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Deposition and Coating Properties on CVD Tungsten
Authors:DU Ji-hong  LI Zheng-xiang  LIU Gao-jian  ZHOU Hui-Huang  CHUN Liang
Abstract:Surface characterization and microstructure studies are performed on chemical vapor deposited (CVD) tungsten coating. There is about 2 μm thickness diffusion layer of tungsten in the molybdenum substrate. The thermal shock test shows tungsten coating has good adhesion with molybdenum substrate, but the elements of oxygen and carbon in the tungsten coating have the bad affection to the adhesion. The result of high-temperature diffusion experiment is the diffusion rate from molybdenum substrate to tungsten coating is faster.
Keywords:CVD  Chloride  Tungsten coating  Property  Tungsten  Properties  Coating  result  experiment  substrate  faster  elements  oxygen  carbon  affection  thermal shock test  tungsten coating  good  adhesion  thickness  diffusion  layer  molybdenum  Surface
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