芯片键合纵弯复合超声换能器的设计与试验

为了解决当前采用一维纵向超声加载模式进行芯片键合时造成结合面不充分的问题,设计纵弯复合超声能量加载模式的压电超声换能器,实现轴向纵振和水平弯振复合的超声振动代替传统单一的轴向振动. 采用ANSYS软件,对换能器有限元模型进行模态分析和谐响应分析,得到换能器纵振和弯振模态的谐振频率及振型. 通过调节换能器结构尺寸,实现纵振与弯振模态的简并. 采用阻抗分析仪对样机的频率和阻抗进行测试,使用激光多普勒测振仪测试换能器的纵振与弯振幅值,测试结果与有限元仿真计算结果一致,发现纵向与弯曲振幅均随着驱动电压的增加呈近似线性上升趋势, 证明设计的压电换能器实现了纵弯复合振动.     

基于ABAQUS的超声椭圆振动车削钛合金TC4数值分析

钛合金TC4在加工过程中会出现工件变形及黏结等问题,因此加工难度较大。利用ABAQUS软件创建仿真模型,对比了超声椭圆振动车削和常规切削对钛合金TC4力学特点的影响,并对比分析了超声椭圆振动车削钛合金TC4的切削速度、切向幅值、频率和切削深度对切削力的影响。结果表明,超声椭圆振动切削平均切削力随着切削深度及切削速度的增加而增加;随着切向幅值及振动频率的增加而减小;与常规切削相比,超声椭圆振动切削能够明显降低切削力,改善表面加工质量,提高加工效率。     

一种新型圆锥变幅杆的节点设计与试验分析

为了解决传统超声加工系统中谐振频率飘移及能量损失的问题,基于变截面杆纵振波动方程,在考虑固定件——法兰盘外观尺寸的前提下,首先建立一种新型圆锥变幅杆的节点计算公式,避免了传统超声加工系统设计时因不考虑连接处尺寸而造成系统变幅杆节点实际位置与理论计算不重合的问题,为超声振动系统稳定加工提供一定的理论支撑;其次,基于所建立的新型节点计算公式,分析法兰盘外观尺寸变化对节点位置的影响;最后,进行振动性能试验和有限元仿真验证。结果表明,与传统变幅杆设计理论相比,基于新型变幅杆节点计算公式所设计的变幅杆谐振频率更接近于设计频率,放大系数更大,振动效果更佳,证明基于该理论所设计的声学系统较为可靠。     

微机械角速率传感器CMOS闭环驱动电路

为解决微机械角速率传感器的驱动信号对检测电极的耦合问题,提出一种基于电压频率调制闭环静电力驱动方法．该方法将驱动电压调制到高频,有效地将机械谐振频率与电压驱动频率分离,同时不改变驱动静电力的相位与频率．采用自动增益控制电路使得闭环驱动幅值非稳定性为0．01％,片上集成跨阻放大器可实现1aF／sqrt（Hz）电容变化测量...     

多维超声振动铣削Ti2AlNb合金试验研究

Ti2AlNb合金的硬脆性较大,传统的切削工艺在切削加工中存在的切削热高导致刀具耐用度低和加工质量差等问题。本文采用切削仿真与试验研究相结合,应用二维、三维超声振动切削和普通切削进行Ti2AlNb合金切削特性的对比研究。结果表明：超声振动的三向切削力小于普通切削的,沿刀具进给方向,二维和三维超声振动相对于普通切削的切削力最大分别下降了48.6%和28.3%。3种不同的切削方式在相同的切削参数下加工出完全不同的表面微织构形貌,三维超声振动加工出“麦穗状”,且“麦芒”出现在超声分离特性较强的刀具进给方向上。随着机床转速增加,二维超声振动产生的粗糙度值相对于普通切削下降率最大为45.3%。随着振幅增加,超声振动引起的刀屑分离作用增强,在刀具二维超声振动振幅为8μm时,工件表面粗糙度下降了64.5%。试验结果表明,超声振动加工是提高Ti2AlNb合金的切削性能的有效手段之一。     

