Microelectromechanical systems vibration powered electromagnetic generator for wireless sensor applications

This paper presents a silicon microgenerator, fabricated using standard silicon micromachining techniques, which converts external ambient vibrations into electrical energy. Power is generated by an electromagnetic transduction mechanism with static magnets positioned on either side of a moving coil, which is located on a silicon structure designed to resonate laterally in the plane of the chip. The volume of this device is approximately 100 mm³. ANSYS finite element analysis (FEA) has been used to determine the optimum geometry for the microgenerator. Electromagnetic FEA simulations using Ansoft’s Maxwell 3D software have been performed to determine the voltage generated from a single beam generator design. The predicted voltage levels of 0.7–4.15 V can be generated for a two-pole arrangement by tuning the damping factor to achieve maximum displacement for a given input excitation. Experimental results from the microgenerator demonstrate a maximum power output of 104 nW for 0.4g (g=9.81 m s⁻¹) input acceleration at 1.615 kHz. Other frequencies can be achieved by employing different geometries or materials.

     

Development and characterization of a microthermoelectric generator with plated copper/constantan thermocouples

This work reports the development and the characterization of a microthermoelectric generator (μTEG) based on planar technology using electrochemically deposited constantan and copper thermocouples on a micro machined silicon substrate with a SiO₂/Si₃N₄/SiO₂ thermally insulating membrane to create a thermal gradient. The μTEG has been designed and optimized by finite element simulation in order to exploit the different thermal conductivity of silicon and membrane in order to obtain the maximum temperature difference on the planar surface between the hot and cold junctions of the thermocouples. The temperature difference was dependent on the nitrogen (N₂) flow velocity applied to the upper part of the device. The fabricated thermoelectric generator presented maximum output voltage and power of 118 mV/cm² and of 1.1 μW/cm², respectively, for a device with 180 thermocouples, 3 kΩ of internal resistance, and under a N₂ flow velocity of 6 m/s. The maximum efficiency (performance) was 2 × 10^?3 μW/cm² K².     

Design,fabrication and testing of a piezoelectric energy microgenerator

This article presents the design, fabrication and characterization of a micromachined energy harvester utilizing aluminium nitride (AlN) as a piezoelectric thin film material for energy conversion of random vibrational excitations. The harvester was designed and fabricated using silicon micromachining technology where AlN is sandwiched between two electrodes on top of a silicon cantilever beam which is terminated by a silicon seismic mass. The harvester generates electric power when subjected to mechanical vibrations. The generated electrical response of the device was experimentally evaluated at various acceleration levels. A maximum power of 34.78 μW was obtained for the device with a seismic mass of 5.6 × 5.6 mm² at an acceleration value of 2 g. Various fabricated devices were tested and evaluated in terms of the generated electrical power as well as the resonant frequency.     

Design of computer experiments applied to modeling of compliant mechanisms for real-time control

This article discusses the use of design of computer experiments (DOCE) (i.e., experiments run with a computer model to find how a set of inputs affects a set of outputs) to obtain a force–displacement meta-model (i.e., a mathematical equation that summarizes and aids in analyzing the input–output data of a DOCE) of compliant mechanisms (CMs). The procedure discussed produces a force–displacement meta-model, or closed analytic vector function, that aims to control CMs in real-time. In our work, the factorial and space-filling DOCE meta-model of CMs is supported by finite element analysis (FEA). The protocol discussed is used to model the HexFlex mechanism functioning under quasi-static conditions. The HexFlex is a parallel CM for nano-manipulation that allows six degrees of freedom (x, y, z, θ _x , θ _y , θ _z ) of its moving platform. In the multi-linear model fit of the HexFlex, the products or interactions proved to be negligible, yielding a linear model (i.e., linear in the inputs) for the operating range. The accuracy of the meta-model was calculated by conducting a set of computer experiments with random uniform distribution of the input forces. Three error criteria were recorded comparing the meta-model prediction with respect to the results of the FEA experiments by determining: (1) maximum of the absolute value of the error, (2) relative error, and (3) root mean square error. The maximum errors of our model are lower than high-precision manufacturing tolerances and are also lower than those reported by other researchers who have tried to fit meta-models to the HexFlex mechanism.     

