Miniature orthogonal optical scanning mirror excited by torsional piezoelectric fiber actuator

A novel optical scanner excited by a torsional piezoelectric fiber actuator is presented. The device consists of a piezoelectric fiber actuator generating torsional and longitudinal vibrations simultaneously and a specially designed metal frame transforming the two vibrations to orthogonal deflections of the mirror. Theoretical and experimental studies were performed on the structure. The changing trends of the vibration modes and resonant frequencies were obtained from finite element simulations. Samples with 1 mm × 1 mm mirrors were fabricated from PZT hollow fibers with a diameter of 1 mm and a stainless steel sheet with a thickness of 50 μm. A horizontal scanning angle of 17.9° and a vertical scanning angle of 2.6° were achieved at 6780 and 10,330 Hz under an applied voltage of 400 V_p–p.     

Angular vertical comb actuators assembled on-chip using in-plane electrothermal actuators and latching mechanisms

We have designed, fabricated and tested self-aligned angular vertical comb-drive (AVC) actuators by on-chip assembly using in-plane electrothermal actuators and latching mechanisms. The on-chip assembly process is carried out by engaging latching mechanism connected to the torsion bars through the off-centered thinned down silicon beams. When the latching mechanism is fully engaged, the assembled AVC actuator forms permanent initial tilt angle by the retraction force of electrothermal actuators. The AVC actuators and latching mechanisms are fabricated on a silicon-on-insulator (SOI) wafer using three photomasks and three times of deep etch steps. The maximum optical scan angle of 30.7° is achieved at 4.56 kHz under the sinusoidal driving voltage of 0–80 V applied to the AVC actuator. After the reliability test performed by operating the actuator for 1.6 × 10⁸ cycles at its resonance, the measured optical scan angle variation and resonant frequency change were within 1.1% and 8 Hz, respectively, and the robustness of the latched mechanism was ensured.     

A MEMS-based tracking milli-mirror for high-density optical disk drives

We present a new MEMS-based milli-mirror for precise tracking in high-density optical disk drives (ODDs). The device consists of a torsionally suspended mirror plate, one pair of torsion springs, which support the mirror plate and offer a restoring torque, and two pairs of electrodes attached to the mirror plate and glass substrate. The dimensions of mirror plate and torsion springs were determined so that a 5 V dc bias ±4.5 V ac drive voltage would provide the mirror with ±0.02° rotation to transmit laser beam spot on spinning disk. The MEMS-based milli-mirror was successfully fabricated using MEMS technology. Displacement–voltage linearization scheme was implemented by differential voltage driving. The static and dynamic performances of mirror prototype, such as capacitance versus driving voltage, rotation angle versus driving voltage, and resonant frequency were characterized and compared well with the simulation solutions. The mechanical resonant frequency of the mirror is expected to be high enough to satisfy the requirement of the servo bandwidth of precise tracking-control in high-density blue-laser optical disk drive.     

Development of a novel micromirror based on surface micromaching technology

A novel 3 × 3 micromirror array is designed and successfully fabricated with multi-layer silicon surface micromaching technology. It is composed of bottom electrode, support part and mirror plate, in which a T type beam structure is used to support the mirror plate. It can provide mirror with the vertical movement and the rotation about two horizontal axes, thus enabling phase modulation and amplitude modulation for the incident light. The test results show that the maximum deflection length along the vertical direction of the mirror plate is 2 μm, while the rotation angle about X- and Y-axis are ±2.3° and ±1.45°, respectively.     

Tolerance analysis for comb-drive actuator using DRIE fabrication

Deep reactive ion etching (DRIE) process is specially invented for bulk micromachining fabrication with the objective of realizing high aspect ratio microstructures. However, various tolerances, such as slanted etched profile, uneven deep beams and undercut, cannot be avoided during the fabrication process. In this paper, the origins of various fabrication tolerances together with its effects on the performances of lateral comb-drive actuator, in terms of electrostatic force, mechanical stiffness, stability and displacement, are discussed. It shows that comb finger with positive slope generates larger electrostatic force. The mechanical stiffness along lateral direction increases when the folded beam slants negatively. The displacement is 4.832 times larger if the comb finger and folded beam are tapered to +1° and −1°, respectively. The uneven deep fingers generate an abrupt force and displacement when the motion distance reaches the initial overlap length. The undercut reduces both the driving force and the mechanical stiffness of the lateral comb-drive actuator. The fabricated comb-drive actuator, with comb finger of +1° profile and 0.025 μm undercut, and folded beam of −1° slope and 0.075 μm undercut, is measured and compared with the models where both show consistent results. These analytical results can be used to compensate the fabrication tolerances at design stage and allow the actuators to provide more predictable performance.     

