GaN基蓝紫光激光器的材料生长和器件研制

报道了国内首次研制成功的GaN基蓝紫光激光器的材料外延生长、器件工艺和特性.用MOCVD生长了高质量的GaN及其量子阱异质结材料,以及异质结分别限制量子阱激光器结构材料.GaN材料的X射线双晶衍射摇摆曲线(0002)对称衍射和(10(-1)2)斜对称衍射半宽分别为180″和185″;3μm厚GaN薄膜室温电子迁移率达到850cm2/(V·s).基于以上材料,分别成功研制了室温脉冲激射增益波导和脊型波导激光器,阈值电流密度分别为50和5kA/cm2,激光发射波长为405.9nm,脊型波导结构激光器输出光功率大于100mW.     

High-Performance Blue InGaN Laser Diodes With Single-Quantum-Well Active Layers

The authors report on the high-performance blue laser diodes (LDs) with an emission wavelength of ~448 nm employing InGaN single-quantum-well (QW) active layers. At 100-mW continuous-wave (CW) output power, operation current and voltage are, respectively, 150 mA and 5.3 V, corresponding to the wall plug efficiency of >12%, a record value for the single-mode InGaN LDs with blue wavelengths. The single QW blue LD showed normal temperature dependence of light output-current curves with the characteristic temperature of 170 K. In addition, we demonstrate a high level of catastrophic optical damage of >300 mW and long device lifetime under CW operation condition at room temperature.     

GaN-based blue laser diode with 6.0 W of output power under continuous-wave operation at room temperature

In this work,we reported the room-temperature continuous-wave operation of 6.0 W GaN-based blue laser diode(LD),and its stimulated emission wavelength is around 442 nm.The GaN-based high power blue LD is grown on a c-plane GaN substrate by metal organic chemical vapor deposition(MOCVD),and the width and length of the ridge waveguide structure are 30 and 1200 μm,respectively.The threshold current is about 400 mA,and corresponding threshold current density is 1.1 kA/cm2.     

InGaAs／InGaAsP分别限制应变量子阱激光器的研制及其特性研究

报道了利用ＬＰ－ＭＯＶＰＥ技术生长高质量的ＩｎＧａＡｓ／ＩｎＧａＡｓＰ分别限制应变量子阱激光器结构材料、激光器制作和结果．宽而激光器实现了室温脉冲受激发射．激射波长为１．４９μｍ，在腔长为２０００μｍ时，最低阈值电流密度为０．３０ｋＡｃｍ－２．最大脉冲光输出峰值功率达５００ｍＷ以上．同时，从理论和实验上研究了阙值电流及阙值电流密度随激光器腔长的变化关系，并与ＬＰ－ＭＯＶＰＥ生长制作的宽面双异质结构激光器进行了比较．     

1.3μm GaAs基GaInNAs量子阱生长与激光器研制

报道了中国第一只1.30μm单量子阱边发射激光器的材料生长、器件制备及特性测试.通过优化分子束外延生长参数,调节In和N组分含量使GaInNAs量子阱的发光波长覆盖1.3μm范围.脊形波导条形结构单量子阱边发射激光器,实现了室温连续激射,激射波长为1.30μm,阈值电流密度为1kA/cm2,输出功率为30mW.     

InGaN multiple quantum well laser diodes grown by molecular beam epitaxy

The first InGaN multiple quantum well laser diodes produced by molecular beam epitaxy are reported. Ridge waveguide lasers have been demonstrated at room temperature under pulsed current injection conditions. The lasers emit at a wavelength of approximately 400 nm with a spectral line-width of less than 0.2 nm, and a threshold current density of /spl sim/30 kA cm/sup -2/.     

Short-Injector Quantum Cascade Laser Emitting at 8-$mu$m Wavelength With High Slope Efficiency

This letter presents experimental results of a three-alloy-based short-injector quantum cascade laser (QCL). The investigated 4-mm-long device shows a pulsed threshold current density of 1.24 kA/cm² , a slope efficiency of 1.4 W/A, a characteristic temperature above 250 K, and a peak average output power above 726 mW at room temperature. A good high-temperature performance is attributed to the diagonal transition design and better depopulation of the lower laser levels at higher temperatures. The laser emission wavelength at room temperature is 8 mum, resulting in a low voltage defect of 71 meV per period for the QCL structure.     