双振子自走型直线超声电机的研究

设计了一种双振子自走型直线超声电机,电机的定子由2个同轴的对称布置的弯曲摇头型振子和中部带细颈的柔性振动块组成.2个振子的弯曲振动会激励出中间振动块的摇头振动,使驱动头上的质点产生椭圆运动轨迹,与导轨摩擦接触产生自走直线运动.测量得到定子上振动块的局部弯曲共振频率为20 792Hz,定子的弯曲共振频率约为40 420Hz.仿真发现,以振动块的局部弯曲共振模态作为工作模态能够得到更大的振幅.实验结果表明,在该模态频率下,电机可以提供较大的驱动速度,发热很少,较长时间工作仍旧稳定可靠,故被选作工作模态.在40 420Hz附近电机能够驱动,但是振子发热严重,不易稳定工作.当两相驱动信号的频率为20.8kHz、相位差为90°、驱动信号电压的峰峰值为138V时,电机的驱动速度达到598mm/s,电机的最大驱动力达到1.94N.     

用于包衣厚度测量的石英晶体谐振器夹具设计研究

为了提高药品包衣厚度测量的准确性,设计了一套晶振片夹具,可实现多方位测量。运用"等效密度法"建立起夹具和晶振片的有限元模型,分析不同夹具宽度对晶振片谐振频率的影响。通过有限元分析,发现夹具宽度对晶振片低阶模态下的谐振频率有较大影响,但随着模态阶数的增大,其影响程度随之下降。搭建实验系统对夹具影响程度进行验证,该夹具对晶振片厚度剪切的高阶振动频率基本无影响,符合包衣厚度测量系统的要求。     

局部主动约束阻尼开球壳的振动特性分析

为了有效减小开球壳的振动,对球壳设置局部主动约束阻尼(ACLD),根据一阶剪切变形理论和Donnell壳体理论得出应变位移关系,用Jacobian多项式和Fourier级数组合表征球壳经度和纬度方向变形关系,基于能量法和Lagrange方程建立了系统的动力学模型,研究了主动约束阻尼结构参数、阻尼层占空比和压电层激励电压对模态频率和阻尼比的影响,对不同固定幅值激励电压下球壳中点的频域响应进行了比较。结果表明:合理设置粘弹性厚度和占空比可有效耗散球壳振动能量;压电层经纬度方向尺寸增大可有效增大系统阻尼比,但会使系统引入质量和模态频率大幅增加,影响球壳的使用性能;施加激励电压能够在几乎不改变模态频率的情况下增加系统的振动能耗,但一定幅值的激励电压仅对特定方向的模态幅值能够实现有效缩减。     

螺旋槽型干气密封系统轴向振动影响因素研究

针对干气密封中气膜厚度稳定性的要求以及多级调控操作条件易导致失效的问题,进行了基于Workbench的螺旋槽型干气密封系统的动力学特性分析研究。建立了一种浮动环（静环）的轴向振动模型并推导其轴向振动幅值表达式;运用Workbench对浮动环系统进行工况条件下的预应力模态分析和谐响应分析,将模拟仿真与理论推导结果作对比,分析总结得出同一参数不同数值条件下浮动环轴向振动幅值的变化趋势,以及影响浮动环轴向振动幅值的主要因素和次要因素。该方法不仅能够灵活地获得不同条件下浮动环的振幅值,并且从激振频率与固有频率的关系方面解释了振动趋势形成的原因。     

在频率跟踪后引起振动切削过程中振幅衰减的主要原因分析

为克服振幅衰减对超声振动切削的影响,揭示振幅衰减的内在原因,进一步扩大超声振动切削的应用领域,本文通过实验研究和理论分析,明确了在振动加工中由载荷增加而引起的功率动态分配也是超声波振幅逐渐衰减的一个重要原因,并从功率分配的角度,通过理论分析得出了二者的数学表达式,解释了实验结果,同时分析了该实验的合理性,给出了几种解决方案,并提出了用神经网络分析振动切削力的思想.实验结果最终表明:在采用频率跟踪后,超声振动加工中的振幅衰减主要来源于功率分配.     