Investigation of Ni-based thermal bimaterial structure for sensor and actuator application

Thermal bimaterial structures made of Ni and Ni-diamond nanocomposite for sensor and actuator application are proposed, fabricated, and tested. Two deflection types of thermal bimaterial structures, including upward and downward bending types, can be easily fabricated by controlling electroplating sequence of Ni and Ni-diamond nanocomposite. According to thermal performance measurement, the tip deflection of upward and downward types can reach about 82.5 μm and ?22.5 μm for a temperature change of 200 °C, respectively. In the condition, the thermomechanical sensitivity and output force are 412.5 nm/K and 97.0 μN for upward type thermal bimaterial structure; and ?112.5 nm/K and ?26.5 μN for downward type one. Due to the low electroplating process temperature (～50 °C) for both Ni-based layers, diminutive pre-deformation of as-fabricated structure and strong interlaminar bonding strength are verified by SEM and vibrational test. The resonant frequency of the structure remains unchanged after 10⁹ cycles.     

Investigation of the phase equilibria in Ti-Ni-Hf system using diffusion triples and equilibrated alloys

In present work, the phase equilibrium relations in the Ti-Ni-Hf ternary system, which are of great importance for the design of Ti-Ni based high temperature shape memory alloys, were investigated using diffusion triples and sixteen key equilibrated alloys. Based on the experimental results from electron-probe microscopy analysis (EPMA) and X-ray diffraction (XRD) techniques, two isothermal sections were constructed, which consist of 13 and 12 three-phase regions at 900 °C and 800 °C, respectively. Hf can substitute for Ti in TiNi and Ti₂Ni phases increasing from 30, 62 at% at 800 °C to 36, 64 at% at 900 °C, respectively. The Hf₇Ni₁₀ and Hf₉Ni₁₁ phases show wide ternary composition ranges, while the solubility of Ti in HfNi₅, Hf₂Ni₇, and HfNi phases are relatively limited. A new ternary phase of τ was detected for the first time, and the stoichiometry of τ phase is close to Ni:(Hf,Ti) = 11:14, with Ti substituting for Hf from ～5 at% to ～22 at%. The single-phase region of the τ phase became narrow as the decreasing of annealing temperature. Based on comparison of phase relations at 900 °C and 800 °C, it is speculated there is an invariant reaction TiNi + τ → HfNi + Ti₂Ni at between 900 °C and 800 °C.     

Electrical properties of nickel oxide thin films for flow sensor application

In this work, Ni oxide thin films, with thermal sensitivity superior to Pt and Ni thin films, were formed through annealing of Ni films deposited by a r.f. magnetron sputtering. The annealing was carried out in the temperature range of 300–500 °C under atmospheric conditions. Resistivity of the resulting Ni oxide films were in the range of 10.5 μΩ cm/°C to 2.84 × 10⁴ μΩ cm/°C, depending on the extent of Ni oxidation. The temperature coefficient of resistance (TCR) of the Ni oxide films also depended on the extent of Ni oxidation; the average TCR of Ni oxide resistors, measured between 0 and 150 °C, were 5630 ppm/°C for the 300 °C and 2188 ppm/°C for 500 °C films. Because of their high resistivity and very linear TCR, Ni oxide thin films are superior to pure Ni and Pt thin films for flow and temperature sensor applications.     

