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1.
A strongly focusing He(+) ion beam source equipped with concave multi-aperture electrodes was developed for production of He(-) through a charge exchange cell. The beam was extracted at a voltage less than 20 kV from 301 apertures distributed in an area of 100 mm φ, and focused at 750 mm distance. The beam current and the beam size of 2 A and 20 mm in diameter, respectively, were achieved with an arc power less than 10 kW. The optimum perveance was obtained at 0.02 A∕kV(1.5) at the beam energy less than 20 keV which is suitable for the conversion to He(-) in an alkali vapor cell.  相似文献   

2.
Beams of argon ions with energies less than 50 eV were extracted from an ion source through a wire electrode extractor geometry. A retarding potential energy analyzer (RPEA) was constructed in order to characterize the extracted ion beams. The single aperture RPEA was used to determine the ion energy distribution function, the mean ion energy and the ion beam energy spread. The multi-cusp hot cathode ion source was capable of producing a low electron temperature gas discharge to form quiescent plasmas from which ion beam energy as low as 5 eV was realized. At 50 V extraction potential and 0.1 A discharge current, the ion beam current density was around 0.37 mA/cm(2) with an energy spread of 3.6 V or 6.5% of the mean ion energy. The maximum ion beam current density extracted from the source was 0.57 mA/cm(2) for a 50 eV ion beam and 1.78 mA/cm(2) for a 100 eV ion beam.  相似文献   

3.
Electrostatic beam optics for a multi-element focused ion beam (MEFIB) system comprising of a microwave multicusp plasma (ion) source is designed with the help of two widely known and commercially available beam simulation codes: AXCEL-INP and SIMION. The input parameters to the simulations are obtained from experiments carried out in the system. A single and a double Einzel lens system (ELS) with and without beam limiting apertures (S) have been investigated. For a 1 mm beam at the plasma electrode aperture, the rms emittance of the focused ion beam is found to reduce from ~0.9 mm mrad for single ELS to ~0.5 mm mrad for a double ELS, when S of 0.5 mm aperture size is employed. The emittance can be further improved to ~0.1 mm mrad by maintaining S at ground potential, leading to reduction in beam spot size (~10 μm). The double ELS design is optimized for different electrode geometrical parameters with tolerances of ±1 mm in electrode thickness, electrode aperture, inter electrode distance, and ±1° in electrode angle, providing a robust design. Experimental results obtained with the double ELS for the focused beam current and spot size, agree reasonably well with the simulations.  相似文献   

4.
The ion beam optics for the neutral beam injection system on HL-2A Tokomak is studied by two- dimensional numerical simulation program firstly, where the emitting surface is taken at 100 Debye lengths from the plasma electrode. The mathematical formulation, computation techniques are described. Typical ion orbits, equipotential contours, and emittance diagram are shown. For a fixed geometry electrode, the effect of plasma density, plasma potential and plasma electron temperature on ion beam optics is examined, and the calculation reliability is confirmed by experimental results. In order to improve ion beam optics, the application of a small pre-acceleration voltage (~100 V) between the plasma electrode and the arc discharge anode is reasonable, and a lower plasma electron temperature is desired. The results allow optimization of the ion beam optics in the neutral beam injection system on HL-2A Tokomak and provide guidelines for designing future neutral beam injection system on HL-2M Tokomak.  相似文献   

5.
An energetic helium neutral beam is involved in the beam neutralization measurement system of alpha particles confined in a DT fusion plasma. A full size strong-focusing He(+) ion source (2 A, the beam radius of 11.3 mm, the beam energy less than 20 keV). Present strong-focusing He(+) ion source shows an emittance diagram separated for each beamlet of multiple apertures without phase space mixing, despite the space charge of a beamlet is asymmetric and the beam flow is non-laminar. The emittance of beamlets in the peripheral region was larger than that of center. The heat load to the plasma electrode was studied to estimate the duty factor for the ITER application.  相似文献   