Actuating mechanism and design of a T-type linear ultrasonic motor

To take advantage of merits of higher output-power and efficiency of bolt-clamped transducer,a T-type linear ultrasonic motor was proposed in this paper.The proposed motor contained a horizontal transducer and a vertical transducer.The horizontal transducer included two exponential shape horns,and the vertical transducer contained one exponential shape horn.And the horns intersected at tip ends where a driving foot was located.The longitudinal vibrations of transducers were excited by the stretching vibration of PZT ceramics.Longitudinal vibrations were superimposed in the motor and generated elliptical trajectory at the driving foot.The actuating mechanism of the proposed motor was analyzed.The two working modals of the motor were gained with FEM.The resonant frequencies of two working modals were degenerated by adjusting the structural parameters.The motion trajectory of nodes on the driving foot was gained by transient analysis.The vibration amplitude of node on the driving foot indicates that the proposed motor has potential good output characteristics.The results verify the feasibility of the proposed design and provide instructions for the development of the new ultrasonic motor.     

Working principle and design of a double cylinders type traveling wave ultrasonic motor using composite transducer

A double cylinders type traveling wave ultrasonic motor using composite transducer was proposed.The proposed stator contained two cylinders and one composite transducer,and the transducer located on the outer surfaces of cylinders.The composite transducer included two exponential horns located on leading ends,and the horns insected with the cylinders at tip ends.Two degenerated flexural vibration modes spatially and temporally orthogonal to each other were excited in each cylinder by the composite transducer.In this new design,a single transducer could excite two flexural traveling waves in the cylinders.Thus,elliptical motions were achieved at the particles on the teeth.The working principle of the proposed motor was analyzed.The cylinder and transducer were designed with FEM.The resonant frequencies of two vibration modals of the stator were tuned to be the same,and the motion trajectories of nodes on the teeth were analyzed.Transient analysis results show that the motion trajectories of teeth are ellipses.The results of this paper can guide the development of this new type of ultrasonic motor.     

A ring type standing wave ultrasonic motor using cantilever type longitudinal transducers

The disadvantages of classic ring type ultrasonic motor were analyzed.To obtain large mechanical output power,a ring type standing wave ultrasonic motor using cantilever type longitudinal transducers was proposed.There are four pairs of cantilevers on one side of the ring,and four PZT ceramics are set between each pair of cantilevers.A screw fastened the PZT ceramics and cantilevers together to form a longitudinal transducer.The bending vibration mode of the ring is excited by the stretching vibration of the PZT ceramics.Thus,linear simple harmonic motions are achieved at the particle on the teeth.And the driving force is the frictional force between rotor and stator.The working principle of the proposed motor was analyzed.The ring and the longitudinal transducer were designed with FEM.The sensitive parameters of resonant frequency of the transducer and ring could be gained with modal analysis.The longitudinal vibration modal of transducer and bending vibration modal of ring were degenerated,and the motion trajectories of nodes on the teeth were analyzed.The results of this paper could guide the development of this new type of motor.     

含轴向裂纹圆柱薄壳动态特性的有限元分析

轴向裂纹的存在而导致了圆柱薄壳在裂纹附近区域的局部振动,其动态特性发生了显著的变化。采用有限元方法研究了轴向裂纹尺寸对薄壳固有频率以及振型的影响规律,研究了局部振动具有自己的固有频率与独特的振型及其随裂纹长度变化的规律,解释了在相同的壳体原有振动中有可能出现裂纹长度增加而固有频率却反而上升的现象。将计算结果与实验结果进行了对比,二者吻合较好。     