Mechanical design and characterization of a resonant magnetic field microsensor with linear response and high resolution

A resonant magnetic field microsensor based on Microelectromechanical Systems (MEMS) technology including a piezoresistive detection system has been designed, fabricated, and characterized. The mechanical design for the microsensor includes a symmetrical resonant structure integrated into a seesaw rectangular loop (700 μm × 450 μm) of 5 μm thick silicon beams. An analytical model for estimating the first resonant frequency and deflections of the resonant structure by means of Rayleigh and Macaulay's methods is developed. The microsensor exploits the Lorentz force and presents a linear response in the weak magnetic field range (40–2000 μT). It has a resonant frequency of 22.99 kHz, a sensitivity of 1.94 V T^?1, a quality factor of 96.6 at atmospheric pressure, and a resolution close to 43 nT for a frequency difference of 1 Hz. In addition, the microsensor has a compact structure, requires simple signal processing, has low power consumption (16 mW), as well as an uncomplicated fabrication process. This microsensor could be useful in applications such as the automotive sector, the telecommunications industry, in consumer electronic products, and in some medical applications.     

Passive single chip wireless microwave pressure sensor

A novel micromachined passive wireless pressure sensor is presented. The device consists of a tuned circuit operating at 10 GHz fabricated on to a SiO₂ membrane, supported on a silicon wafer. A pressure difference across the membrane causes it to deflect so that an antenna circuit detunes. The circuit is remotely interrogated to read off the sensor data wirelessly. The chip area is 5 mm × 4 mm and the membrane area is 2 mm² with a thickness of 4 μm. Two on-chip passive resonant circuits were investigated: a meandered dipole and a zigzag antenna. Both have a physical length of 4.25 mm. The sensors show a shift in their resonant frequency in response to changing pressure of 10.28–10.27 GHz for the meandered dipole, and 9.61–9.58 GHz for the zigzag antenna. The sensitivities of the meandered dipole and zigzag sensors are 12.5 kHz/mbar and 16 kHz/mbar respectively.     

Design and fabrication of an alternating dielectric multi-layer device for surface plasmon resonance sensor

An alternating dielectric multi-layer device was fabricated and tested in the laboratory to show that dielectric mirrors of alternating high/low refractive index materials, based on the design of distributed Bragg reflector (DBR) for vertical cavity surface emission lasers (VCSELs), can be used in designing SPR biochemical sensors. The thickness, number of layers, and other design parameters of the device used were optimized using optical admittance loci analysis. The proof-of-concept device was fabricated with a symmetrical structure using Au/(SiO₂/TiO₂)₄/Au.Using a 632 nm-wavelength light source on a BK7 coupling prism, our laboratory tests showed that, under water, there was an 11.5° shift in resonant peak position towards the critical angle (from 74° in a conventional single-layer Au film), and a 3.25 times decrease in FWHM (the half-peak width). Our design also resulted in a wider dynamic range of up to a 1.50 refractive index unit (RIU), compared to 1.38 RIU in a conventional single-layer Au film. Using glucose solutions in ddH₂O, the calculated resolution was 1.28 × 10⁻⁵. The calculated intensity sensitivity was 10 000 a.u./RIU, about twice the improvement over the conventional single-layer Au film.     

Fuzzy logic and statistical-based modelling of the Marshall Stability of asphalt concrete under varying temperatures and exposure times

In this study, the Marshall Stability (MS) of asphalt concrete under varying temperature and exposure times was modelled by using fuzzy logic and statistical method. This is an experimental study conducted using statistics and fuzzy logic methods. In order to investigate the Marshall Stability of asphalt concrete based on exposure time and environment temperature, exposure times of 1.5, 3, 4.5 and 6 h and temperatures of 30, 40 and 50 °C were selected. The MS of the asphalt concrete at 17 °C (in laboratory environment temperature) was used as reference. The results showed that the MS of the asphalt core samples decreased 40.16% at 30 °C after 1.5 h and 62.39% after 6 h. At 40 °C the decrease was 74.31% after 1.5 h, and 78.10% after 6 h. At 50 °C the stability of the asphalt decreased 83.22% after 1.5 h, 88.66% after 6 h. The relationships between experimental results, fuzzy logic model and statistical results exhibited good correlation. The correlation coefficient was R = 0.99 for fuzzy logic model and R² = 0.9 for statistical method. Based on the results of the study, it could be said that both the fuzzy logic method and statistical methods could be used for modelling of the stability of asphalt concrete under varying temperature and exposure time.     