6.
Experimental studies were made on the cooling of extraction electrodes of an ion source in the case of long-pulse operation. Copper electrodes with forced water cooling pipes were tested under the condition that an ion beam of 1 to 5 A at 30 keV was extracted for up to 10 s. The average heat loading to the grid are of the electrode was as high as 130 W/cm2. This high heat flux was obtained by a set of electrodes artificially arranged to produce poor beam optics, and hence the high heat loading. Temperature of the ground electrode was measured at two points by thermocouples buried and silver brazed in it, and was kept below 230 degrees C due to a large boiling heat transfer coefficient of the cooling water. No evidences of deformation or deterioration of the electrodes was observed after repetitious beam extraction. This heat loading was still a half of that on the grid of the ion source for the JT-60 NBI.  相似文献   

7.
A thin-walled aluminum (Al) hollow electrode has been inserted into an ion source to serve as an electrode for a radio frequency magnetron discharge. The produced plasma stabilized by argon (Ar) gas sputters the Al electrode to form a beam of Al(+) and Ar(+) ions. The total beam current extracted through a 3 mm diameter extraction hole has been 50 μA, with the Al(+) ion beam occupying 30% of the total beam current.  相似文献   

8.
An algorithm for solving the problem of local shape errors of optical surfaces correcting by a small-sized ion beam, based on the matrix representation is presented. The algorithm involves searching for points that rise relative to the average height on the surface, where exposure to an ion beam of a given shape will lead to a decrease in the RMS deviation of the surface shape from the calculated one. It is shown that the new approach makes it possible to significantly expand the range of spatial frequencies, in which the height of relief can be reduced using the given ion beam size, and provides better results than the method of minimizing the functional of convolution of the ion beam and the surface map. Moreover, the new approach does not lead to appearance of shape errors (concentric structure) defined by the ion beam size and scanning step. An experiment for minimizing of local surface shape errors based on an etching map calculated using new approach was done. Matrix algorithm allowed in one procedure to reduce surface shape errors for a concave spherical optical element made of fused silica with a diameter D = 100 mm and a radius of curvature R = −137.5 mm in the RMS by more than 3 times. The initial RMS was 4.5 nm, RMS after treatment is 1.36 nm.  相似文献   

9.
The operating conditions of a rf plasma ion source utilizing a positively biased electrode have been investigated to develop a stably operating, high-current ion source. Ion beam characteristics such as currents and energies are measured and compared with bias currents by varying the bias voltages on the electrode immersed in the ambient rf plasma. Current-voltage curves of the bias electrode and photographs confirm that a small and dense plasma, so-called anode spot, is formed near an extraction aperture and plays a key role to enhance the performance of the plasma ion source. The ion beam currents from the anode spot are observed to be maximized at the optimum bias voltage near the knee of the characteristic current-voltage curve of the anode spot. Increased potential barrier to obstruct beam extraction is the reason for the reduction of the ion beam current in spite of the increased bias current indicating the density of the anode spot. The optimum bias voltage is measured to be lower at higher operating pressure, which is favorable for stable operation without severe sputtering damage on the electrode. The ion beam current can be further enhanced by increasing the power for the ambient plasma without increasing the bias voltage. In the same manner, noble gases with higher atomic number as a feedstock gas are preferable for extracting higher beam current more stably. Therefore, performance of the plasma ion source with a positively biased electrode can be enhanced by controlling the operating conditions of the anode spot in various manners.  相似文献   

10.
An ion beam deceleration system was studied for the high-current ion implanter at the Laboratório de Aceleradores e Tecnologias de Radiação at the Campus Tecnológico e Nuclear, of Instituto Superior Técnico. The installed system consists of a target plate and one electrostatic focusing lens with one electrode. This article describes the results of the evaluation of the new system. With this upgrade, the ion implanter provides enhanced versatility for decelerating to 5 keV a high current ion beam at the µA level. This implantation provides a wide area and allows for a continuous magnetic beam scanning, extending the energy range to lower values, opening up a wider set of applications.  相似文献   

