed by splitting the writing laser beam into multiple beams by using a Dammann grating and focusing of these beams in the plane of a moving carrier with a photosensitive material. Adjustment of the radial pitch of writing and correction of the uniformity of the beam intensity is carried out by tilting the Dammann grating and displacing it in the dispersion direction. In writing DOEs, the radial pitch of discrete displacement of the writing area with respect to the plane of the DOE is set equal to or multiple of the average radial distance between the radial projections of the centers of the focused light spots. This version provides improved performance and accuracy due to high-quality paralleling of the writing beam and the averaging effect in superimposed writing.     

Coupled bending and torsional vibration of axially loaded thin-walled Timoshenko beams

A dynamic transfer matrix method of determining the natural frequencies and mode shapes of axially loaded thin-walled Timoshenko beams has been presented. In the analysis the effects of axial force, warping stiffness, shear deformation and rotary inertia are taken into account and a continuous model is used. The bending vibration is restricted to one direction. The dynamic transfer matrix is derived by directly solving the governing differential equations of motion for coupled bending and torsional vibration of axially loaded thin-walled Timoshenko beams. Two illustrative examples are worked out to show the effects of axial force, warping stiffness, shear deformation and rotary inertia on the natural frequencies and mode shapes of the thin-walled beams. Numerical results demonstrate the satisfactory accuracy and effectiveness of the presented method.     

原地转向电动汽车参数化模型的建立

为了提高电动汽车的机动灵活性,实现车身绕任一点的旋转和沿任一方向的平移,提出了一种用于外转子式轮毂电机驱动电动汽车的原地转向设计方案。该方案采用主销偏置式双横臂悬架导向机构和锥齿轮线控转向机构,通过备份电机和电机切换机构提高线控转向的可靠性。另外,采用虚拟样机技术和机械系统动力学仿真分析软件ADAMS,建立了完全参数化的几何模型,并对悬架导向机构进行了优化设计。     

液压挖掘机动臂势能复合式再生系统的研究

为提高液压挖掘机的能量利用率,提出了一种新型复合式动臂势能回收方法。把动臂下落时的回油腔通过回转马达连接到1个蓄能器上,动臂下落时的势能一部分转化为蓄能器的液压能,在动臂提升时蓄能器的液压能转化为动臂的势能;一部分通过发电机转化为电能,储存在超级电容中。蓄能器的压力用来辅助驱动回转泵的转动,这样就可以减少回转马达功率的输入,通过调整马达的排量来控制动臂提升和下落的速度,利用2个液控单向阀来实现系统的保压。这种方法没有节流和溢流损失,回收效率高。通过仿真验证了方法的可行性,实现了动臂势能的回收,为动臂势能回收的实际应用提供了参考。     

变截面智能压电梁的动态特性研究

建立变截面智能压电梁的动态模型,分析表面粘贴压电元件的均质梁的固有频率。在分析时考虑坟电元件、粘贴层、梁的剪切变形和转动惯量。研究表明,压电元件的刚度和惯量对梁的频率影响很大,变截面智能压电梁的一除非 固有频率总是高于等截面梁的固有频率。粘结层剪切 对一阶频率影响较 剪切变 转动惯量时,对梁的高阶频率影响较大。考虑梁的惊动国惯量和剪切谱形时,智能阶梯梁的频率比没有时的要低。     

带式输送机的技术创新

通过加固纵梁，杜绝机尾跑道变形及损坏等现象；通过自身压带转载装置，克服了漂带现象；并对可弯曲带式输送机的研制提出了改造方向；指出通过自身压带转载装置，加装传动滚筒，有可能实现超长距离输送。     

Development of dual-probe atomic force microscopy system using optical beam deflection sensors with obliquely incident laser beams

We developed a dual-probe (DP) atomic force microscopy (AFM) system that has two independently controlled probes. The deflection of each cantilever is measured by the optical beam deflection (OBD) method. In order to keep a large space over the two probes for an objective lens with a large numerical aperture, we employed the OBD sensors with obliquely incident laser beams. In this paper, we describe the details of our developed DP-AFM system, including analysis of the sensitivity of the OBD sensor for detection of the cantilever deflection. We also describe a method to eliminate the crosstalk caused by the vertical translation of the cantilever. In addition, we demonstrate simultaneous topographic imaging of a test sample by the two probes and surface potential measurement on an α-sexithiophene (α-6T) thin film by one probe while electrical charges were injected by the other probe.     

基于旁瓣光束衍射反演的强激光远场焦斑测量方法

针对大型激光装置使用纹影法无法实现旁瓣光束弱信号区域光强分布精确测量的问题,提出了基于旁瓣光束衍射反演的纹影法强激光远场焦斑测量方法.采用逆向推演间接测量的研究方法,沿光路传播逆方向推导,以旁瓣光束衍射光强图像和相位图像作为输入,通过计算获得未遮挡前旁瓣光束远场焦斑分布.相比传统基于纹影的远场焦斑测量方法,本文的主要改...     

变截面压电智能梁的频率分析

建立了变截面压电智能梁的动态模型,分析了表面粘贴压电元件的均质梁的固有频率。在分析中考虑了压电元件和粘结层的影响,同时,还考虑了梁的剪切变形和转动惯量。研究表明,压电元件的刚度和惯量对梁的频率影响很大,粘结层剪切的弹性模量对一阶频率影响较小;当考虑梁的剪切变形和转动惯量时,则对梁的高阶频率影响较大。