Effect of the field of view on perceiving world-referenced image motion during concurrent head movements

We have previously shown that concurrent head movements impair head-referenced image motion perception when compensatory eye movements are suppressed (Li, Adelstein, & Ellis, 2009) [16]. In this paper, we examined the effect of the field of view on perceiving world-referenced image motion during concurrent head movements. Participants rated the motion magnitude of a horizontally oscillating checkerboard image presented on a large screen while making yaw or pitch head movements, or holding their heads still. As the image motion was world-referenced, head motion elicited compensatory eye movements from the vestibular-ocular reflex to maintain the gaze on the display. The checkerboard image had either a large (73°H × 73°V) or a small (25°H × 25°V) field of view (FOV). We found that perceptual sensitivity to world-referenced image motion was reduced by 20% during yaw and pitch head movements compared to the veridical levels when the head was still, and this reduction did not depend on the display FOV size. Reducing the display FOV from 73°H × 73°V to 25°H × 25°V caused an overall underestimation of image motion by 7% across the head movement and head still conditions. We conclude that observers have reduced perceptual sensitivity to world-referenced image motion during concurrent head movements independent of the FOV size. The findings are applicable in the design of virtual environment countermeasures to mitigate perception of spurious motion arising from head tracking system latency.     

An uncooled optically readable infrared imaging detector

This paper presents a design and fabrication of bi-material micro-cantilever array (focal plane array, FPA) made of silicon nitride (SiN_x) and gold (Au) for uncooled optical readout infrared (IR) imaging system, in which silicon (Si) substrate is removed. Compared with the conventional thermal imaging detectors where the FPA must be put in high vacuum, IR thermal images can be obtained even though the cantilever array is placed in the atmosphere. The reason is the elimination of air gap (∼2 μm) between the cantilever beam and substrate, which introduces the air conduction of high temperature gradient. The preliminary experimental results with the micro-cantilever array of 140 × 98 elements and a 12-bit charge-coupled device (CCD) indicate that objects at temperature of higher than 120 °C can be detected and the noise-equivalent temperature difference (NETD) is ∼7 K. Also, the experimental results are well accordant with the thermomechanical analysis of designed micro-cantilever array.     

Hexagon-based all-quadrilateral mesh generation with guaranteed angle bounds

In this paper, we present a novel hexagon-based mesh generation method which creates all-quadrilateral (all-quad) meshes with guaranteed angle bounds and feature preservation for arbitrary planar domains. Given any planar curves, an adaptive hexagon-tree structure is constructed by using the curvature of the boundaries and narrow regions. Then a buffer zone and a hexagonal core mesh are created by removing elements outside or around the boundary. To guarantee the mesh quality, boundary edges of the core mesh are adjusted to improve their formed angles facing the boundary, and two layers of quad elements are inserted in the buffer zone. For any curve with sharp features, a corresponding smooth curve is firstly constructed and meshed, and then another layer of elements is inserted to match the smooth curve with the original one. It is proved that for any planar smooth curve all the element angles are within [60° ? ε, 120° + ε] (ε ? 5°). We also prove that the scaled Jacobians defined by two edge vectors are in the range of [sin (60° ? ε),  sin 90°], or [0.82, 1.0]. The same angle range can be guaranteed for curves with sharp features, with the exception of small angles in the input curve. Furthermore, an approach is introduced to match the generated interior and exterior meshes with a relaxed angle range, [30°, 150°]. We have applied our algorithm to a set of complicated geometries, including the China map, the Lake Superior map, and a three-component air foil with sharp features. In addition, all the elements in the final mesh are grouped into five types, and most elements only need a few flops to construct the stiffness matrix for finite element analysis. This will significantly reduce the computational time and the required memory during the stiffness matrix construction.     

