共查询到20条相似文献,搜索用时 11 毫秒
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在MEMS设计中需要解决工艺设计的问题,基于MEMS CAD软件对MEMS关键加工工艺进行仿真研究,对于MEMS工艺水平的提高有着重要的意义。本文首先探讨了MEMS加工工艺种类和工艺建模,然后以单晶硅各向异性腐蚀为例,借助MEMS CAD软件ACES对硅的湿法腐蚀工艺情况进行了仿真,其仿真结果对于基于MEMS CAD加工工艺进一步研究有一定的参考价值。 相似文献
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低驱动电压k波段电容耦合式RFMEMS开关的设计 总被引:3,自引:0,他引:3
设计了一种低驱动电压的电容耦合式射频微机械(RF MEMS)开关.RF MEMS开关采用共面波导传输线,双电极驱动,悬空金属膜采用弹性折叠梁支撑.使用MEMS CAD软件CoventorWare、微波CAD软件HFSS,分别仿真了开关的力学性能和电磁性能,仿真结果表明:开关的驱动电压为2.5V,满足低驱动电压的设计目标;开关开态的插入损耗约为0.23 dB@20 GHz,关态的隔离度约为18.1 dB@20 GHz.最后给出了这种RF MEMS开关的微制造工艺. 相似文献
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针对MEMS设计系统中机械性能仿真不足、设计与加工脱节、缺少工艺验证等问题,借鉴了IC设计可重用思想,引入了具有知识产权的功能模块--IP的概念,提出了基于IP库的MEMS设计方法.该方法是Top-Down和Bottom-Up设计相结合的方法,其核心是MEMS IP库,关键技术包括IP库、虚拟工艺、虚拟运行等,分别对应IP管理、工艺级仿真系统以及器件行为级仿真系统.最后以电容式微加速度计设计为例,对双梁、四梁、疏齿等6种不同的结构分别进行了设计仿真、流水加工,封装和测试的过程,完成了器件从设计到成品的整个流程,验证了本文提出的设计方法和设计系统的有效性和正确性. 相似文献
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表面工艺是MEMS制造的一种重要方法,实现其加工过程的计算机仿真可以为相关MEMS工艺研究和器件开发提供技术支持,减少相关MEMS产品的开发成本,缩短其开发周期.基于窄带水平集算法完成了表面加工工艺的三维表面工艺模拟系统.窄带水平集算法稳定,计算速度快处理拓扑变形非常灵活,本文将其应用于该软件仿真系统中,并进行了一列的仿真实验,将仿真结果与实际的流片电镜图对比,验证了仿真系统的精确性. 相似文献
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由于工艺数据比设计数据更加庞大,同时在产品设计过程使用众多的三维设计软件,工艺如何和三维CAD进行集成,工艺如何基于三维CAD进行加工工艺设计和装配工艺设计,如何利用三维模型的信息完整、可视的独特优势提高工艺编制的质量和效率,并实现产品模型信息的统一,对于数字化制造具有重要意义。文中重点描述使用三维轻量化技术实现工艺设计的原则和应用场景。 相似文献
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基于MEMS技术的异平面空心金属微针 总被引:2,自引:0,他引:2
MEMS微针的一个重要应用是透皮给药.文中提出了一种基于MEMS技术的异平面空心金属微针.该微针首先利用硅(100)面刻蚀技术在硅片上刻蚀出深度为330μm的倒四棱锥,然后采用电镀技术电镀出壁厚为50μm的空心金属倒四棱锥.从背面开出微流道并去除残余硅,就得到了倾斜角度为70.6°的异平面金属空心微针.最后采用ANSYS有限元仿真软件建立微针模型,验证了微针具有足够的强度. 相似文献
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单晶硅异向腐蚀技术是制造三维MEMS微结构的重要加工技术。由于单晶硅异向腐蚀加工过程具有低成本和可用于大批量生产的特点,因而得到了广泛的应用。但由于加工是在微米/纳米尺度上进行,使得加工过程难以控制,加工结果难以观测,因此传统的MEMS微结构的研制需要经过反复的试制和修改过程,使得研制周期长、生产质量难以保证。引入加工过程计算机模拟技术,可望大大地缩短MEMS微结构的研制周期,提高其产品质量。文章在研究单晶硅异向腐蚀机制的基础上,建立了基于晶格结构的腐蚀过程模型,模型较好地解决了模拟过程中高时空复杂性的关键技术问题,可在微机上运行,并取得了良好的模拟效果。 相似文献
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In the scanning probe microscopy-based microplasma etching system proposed by our group, the microcantilever probe integrated
with microplasma device is a multilayered structure. However, the thin film residual stress generated by microfabrication
process may cause undesirable bending deformation of the cantilever. In order to predict and minimize the stress-induced deformation
in the cantilever design, we experimentally measure and calculate each thin film stress of the cantilever based on Stoney
equation. Then the stress-induced bending deformation of the cantilever is simulated by finite element simulation. By adjusting
the thickness of reserved silicon layer of the cantilever, the deflection can be minimized to <5 μm for a 750 μm-length cantilever.