Mesoporous silicon-based miniature fuel cells for nomadic and chip-scale systems

We report here the fabrication of a new miniature fuel cell for nomadic applications and chip-scale power supply based on a Nafion^®-filled porous silicon self-supported membrane. Combining advantages of Nafion^® for its great proton conduction and silicon for an easier integration and standard microfabrication techniques, this solution enables the integration of gas feed and electrical contacts into the membrane etching process thanks to simple KOH wet etching processes and metal sputterings. The encapsulation is also possible. Compared to simple Nafion^® membranes, this technique may reduce the lateral water diffusion through the membrane. Experiments have been carried out at room temperature and gas feed H₂ is provided by the electrolysis of a NaOH solution. A long-term power density of 18 mW cm^?2 has been achieved after stabilization with a maximum current density of 101 mA cm^?2 and an open circuit voltage of 0.8 V.     

A low cost,high performance insulin delivery system based on PZT actuation

A low driving voltage, low cost, high performance insulin delivery system based on PZT actuation is presented in this paper, which consists of two functional units, namely, micropump unit and electronic control unit. The PZT micropump is the core of micropump unit and is the key base to ultimately realize insulin precision delivery of the whole system. The electronic control unit is the important auxiliary unit for the realization of the whole system function. To obtain a higher working performance under low voltage, a serial structure with two chambers and three check valves is adopted in the design of PZT micropump. In place of silicon and glass, main parts of micro-pump unit are manufactured using the polymers which have good biocompatibility, stability and low cost. Through the systematic experimental test for the prototype of PZT insulin delivery system in lab, the maximum backpressure of 14.64 kPa is recorded at applied voltage of 36 V and working frequency of 160 Hz, the maximum flow rate of 5.74 ml/min is obtained in the condition of 36 V and 300 Hz. Under the voltage of 36 V and working frequency of 200 Hz, the micro-dosage pumped by PZT micro-pump displays a good linear characteristic with the number of driving impulses. The minimum resolution of insulin delivery can obtain 3 × 10^?4 ml (0.03 U insulin at the concentration of 100 U).     

Polymeric (SU-8) optical microscanner driven by electrostatic actuation

A torsional micromechanical scanner was fabricated using photosensitive polymer (SU-8). The proposed polymer-based optical microscanner with reduced torsional stiffness offers a new approach to increase scanning angles. The scanner consists of two parts; the top layer (micro mirror and electrodes) and the bottom layer (anchors and electrodes). The SU-8 scanner is actuated by electrostatic force generated by gap-closing electrodes. For the fabricated optical scanner with the mirror size of 3 × 3 mm², the experimentally obtained scanning angles were 0.43° for 60 Hz (non-resonant) and 1.54° for 1.13 kHz (resonant) at the input voltage of 160 V. This paper also proposes a simple and new fabrication method, which can effectively control the stiffness of the torsional springs by molding SU-8 photoresist through V-groove on the silicon substrate, thereby increasing the scanning angles.     

Flood flow forecasting using ANN,ANFIS and regression models

Flood prediction is an important for the design, planning and management of water resources systems. This study presents the use of artificial neural networks (ANN), adaptive neuro-fuzzy inference systems (ANFIS), multiple linear regression (MLR) and multiple nonlinear regression (MNLR) for forecasting maximum daily flow at the outlet of the Khosrow Shirin watershed, located in the Fars Province of Iran. Precipitation data from four meteorological stations were used to develop a multilayer perceptron topology model. Input vectors for simulations included the original precipitation data, an area-weighted average precipitation and antecedent flows with one- and two-day time lags. Performances of the models were evaluated with the RMSE and the R ². The results showed that the area-weighted precipitation as an input to ANNs and MNLR and the spatially distributed precipitation input to ANFIS and MLR lead to more accurate predictions (e.g., in ANNs up to 2.0 m³ s^?1 reduction in RMSE). Overall, the MNLR was shown to be superior (R ² = 0.81 and RMSE = 0.145 m³ s^?1) to ANNs, ANFIS and MLR for prediction of maximum daily flow. Furthermore, models including antecedent flow with one- and two-day time lags significantly improve flow prediction. We conclude that nonlinear regression can be applied as a simple method for predicting the maximum daily flow.     

Fabrication of a MEMS capacitive accelerometer with symmetrical double-sided serpentine beam-mass structure

This paper presents a symmetrical double-sided serpentine beam-mass structure design with a convenient and precise process of manufacturing MEMS accelerometers. The symmetrical double-sided serpentine beam-mass structure is fabricated from a single double-device-layer SOI wafer, which has identical buried oxides and device layers on both sides of a thick handle layer. The fabrication process produced proof mass with though wafer thickness (860 μm) to enable formation of a larger proof mass. Two layers of single crystal silicon serpentine beams with highly controllable dimension suspend the proof mass from both sides. A sandwich differential capacitive accelerometer based on symmetrical double-sided serpentine beams-mass structure is fabricated by three layer silicon/silicon wafer direct bonding. The resonance frequency of the accelerometer is measured in open loop system by a network analyzer. The quality factor and the resonant frequency are 14 and 724 Hz, respectively. The differential capacitance sensitivity of the fabricated accelerometer is 15 pF/g. The sensitivity of the device with close loop interface circuit is 2 V/g, and the nonlinearity is 0.6 % over the range of 0–1 g. The measured input referred noise floor of accelerometer with interface circuit is 2 μg/√Hz (0–250 Hz).     