Effect of temperature on humido-sensitive conducting polymer actuators

Temperature dependence of water vapor sorption and electro-active polymer actuating behavior of free-standing films made of poly(3,4-ethylenedioxythiophene) doped with poly(4-styrenesulfonate) (PEDOT/PSS) was investigated by means of sorption isotherm and electromechanical analyses. The non-porous PEDOT/PSS film, having a specific surface area of 0.13 m² g^?1, sorbed water vapor of 1080 cm³(STP) g^?1, corresponding to 87 wt%, at relative water vapor pressure of 0.95. A temperature rise from 25 °C to 40 °C lowered sorption degree, indicative of an exothermic process, where isosteric heat of sorption decreased with increasing water vapor sorption and the value reached 43.9 kJ mol^?1, being consistent with the heat of water condensation (44 kJ mol^?1). Upon application of 10 V, the film underwent contraction of 2.46% at 5 °C caused by desorption of water vapor due to Joule heating, which slightly decreased to 2.10% at 45 °C. The speed of contraction was one order of magnitude faster than that of expansion and less dependent on the temperature since water vapor sorbed in the film were forced to desorb by Joule heating. In contrast, the higher the temperature the faster the film expansion because diffusion coefficient increased as the temperature became higher.     

Guaranteed-quality all-quadrilateral mesh generation with feature preservation

In this paper, a quadtree-based mesh generation method is described to create guaranteed-quality, geometry-adapted all-quadrilateral (all-quad) meshes with feature preservation for arbitrary planar domains. Given point cloud, our method generates all-quad meshes with these points as vertices and all the angles are within [45°, 135°]. For given planar curves, quadtree-based spatial decomposition is governed by the curvature of the boundaries and narrow regions. 2-refinement templates are chosen for local mesh refinement without creating any hanging nodes. A buffer zone is created by removing elements around the boundary. To guarantee the mesh quality, the angles facing the boundary are improved via template implementation, and two buffer layers are inserted in the buffer zone. It is proved that all the elements of the final mesh are quads with angles between 45° ± ε and 135° ± ε (ε ≤ 5°) with the exception of badly shaped elements that may be required by the sharp angles in the input geometry. We also prove that the scaled Jacobians defined by two edge vectors are in the range of [sin(45° ? ε), sin90°], or [0.64, 1.0]. Furthermore, sharp features and narrow regions are detected and preserved automatically. Boundary layer meshes are generated by splitting elements of the second buffer layer. We have applied our algorithm to a set of complicated geometries, including the Lake Superior map and the air foil with multiple components.     

Thin film temperature sensor for real-time measurement of electrolyte temperature in a polymer electrolyte fuel cell

This paper describes a technique for the measurement of the electrolyte temperature in an operating polymer electrolyte fuel cell (PEFC). A patterned thin film gold thermistor embedded in a 16 μm thick parylene film was laminated in the Nafion^® electrolyte layer for in situ temperature measurements. Experimental results show that the sensor has a linear response of (3.03 ± 0.09) × 10⁻³ °C⁻¹ in the 20–100 °C temperature range and is robust enough to withstand the electrolyte expansion forces that occur during water uptake. An electrolyte temperature increase of 1.5 °C was observed in real-time when operating the fuel cell at 0.2 V and a current density of 0.19 A/cm². The temperature sensitivity of the present sensor is in an order of magnitude better than the conventional micro-thermocouples that have been reported. Additionally, use of micro-fabrication techniques allows for an accurate placement of the temperature sensor within the fuel cell. Simulation results show that the sensor has no significant effect on the local temperature distribution.     

Thermodynamics of Fe–S at ultra-high pressure

Earth's core is believed to consist of a solid inner core and an outer liquid core. Since the inner core is mostly solid iron, most geophysical work has focused on melting of pure iron at core conditions. The inner core density is well matched with seismological data if some S is added to iron. The available phase equilibrium experimental data in the binary Fe–S system to pressures as high as ~200 GPa is used to create a thermodynamic database extending to core pressures that can be used to calculate the inner core density if S were the only other constituent. Such a calculation gives the maximum temperature of the solid inner core as 4428 (±500) K (363.85 GPa, density=13.09 g/cm³) with a sulfur content of ~15 wt%. To be consistent with the seismically determined density, the outer liquid core requires mixing of yet another light element or elements; both oxygen and carbon are suitable.