11.
A focused ion beam was employed for local target preparation for EBSD analysis. The volume of the ion‐solid interaction is well below 50 nm at glancing incidence for metallic and transition metal oxide samples. Therefore, focused ion beam can successfully be used for electron backscatter diffraction (EBSD) sample preparation. The sample investigated consists of Ni covered with a NiO layer of ~5 μm thickness. Focused ion beam cross‐sectioning of these layers and subsequent electron imaging in addition to EBSD maps shows a bimodal structure of the oxide layer. In order to test the potential of such oxidized samples as electrode materials, single spark erosion experiments were performed. The erosion craters have diameters up to 40 μm and have a depth corresponding to the thickness of the oxide layer. In addition, a deformation zone produced by thermoshock accompanies the formation of the crater. This deformation zone was further investigated by EBSD analysis using a new way of sample preparation employing the focused ion beam technology. This target preparation routine is called Volume of Interest Transfer and has the potential of providing a full three‐dimensional characterization.  相似文献   

12.
一种基于高斯光束的平凹激光腔对准方法   总被引:1,自引:1,他引:1  
给出了一种基于高斯光束的平凹激光腔对准方法。在高斯准直光束后加一透镜系统,恰当地调整准直高斯光束到某一种汇聚发散的状态。在这种状态下,可使由平凹腔凹面镜和平面镜反射回来的光斑直径大小相仿,解决了不加透镜系统时,两反射回来光斑直径相差很大,难于对准的问题,提高两光斑的对准精度。实验使用束腰为0.6 mm的氦氖光,其后加一优化好的透镜系统,在889 mm的距离下,对凹面镜曲率半径为50 mm的平凹腔进行对准。得到由凹面镜和平面镜反射回来的光斑直径分别为4.8 mm和5.1 mm,平凹腔的角度对准精度达到了3.18'。对准好的腔体在点亮LD后,均能出基模光斑。实验结果与理论分析相符,证明了该对准方法结构简单,执行方便。  相似文献   

13.
The current-dependent beam divergence at a distance of 50 μm from an indium-liquid metal ion source is derived from experimental data obtained by measuring the beam spread with a 3D Plasma diagnostic system at a distance of 10 cm from the needle tip. The observed relationship between emission current and beam divergence in vicinity of the emitting needle is used to design a focusing electrode for a field-emission electric propulsion thruster operating at currents up to 150 μA. Another application involves focused ion beam columns which may choose to forego a beam-limiting aperture, such as LMIS-based rapid machining tools with large beam currents.  相似文献   

14.
The neutral beam injection system (NBI-1) of the KSTAR tokamak can accommodate three ion sources; however, it is currently equipped with only one prototype ion source. In the 2010 and 2011 KSTAR campaigns, this ion source supplied deuterium neutral beam power of 0.7-1.6 MW to the KSTAR plasma with a beam energy of 70-100 keV. A new ion source will be prepared for the 2012 KSTAR campaign with a much advanced performance compared with the previous one. The newly designed ion source has a very large transparency (~56%) without deteriorating the beam optics, which is designed to deliver a 2 MW injection power of deuterium beams at 100 keV. The plasma generator of the ion source is of a horizontally cusped bucket type, and the whole inner wall, except the cathode filaments and plasma grid side, functions as an anode. The accelerator assembly consists of four multi-circular aperture grids made of copper and four electrode flanges made of aluminum alloy. The electrodes are insulated using PEEK. The ion source will be completed and tested in 2011.  相似文献   

15.
Closed drift type anode layer linear ion source was investigated with focusing on the electrode geometry effects on ion beam emission and anode layer formation. In the electrode geometry, the discharge gap between anode and cathode plays an important role to control anode layer formation as well as electron generation. When the discharge gap is increased from 2 to 3 mm, the ion current density was enhanced from 0.9 to 1.35 mA∕cm(2). Computational simulation by using an object oriented particle in cell showed that the discharge volume was extended due to enhanced electron generation and the electric field at the anode layer was enhanced from 1.32 to 1.52 MV∕cm.  相似文献   

