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1.
提出了一种高精度、大行程的原子力显微镜探针结构,可用于测量大面积的微观结构表面.该探针结构包括一个硅悬臂梁和一个环形的预压型电(PZT)执行器,执行器沿Z轴的行程为70μm,其内部集成了一个具有纳米级分辨率的小型线性编码器,可用于测量PZT执行器的位移,编码器的刻度沿执行器的轴向(Z轴)排列以消除阿贝误差.此线性编码器使原子力显微镜探针PZT执行器的行程范围内具有1nm的分辨率,原子力显微镜探针结构联接有两个线性平移台,可用于X和Y方向扫描样本,扫描面积为50mm(X)×40mm(Y).X向平移台和Y向平移台的移动量可由线性编码器测得,分辨率为纳米级.进行了正弦曲面的测量实验.  相似文献   

2.
提出了一种基于线阵CCD投影法的插针外径自动测量分选系统。文章详细论述了线阵CCD投影法的工作原理和自动测量分选系统的结构设计。实验结果表明,该系统具有精度高、稳定性好等特点。插针直径测量范围为0·3~1·0mm,测量准确度可达3μm左右,测量分选速度大于70个/min。  相似文献   

3.
研制了压电陶瓷(PZT)驱动叠加柔性铰链运动机构的二维纳米位移台。介绍了位移系统的结构并分析了位移系统的工作位移刚度,理论和仿真结果误差在6.3%以内。根据线性干涉仪原理构建了一套激光干涉测量系统,阐述了测量系统的布局及位移测试原理并测量纳米位移台行程及定位准确性。实验结果表明:位移台在100μm行程内,x轴和y轴的测试位移为99.6μm和97.7μm。同时分析了测试系统的误差来源并评估测量系统的不确定度,得到该测量系统x轴和y轴的合成标准不确定分别为10.04 nm和13.93 nm。  相似文献   

4.
研究了线圈、多极混合磁位形ECR等离子体及刻蚀特性。静电探针测量结果表明,在φ200mm,φ100mm范围内等离子体离子流强径向不均匀性为±21.5%,±5.3%。4英寸片片内刻蚀不均匀性≤±0.5%,0.25μm线宽刻蚀方向性为0.75。并结合等离子体特性及刻蚀机理,对有关结果进行了分析。  相似文献   

5.
设计了一种圆管类工件直线度激光测量系统,提出了一整套关于圆管类工件定心、内径获取和直线度计算的方法。研制了高精度的自动定心机构,采用双锥体同轴定心法实现测量系统在圆管类工件内的高精度自动定心。通过位置敏感探测器(PSD)和准直激光获得圆管各截面中心坐标,结合旋转扫描机构获得圆管内径测量值,并采用最小二乘椭圆拟合算法进行定心误差修正,最后进行数据处理,计算出工件直线度。实验结果表明,该系统定心准确度可达20μm,内径测量准确度可达5μm,测量重复性稳定在7μm以内,直线度测量准确度在40μm以内。  相似文献   

6.
为了解决扫描电子显微镜(SEM)在100 nm以下的微纳几何结构尺寸精确测量方面的不足,实现SEM测量值的量值传递与溯源,研制了一套计量型SEM测控系统。该系统主要由位移台运动控制模块、激光干涉位移测量模块和图像采集与处理模块组成,基于LabVIEW图形编程语言开发了测控系统上位机软件。对1μm×1μm二维栅格样品进行尺寸测量实验,结果表明,该计量型SEM测控系统运行稳定可靠,且在10μm测量范围内的测量值示值误差优于10 nm。  相似文献   

7.
利用红外辐射测温原理,设计成半导体基片上激光焦斑温度不接触测量系统。该系统由透镜成像系统、探测器、精密电动平台及相关电路和软件组成,其测温范围大,温度分辨力可达0.2K,还可得到温度-时间关系曲线;可自动测量热斑的温度分布及寻找热斑的最高温度区域;测量区域的最小直径为18μm。  相似文献   

8.
针对重水堆压力管辐照后具有较强的放射性不能直接测量等问题,采用一种在十字定位基础上的比较测量方法,在热室内建立一套可使用计算机远程控制的压力管内径测量系统。研究结果表明:该套测量系统可通过热室外操作吊车和机械手实现压力管的装卡,系统的重复测量准确度在0.4μm以内,绝对测量准确度在±3μm以内,该套热室内测量系统符合压力管内径测量的检测要求,可进行辐照后压力管尺寸测量工作。  相似文献   

9.
为实现蠕变试样变形量的自动测量,建立了自动变形测量系统,该系统主要包括三个子系统:位移测量、数据采集以及试验监控及数据处理。该三个子系统有效地结合在一起构成整个系统,实现了利用一台计算机同时显示、记录八台蠕变试验机16个位移传感器动态微量变形的自动测量。  相似文献   

10.
本文针对机械探针是粗糙度测量仪的不足提出并采用基于差动像散法的光探针技术测量表面粗糙度,采用小波包分析法分离表面粗糙度信号。研究表明该系统不仅测量分辨率高,而且对工件表面无任何划伤,尤其适合对光盘等含有信息的表面及软、脆材料制作的高光洁表面进行形貌测量。对Ra为0.012μm的粗糙度样板进行测量,其测量重复性为2%。  相似文献   