MHD natural convection in a nanofluid filled inclined enclosure with sinusoidal wall using CVFEM

Magnetohydrodynamic flow in a nanofluid filled inclined enclosure is investigated numerically using the Control Volume based Finite Element Method. The cold wall of cavity is assumed to mimic a sinusoidal profile with different dimensionless amplitude, and the fluid in the enclosure is a water-based nanofluid containing Cu nanoparticles. The effective thermal conductivity and viscosity of nanofluid are calculated using the Maxwell–Garnetts and Brinkman models, respectively. Numerical simulations were performed for different governing parameters namely the Hartmann number, Rayleigh number, nanoparticle volume fraction and inclination angle of enclosure. The results show that in presence of magnetic field, velocity field retarded, and hence, convection and Nusselt number decreases. At Ra = 10³, maximum value of enhancement for low Hartmann number is obtained at γ = 0°, but for higher values of Hartmann number, maximum values of E occurs at γ = 90°. Also, it can be found that for all values of Hartmann number, at Ra = 10⁴ and 10⁵, maximum value of E is obtained at γ = 60° and γ = 0°, respectively.     

Modeling the front side plasmonics effect in nanotextured silicon surface for thin film solar cells application

We report the computational modeling of the front side plasmonics effect arising on gold (Au) nanoparticles array in combination with nanotextured silicon surface for thin film silicon solar cells application. The ultimate efficiency of the optimized silicon nanoholes (SiNH) array textured surface using Au plasmonics effect is 38.58 %, which is 24.01 % greater than SiNH array textured surface without Au plasmonics effect. Furthermore, SiNH array textured surface perform better compared to silicon nanopillar (SiNP) array textured surface for all the parameters studied. The maximum possible short circuit current density and power conversion efficiency of the proposed SiNH array textured surface with Au plasmonics effect are 31.57 mA/cm² and 25.45 % respectively, which compares favorably well to the computed values of 26.17 mA/cm² and 21.12 %, respectively for the SiNP array textured surface with Au plasmonics effect.     

Verifying finite element simulation in miniature silicon based stacked diaphragm pressure sensors

Micro electro mechanical system are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques. Silicon based stacked diaphragm structure is a combination of silicon-di-oxide and the silicon layer. This work brings out a new approach of finding the sensitivity of stacked diaphragm with respect one of the important parameters like deflection. The sensitivity is also evaluated under thermal effect and, the analytical model developed for the same closely matches with the finite element model. The doping concentration of 10¹⁷cm^-3, in which single silicon shows maximum sensitivity has been selected and an increase in the sensitivity is observed on using a stacked diaphragm structure. The stacked diaphragm structure is designed, simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage for linearity over a wider range. The effect of the buried oxide in the stacked diaphragm structure is also considered in this work. The work in this paper provides a mathematical expression for realizing the effect of boron implanted resistors on the stacked diaphragm structure. The simulation result reported in the literature evaluates the deflection at a particular temperature but the new analytical model developed in this paper evaluates the sensitivity of the diaphragm over a temperature range.     

On-chip manipulation and trapping of microorganisms using a patterned magnetic pathway

We demonstrate on-chip manipulation and trapping of individual microorganisms at designated positions on a silicon surface within a microfluidic channel. Superparamagnetic beads acted as microorganism carriers. Cyanobacterium Synechocystis sp. PCC 6803 microorganisms were immobilized on amine-functionalized magnetic beads (Dynabead^® M-270 Amine) by 1-ethyl-3-(3-dimethylaminopropyl)carbodiimide (EDC)–N-hydroxysulfosuccinimide coupling chemistry. The magnetic pathway was patterned lithographically such that half-disk Ni₈₀Fe₂₀ (permalloy) 5 μm elements were arranged sequentially for a length of 400 micrometers. An external rotating magnetic field of 10 mT was used to drive a translational force (maximum 70 pN) on the magnetic bead carriers proportional to the product of the field strength and its gradient along the patterned edge. Individual microorganisms immobilized on the magnetic beads (transporting objects) were directionally manipulated using a magnetic rail track, which was able to manipulate particles as a result of asymmetric forces from the curved and flat edges of the pattern on the disk. Transporting objects were then successfully trapped in a magnetic trapping station pathway. The transporting object moves two half-disk lengths in one field rotation, resulting in movement at ~24 μm s^?1 for 1 Hz rotational frequency with 5 μm pattern elements spaced with a 1 μm gap between elements.     