16.
In this paper we present our measurements of charge-state and current-density distributions performed in very close vicinity (15 mm) of the extraction of our hexapole geometry electron cyclotron resonance ion source. We achieved a relatively high spatial resolution reducing the aperture of our 3D-movable extraction (puller) electrode to a diameter of only 0.5 mm. Thus, we are able to limit the source of the extracted ion beam to a very small region of the plasma electrode's hole (? = 4 mm) and therefore to a very small region of the neutral plasma sheath. The information about the charge-state distribution and the current density in the plane of the plasma electrode at each particular position is conserved in the ion beam. We determined the total current density distribution at a fixed coaxial distance of only 15 mm to the plasma electrode by remotely moving the small-aperture puller electrode which contained a dedicated Faraday cup (FC) across the aperture of the plasma electrode. In a second measurement we removed the FC and recorded m/q-spectra for the different positions using a sector magnet. From our results we can deduce that different ion charge-states can be grouped into bloated triangles of different sizes and same orientation at the extraction with the current density peaking at centre. This confirms observations from other groups based on simulations and emittance measurements. We present our measurements in detail and discuss possible systematic errors.  相似文献   

17.
An electron cyclotron resonance (ECR) ion source is designed for the production of high-current ion beams of various gaseous elements. At the Peking University (PKU), the primary study is focused on developing suitable permanent magnet ECR ion sources (PMECRs) for separated function radio frequency quadrupole (SFRFQ) accelerator and for Peking University Neutron Imaging Facility. Recently, other kinds of high-intensity ion beams are required for new acceleration structure demonstration, simulation of fusion reactor material irradiation, aviation bearing modification, and other applications. So we expanded the ion beam category from O(+), H(+), and D(+) to N(+), Ar(+), and He(+). Up to now, about 120 mA of H(+), 83 mA of D(+), 50 mA of O(+), 63 mA of N(+), 70 mA of Ar(+), and 65 mA of He(+) extracted at 50 kV through a φ 6 mm aperture were produced by the PMECRs at PKU. Their rms emittances are less than 0.2 π?mm?mrad. Tungsten samples were irradiated by H(+) or He(+) beam extracted from this ion source and H∕He holes and bubbles have been observed on the samples. A method to produce a high intensity H∕He mixed beam to study synergistic effect is developed for nuclear material irradiation. To design a He(+) beam injector for coupled radio frequency quadruple and SFRFQ cavity, He(+) beam transmission experiments were carried out on PKU low energy beam transport test bench and the transmission was less than 50%. It indicated that some electrode modifications must be done to decrease the divergence of He(+) beam.  相似文献   

18.
A technique for mass-selective lifetime measurements of keV ions in a linear electrostatic ion beam trap is presented. The technique is based on bunching the ions using a weak RF potential and non-destructive ion detection by a pick-up electrode. This method has no mass-limitation, possesses the advantage of inherent mass-selectivity, and offers a possibility of measuring simultaneously the lifetimes of different ion species with no need for prior mass-selection.  相似文献   

19.
A compact source of gas, vapor, metal, and carbon ions based on a cold-hollow-cathode reflective discharge has been developed, in which a 6-mm-diameter flat target (Cu, Mo, W, C) is installed on the bottom of the cold cathode insulated from it. The density of the ion flow from cathode plasma reaches 100 mA/cm2 at an accelerating voltage of up to 10 kV and a discharge current of 0.2-0.5 A. Vapors produced during ion sputtering of the target are ionized in the cathode and anode cavities. A beam containing ions of the plasma-producing gas and vapor is extracted throug h the channel in the reflector cathode. A fraction of the vapor of the sputtered target, the flow of which is sufficient for growing layers at a rate of ∼0.03 nm/s at a distance of 10 cm from the emission channel under the action of an ion beam, is extracted together with ions. The fraction of metal ions in the extracted beam is 0.05-0.10. The total current of the ion beam is 20-30 mA.  相似文献   

20.
In this work, an improved form of a saddle field ion source has been designed and constructed. It consists of four anode rods made from copper and two copper cathode discs. The two cathode discs are placed symmetrically on both sides of the four anode rods. The electrical discharge and output ion beam characteristics were measured at different pressures using argon gas. The optimum distance between each two anode rods was determined. Also the optimum distance between the four anode rods and any cathode disc was obtained. It was found that the optimum distance between each two anode rods equal to 6 mm, while the optimum distance between the four anode rods and any cathode disc equal to 16 mm, where a stable discharge current and maximum output ion beam current can be obtained. The effect of negative extraction voltage applied to both the extractor electrode and Faraday cup on the output ion beam current was studied. The sputter yield of copper and aluminum targets using argon ions of different energies was determined.  相似文献   

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