Room temperature pulsed operation of 498 nm laser with ZnMgSSe cladding layers

Room temperature pulsed operation of ZnCdSe/ZnSe/ZnMgSSe SCH lasers has been achieved. Blue-green stimulated emission is observed at a wavelength of 498.5 nm. The threshold current density is 2.8 kA/cm/sup 2/ for the diode made by molecular beam epitaxy.<>     

Room temperature continuous wave operation of GaInP/AlInP visible-light laser with GaInP/AlInP superlattice confinement layer grown by gas source molecular beam epitaxy

A remarkable threshold current density reduction (from 3.5 kA/cm/sup 2/ to 1.6 kA/cm/sup 2/) of GaInP/AlInP visible light lasers grown by gas source molecular beam epitaxy (GS-MBE) was obtained by introducing 50 pairs of GaInP(7.1 AA)/AlInP(7.1 AA) short period superlattice confinement (SLC) layers. As a result, the room temperature continuous wave (CW) operation was obtained at 669 nm with a minimum threshold current of 50 mA and maximum light output of 10.5 mW.<>     

Room temperature performance of low threshold 1.34-1.44-/spl mu/m GaInNAs-GaAs quantum-well lasers grown by molecular beam epitaxy

Room temperature lasing emission at 1.338 and 1.435 /spl mu/m with threshold current densities of 1518 and 1755 A/cm/sup 2/, respectively, is obtained in broad area GaInNAs-GaAs laser diodes (LDs) grown by molecular beam epitaxy. The 1.338-/spl mu/m LDs show a power output per facet up to 0.20 W/A, a characteristic temperature (T/sub 0/) of 78 K, and an external transparency current density (J/sub tr/) of 0.77 kA/cm/sup 2/. Increasing the lasing wavelength to 1.435 /spl mu/m results in a larger J/sub tr/ of 1.16 kA/cm/sup 2/ and a lower T/sub 0/ of 62 K, due to larger nonradiative recombination. However, the 1.435-/spl mu/m LDs still display a power output per facet up to 0.15 W/A, and a high internal quantum efficiency of 52%. These improved performances are achieved without the need to use strain compensation layers, Sb as a surfactant during the quantum-well growth, or a postgrowth thermal anneal cycle.     

Multiple-quantum-well GaInNAs-GaNAs ridge-waveguide laser diodesoperating out to 1.4 μm

In this letter, results from a ridge waveguide laser diode (LD) structure, with three GaInNAs quantum wells (QWs) and GaNAs barriers, are presented. The sample was grown by solid source molecular beam epitaxy with an RF plasma nitrogen source. These devices differ from previously reported GaInNAs QWs LDs that used GaAs as the barrier material. The introduction of nitrogen into the barriers reduces the spectral blue shift caused by post-growth annealing. Long wavelength emission out to 1.405 μm was observed. The devices exhibited threshold current densities as low as 1.5 kA/cm², high differential efficiency of 0.67 W/A, and a maximum output power of 350 mW     

大功率GaAs/GaAlAs单量子阱激光器

采用MOCVD技术在φ40mmGaAs衬底上研制成大功率GaAs/GaAlAs单量子阱激光器。该激光器激射波长为830～870nm,室温CW阈值电流密度小于350A/cm~2,最低值为310A/cm~2,输出光功率大于200mW/(单面,未镀膜)。     

Pulse operation and threshold characteristics of 1.55-μmInAlGaAs-InAlAs VCSELs

All-monolithic air-post index-guided vertical-cavity surface-emitting lasers have been demonstrated under pulsed electrical injection at room temperature. The structure grown in single step by metal-organic chemical vapor deposition employs InP lattice matched InAlAs/InAlGaAs Bragg mirrors and a 2λ-thick periodic gain active region with 15 InGaAs quantum wells (QWs). We report threshold current characteristics of these devices grown on a 2-in wafer with wide emission wavelength range of 1.51~1.59 μm. For the devices larger than 30-μm in diameter, we found the minimum threshold current density of ~2.93 kA/cm² at the emission wavelength of 1.57 μm, corresponding to about 20 nm wavelength offset between photoluminescence peak of InGaAs QWs and resonant cavity wavelength     

Continuous-wave operation of GaInAs-AlGaAsSb quantum cascade lasers

We report on the demonstration of continuous-wave (CW) operation of GaInAs-AlGaAsSb quantum cascade (QC) lasers. By placing a 2.5-/spl mu/m-thick gold layer on both sides of the laser ridge to extract heat from the active region in the lateral direction, together with mounting the device epilayer down, we have achieved CW operation of GaInAs-AlGaAsSb QC lasers composed of 25 stages of active/injection regions. The maximum CW operating temperature of the lasers is 94 K, and the emission wavelength is around /spl lambda//spl sim/4.65 /spl mu/m. For a device with the size of 10/spl times/2000 /spl mu/m/sup 2/, the CW optical output power per facet is 13 mW at 42 K and 4 mW at 94 K. The CW threshold current density is 1.99 kA/cm/sup 2/ at 42 K, and 2.08 kA/cm/sup 2/ at 94 K, respectively.     