超声手术刀振动特性分析

超声手术刀工作时的频率高达几万赫兹,即每秒振动几万次,容易产生疲劳损坏。介绍了超声手术刀的工作原理,并设计了一把工作频率在55.5k Hz左右的超声刀。然后,通过有限元分析软件ANSYS建模,对超声刀进行模态分析,得出它的固有频率和振型图,并进行谐响应分析,得到超声刀的振幅大小、应力应变参数以及谐响应曲线,研究超声手术刀在设计要求的谐振频率下的振动特性。通过有限元分析,超声刀在固有频率55053Hz下做纵向振动,在谐振频率55.5k Hz附近刀头振幅最大,刀头应力达到最大,刀身应力分布均匀。     

移动荷载下梁索组合结构瞬态响应分析

为验证波动理论在求解梁索组合结构自振特性和冲击响应问题中的适用性,初步探讨移动荷载下弹性波在结构中的传递特征,从铁木辛柯梁的横向振动微分方程和拉索的纵向波动方程出发,推导了移动荷载作用下梁索组合结构的动力学响应函数,通过构造回传路径矩阵,得到结构响应的波动解。为解决传统回传路径矩阵法（MRRM）在计算弯曲波传递过程中回传路径矩阵求逆困难的问题,基于离散傅里叶变换思想(DFT),推导出结构瞬态响应的级数解,用试验和有限元数值算例对改进后的MRRM法进行验证。结果发现,在30km/h的车速下,本文算法计算得到的跨中最大动应变和有限元结果偏差为5%,与试验结果相比偏差8%;40km/h的车速下,理论最大值与有限元偏差为4%,与试验结果相比偏差9.8%。最后,以梁索组合结构为研究对象,本文算法计算得到的结构前五阶自振频率与有限元结果最大偏差为0.29%,前二阶自振频率偏差为0%。进一步分析移动荷载下,梁索组合结构的波动响应特点,将理论结果与有限元数值结果进行比对,结果具有较高的吻合度。可推知,本文算法在计算移动荷载下桥梁结构的瞬态波动响应方面具有较高的可靠性。通过结构频谱分析,发现移动荷载下,铁木辛柯梁中弯曲波主要为频率分量低于结构2倍自振频率的低频响应。进而在改进后的MRRM基础上,探索基于结构自振特性的频域合理选取准则,进一步提高MRRM法求解波动响应的计算效率。     

开关磁阻电机定子模态仿真分析与实验研究

开关磁阻电机定子固有频率的研究对降低电机噪声和抑制电机的振动有重要的意义,给出了SR电机振动模态分析的数学模型,在此基础上利用ANSYS软件建立了SR电机定子的三维有限元模型,并运用此模型仿真计算出SR电机定子的低阶固有振型和固有频率,最后通过定子模态试验也验证了该仿真模型的有效性。     

膈膜式传感器微压电复合薄板的模态分析

为了分析柔性谐振膈膜式微传感器在设计中的微压电复合薄板模态问题,采用近似理论方法与有限元法分别对方形压电复合薄板的模态进行了分析.推导出压电层和支撑层的势能与动能表达式,给出利用瑞利法求解一阶频率的过程.借助微系统设计开发与仿真软件,依据器件加工工艺,建立了器件三维模型.使用软件的有限元分析功能,对其进行了网格划分和模态分析,给出了一阶和二阶模态振型及模态频率.通过对仿真结果的讨论,为传感器的设计提供了借鉴.     

A novel traveling wave ultrasonic motor using a bar shaped transducer

A novel traveling wave ultrasonic motor was proposed. The structure of the motor is rather simple and different from the conventional traveling wave ultrasonic motors. Its production processes are very convenient. It is composed of a stator constituted with a ring and a bar shaped transducer and two cone shaped rotors. The rotors were pressed on inner surface of the ring by means of a pre-pressure system. The bar shaped transducer has a sand- wich-like configuration,where two sets of piezoelectric element are bolted. One set excites a longitudinal vibration of the bar, and the other set excites a flexural vibration of the bar. The ring＇s traveling wave excited with the longitudinal vibration and the bending vibration of the bar transducer was simulated with FEM （finite element method）. The prototype of the motor was made and investigated experimentally for its performance. Its maximum torque and rotating speed are 0.25 N · m and 50 r/min, respectively.