Finally the microcantilever probes with different thickness of reserved silicon layer are successfully fabricated by MEMS
process. The bending deformation of actual fabricated cantilevers agree well with simulation results, which verifies the feasibility
of the cantilever structural design. The results of this paper may lay a foundation for further scanning plasma maskless etching. 相似文献
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Fabricating electrostatic micro actuator, such as comb-drive actuator, is one of the demanding areas of the MEMS technology because of the promising applications in modern engineering, such as, micro-switches, attenuators, filters, micro-lenses, optical waveguide couplers, modulation, interferometer, dynamic focus mirror, and chopper. For the fabrication, most of the cases silicon monocrystalline wafers are used through complex process. To etch the silicon substrates, researchers often use deep reactive-ion etching or anisotropic wet etching procedure which are time consuming and unsuitable for batch fabrication process. Again, resent research shows that comb-drive actuators need comparatively high voltage for actuation. In solving these problems, the study presents a copper based electrostatic micro actuator with low actuation voltage. Using wire electrical discharge machine (WEDM), the actuator is fabricated where a light weight flexible spring model is introduced. Capacitor design model is applied to present a voltage controlling electronic circuit using Arduino micro controller unit. The experimental result shows that the actuator is able to produce 1.38 mN force for 15 V DC. The experiment also proves that coper based actuator design using WEDM technology is much easier for batch processing and could provide the advantages in rapid prototyping. 相似文献
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基于Petri网的MEMS柔性设计建模方法 总被引:2,自引:0,他引:2
微机电系统设计具有微尺度效应和多物理场耦合的特点,而现有的面向产品宏观结构的CAD系统难以满足微米尺度设计需求,为此提出一种基于Petri网的MEMS柔性设计建模方法.在分析MEMS设计特点、框架和流程的基础上,对已有设计系统进行抽象化和精细化,获得高内聚低耦合的设计模块,并将Petri网与设计系统各模块相互关联,建立了基于Petri网的MEMS柔性设计建模框架;然后通过添加前置库所和带权有向弧调节库所最大/最小标识数,控制设计流的总数;再添加控制库所形成控制回路,使并发变迁有序执行,消解并行设计冲突;最后用Petri网的状态空间求解结果控制各模块运行,满足复杂设计流的多元关系.以ACIS为几何造型内核开发了自主原型系统,以电容式三维硅微梳齿驱动器设计为例进行应用验证,结果表明,文中方法将现有MEMS设计从自顶向下和自底向上及其混合拓展到基于Petri网的柔性设计建模,使产品设计不局限于固定的设计流程,对于提高MEMS设计效率和质量具有重要意义. 相似文献
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Arrays of hollow out-of-plane microneedles for drug delivery 总被引:1,自引:0,他引:1
Drug delivery based on MEMS technology requires an invasive interface such as microneedles, which connects the microsystem with the biological environment. Two-dimensional arrays of rigid hollow microneedles have been fabricated from single-crystal silicon using a combination of deep reactive ion etching and isotropic etching techniques. The fabricated needles are typically 200 /spl mu/m long with a wide base and a channel diameter of 40 /spl mu/m. The fabrication process allows creating either blunt needles or needles with sharp tips. Their shape and size make these needles extremely suitable for minimally invasive painless epidermal drug delivery. MEMS technology allows for batch fabrication and integration with complex microsystems. Fluid has been successfully injected 100 /spl mu/m deep into sample tissue through arrays of microneedles. Needle breakage did not occur during this procedure. Experiments have shown that the modified Bernoulli equation is a good model for liquid flowing through the narrow microneedle lumen. 相似文献