11.
In this paper, we present a new method for inserting several triangulated surfaces into an existing tetrahedral mesh generated by the meccano method. The result is a conformal mesh where each inserted surface is approximated by a set of faces of the final tetrahedral mesh. First, the tetrahedral mesh is refined around the inserted surfaces to capture their geometric features. Second, each immersed surface is approximated by a set of faces from the tetrahedral mesh. Third, following a novel approach, the nodes of the approximated surfaces are mapped to the corresponding immersed surface. Fourth, we untangle and smooth the mesh by optimizing a regularized shape distortion measure for tetrahedral elements in which we move all the nodes of the mesh, restricting the movement of the edge and surface nodes along the corresponding entity they belong to. The refining process allows approximating the immersed surface for any initial meccano tetrahedral mesh. Moreover, the proposed projection method avoids computational expensive geometric projections. Finally, the applied simultaneous untangling and smoothing process delivers a high‐quality mesh and ensures that the immersed surfaces are interpolated. Several examples are presented to assess the properties of the proposed method.  相似文献   

12.
We associate a variety of innovations with the term "Industry 4.0". The pioneer of many 4.0 modifications forms the basisfor the trend towards the integrated di...  相似文献   

13.
A four-ball tester was used to evaluate the anti-wear performance of three kinds of organomolybdemun compounds in the engine oils, i. e., molybdenum dialkyldithiophosphate (MoDDP), molybdenum dialkyldithiocarbamate ( MoDTC), and sulphur and phosphorus freeorganomolybdeum (Molybdate). The results indicate that a low concentration of MoDDP doesn' t improve the anti-wear properties of the commercial engine oils, but a high concentration of MoDDP can obviously improve the anti-wear properties and the load-carrying capacity of the engine oils. MoDTC doesn' t improve the antiwear properties of the engine oils, but worsens the anti-wear properties of the oils. Signifi can timprove ment of frictional and wear characteristics is obtained with Molybdate added in the commercial engine oils and the formulated oils.  相似文献   

14.
15.
ABSTRACT

The production of ferrous metal increased during the Roman Late Republican period, Principate and Empire. The direct bloomery process was used to extract the metal from its ores using slag-tapping and slag-pit furnaces. The fuel was charcoal and an air blast was introduced by bellows-operated tuyères. Iron formed as a bloom, often as a spongy mass of metal, which contained impurities from the smelting process, including unreacted ore, fuel, slag and fragments from the furnace walls, while the metal was often inhomogeneous with varied carbon contents. Blooms were either smithed directly into bars or ingots or they were broken up, which also allowed the removal of gross impurities and a selection of pieces with similar properties to be made. These could then be forge-welded together and formed into characteristically shaped ingots. Making steel in the furnace seems to have been achieved: it depended on the ore and the furnace and conditions within it. Surface carburization was also carried out. Iron and steel were used extensively in construction and for tools and weapons. Fire welding was often used to add pieces of steel to make the edges of tools and weapons, which could be heat-treated by quenching to harden them.  相似文献   

16.
Standards are the basis for production enterprises to organize production, ex-factory inspection, trade (delivery) and technical exchanges, product certification, quality arbitration and supervision.……  相似文献   

17.
A flow calorimeter for enthalpy increment measurements on condensed gases is presented. A better knowledge of the properties of the liquefied natural gas is needed, and therefore a liquid loop has been designed for our flow calorimeter. The fluid loop in the calorimeter is designed in order to avoid the two-phase region, since two phases would give compositional disturbances in the measurements. The avoidance of the two-phase region is made possible by increasing the pressure of the test fluid after the measurement section, then heating the fluid at super-critical pressure past the critical point. Finally, the fluid is throttled to the low-pressure gas state at the inlet condition of the compressor that circulates the fluid. To perform the pressure increase, a new cryogenic pump has been designed. To evaluate the new equipment, measurements were taken on liquid ethane over the temperature range 146–256 K at pressure between 0.9 and 5.1 MPa.  相似文献   

18.
The end of 2007, over 200 unit products of more than 80 Chinese firms have passed the quality grade certification for liquor products. These products involve distilled spirits, beer, wine, yellow wine, fruit syrup wine and others, and cover over 80% of the national top-branded liquor products.……  相似文献   

19.
Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster.  相似文献   

20.
Al2O3-ZrO2 nanocomposites were developed starting with the solgel process. Composite alumina-zirconia nanopowders were synthesized from metallorganic precursors (Aluminium secondary butoxide and zirconium Iso propoxide) using the solgel process. The parameters affecting the synthesis—solvent, concentration of precursor, R/H ratio (i.e., dilution of water in solvent)—were varied as also the temperature and pH. BET and TEM were used to measure nanosize. Diffuse reflectance spectroscopy and also qualitative optical absorption led to identical particle size estimate. The variation of process parameters was used to study the effect and interdependence of process parameters. Artificial Neural Networks was used to rigorously analyze the process. Although this led to confirmation of interdependence of parameters, the presence of a single overwhelming solvent variable was also established. Then the optimal process was used to synthesize more nanopowder. To produce bulk nanocomposite the nanopowders were sintered by varying the temperature and time period. The sintered lithoids were probed with a vickers hardness tester to measure elastic modulus, hardness, and fracture toughness. The results showed high elastic modulus, modest hardness, and very high fracture toughness.  相似文献   

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