Short wavelength (/spl lambda//spl sim/4.3 /spl mu/m) high-performance continuous-wave quantum-cascade lasers

We report continuous-wave (CW) operation of a 4.3-/spl mu/m quantum-cascade laser from 80 K to 313 K. For a high-reflectivity-coated 11-/spl mu/m-wide and 4-mm-long laser, CW output powers of 1.34 W at 80 K and 26 mW at 313 K are achieved. At 298 K, the CW threshold current density of 1.5 kA/cm/sup 2/ is observed with a CW output power of 166 mW and maximum wall-plug efficiency of 1.47%. The CW emission wavelength varies from 4.15 /spl mu/m at 80 K to 4.34 /spl mu/m at 298 K, corresponding to a temperature-tuning rate of 0.87 nm/K. The beam full-width at half-maximum values for the parallel and the perpendicular far-field patterns are 26/spl deg/ and 49/spl deg/ in CW mode, respectively.     

具有超晶格缓冲层的量子阱激光器的研制

在衬底表面制作超晶格缓冲层可以有效地掩埋体材料的缺陷，使阈值电流大幅度降低，光功率成倍增长。所研制出的量子阱激光器室温脉冲平均线性光功率大于２０ｍＷ（未镀反射膜），波长为７７８ｎｍ，最低阈值电流为３０ｍＡ，阈值电流密度为４００～６００Ａ／ｃｍ２，谱线宽度为５ｎｍ。     

Room-temperature laser emission of GaInNAs-GaAs quantum wells grown on GaAs (111)B

In this work, we present room-temperature laser emission at 1.206 /spl mu/m from GaInNAs-GaAs quantum-well (QW) laser diodes (LDs) grown on misoriented GaAs (111)B substrates for the first time. Details of the structure and the molecular beam epitaxial growth of the lasers are discussed. We found that the postgrowth rapid thermal annealing increased the optimum emission, while the in situ self annealing effect in these QWs is almost negligible. The optimum annealing cycle (30 s at 850/spl deg/C) is comparable to that found for the cladding-free GaInNAs single QW samples grown on GaAs (111)B. Finally, the optical and electrical characterization of these LD devices is presented. The LDs show a room-temperature threshold current density of 2.15 kA/cm/sup 2/, with a differential quantum efficiency of 37%, under pulsed conditions.     

GaAs/AlGaAs multiple quantum well GRIN-SCH vertical cavity surfaceemitting laser diodes

Vertical cavity surface emitting lasers (VCSELs) with GaAs/AlGaAs multiple quantum well (20 wells) graded-index separate-confinement-heterostructure (GRIN-SCH) active regions are discussed. The VCSEL structures, which also contained two Al_xGa_1-xAs/Al_yGa_1-yAs distributed Bragg reflectors, were grown by molecular beam epitaxy and had a threshold current and current density at room temperature pulsed excitation of 16 mA and 14 kA/cm², respectively, near 0.85-μm wavelength. Both single-longitudinal and fundamental transverse mode emission characteristics were observed with a light output greater than 3 mW and a slope efficiency of 0.12 mW/mA     

1.3-/spl mu/m Vertical-cavity surface-emitting lasers with double-bonded GaAs-AlAs Bragg mirrors

We demonstrate, for the first time, double-bonded AlGaInAs strain-compensated quantum-well 1.3-/spl mu/m vertical-cavity surface-emitting lasers (VCSELs). GaAs-AlAs Bragg mirrors were wafer-bonded on both sides of a cavity containing the AlGaInAs strain-compensated multiple-quantum-well active layers sandwiched by two InP layers. The lasers have operated under pulsed conditions at room temperature. A record low pulsed threshold current density of 4.2 kA/cm/sup 2/ and a highest maximum light output power greater than 4.6 mW have been achieved. The maximum threshold current characteristic temperature T/sub 0/ of 132 K is the best for any long wavelength VCSELs. The laser operated in a single-longitudinal mode, with a side-mode suppression ratio of more than 40 dB, which is the best results for 1.3-/spl mu/m VCSELs.     

Low-threshold CW GaInNAsSb/GaAs laser at 1.49 /spl mu/m

Low-threshold room temperature continuous wave 1.49 /spl mu/m GaInNAsSb lasers are presented. Room temperature threshold current density of 1.1 kA/cm/sup 2/ was observed with a high external quantum efficiency of 40% and maximum output power of 30 mW from both facets.