A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz

In this paper, a new S-shaped piezoelectric PZT cantilever is microfabricated for scavenging vibration energy at low frequencies (<30 Hz) and low accelerations (<0.4g). The maximum voltage and normalized power are 42 mV and 0.31 μW g ⁻², respectively, at input acceleration of 0.06g. For acceleration above 0.06g, the vibration of PZT cantilever changes from a linear oscillation to a nonlinear impact oscillation due to the displacement constraint introduced by a mechanical stopper. Based on theoretical modeling and experimental results, the frequency broadening effect of the PZT cantilever is studied with varying stop distances and input accelerations. The operation bandwidth of the piezoelectric PZT cantilever is able to extend from 3.4 to 11.1 Hz as the stop distance reduces from 1.7 to 0.7 mm for an acceleration of 0.3g, at the expense of the voltage and normalized power at resonance decreasing from 40 to 16 mV and from 17.8 to 2.8 nW g⁻², respectively.     

Identifiability analysis and parameter estimation of a single Hodgkin-Huxley type voltage dependent ion channel under voltage step measurement conditions

Identifiability analysis of a single Hodgkin-Huxley (HH) type voltage dependent ion channel model under voltage clamp circumstances is performed in order to decide if one can uniquely determine the model parameters from measured data in this simple case. It is shown that the two steady-state parameters (m_∞, h_∞) and the conductance (g) are not globally identifiable together using a single step voltage input. Moreover, no pair from these three parameters is identifiable. Based on the results of the identifiability analysis, a novel optimization-based identification method is proposed and demonstrated on in silico data. The proposed method is based on the decomposition of the parameter estimation problem into two parts using multiple voltage step traces. The results of the article are used to formulate explicit criteria for the design of voltage clamp protocols.     

Design,optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

This paper presents the design, optimization and simulation of a radio frequency (RF) micro-electromechanical system (MEMS) switch. The capacitive RF-MEMS switch is electrostatically actuated. The structure contains a coplanar waveguide, a big suspended membrane, four folded beams to support the membrane and four straight beams to provide the bias voltage. The switch is designed in standard 0.35 µm complementary metal oxide semiconductor process and has a very low pull-in voltage of 3.04 V. Taguchi method and weighted principal component analysis is employed to optimize the geometric parameters of the beams, in order to obtain a low spring constant, low pull-in voltage, and a robust design. The optimized parameters were obtained as w = 2.5 µm, L1 = 30 µm, L2 = 30 µm and L3 = 65 µm. The mechanical and electrical behaviours of the RF-MEMS switch were simulated by the finite element modeling in software of COMSOL Multiphysics 4.3^® and IntelliSuite v8.7^®. RF performance of the switch was obtained by simulation results, which are insertion loss of ?5.65 dB and isolation of ?24.38 dB at 40 GHz.     

A new method for fast anodic bonding in microsystem technology

Other than temperature and voltage, load plays a key role in anodic bonding process. In this paper we present a new design of top electrode (cathode) for anodic bonding machine by which the bonding time has been reduced up to 30 % in case of bare silicon wafer at ?400 V and approximate 52 % in case of oxidized silicon wafer with Pyrex glass bonding at ?800 V. Experimentally it has been observed there was no bonding in oxidized silicon wafer with Pyrex glass up to ?600 V by using standard design while it has been successfully bonded at same voltage (?600 V) by using new design.     

Micro-mixer device with deep channels in silicon using modified RIE process: fabrication,packaging and characterization

In the present work, silicon based micromixer microfluidic devices have been fabricated in silicon substrates of 2-inch diameter. These devices are of 2-input and 1-output port configuration bearing channel depth in the range 80–280 µm. Conventional reactive ion etching (RIE) process used in integrated circuit fabrication was modified to get reasonably high silicon etch rate (~1.2 µm/min). It was anticipated that devices with channel depth in excess of 150 µm would become weak and susceptible to breakage. For such devices, a bonded pair of silicon having a 0.5 µm SiO₂ at the bonded interface was used as the starting substrate. The processed silicon wafer bearing channels was anodically bonded to a Corning^® 7740 glass plate of identical size for fluid confinement. Through-holes for input/output ports were made either in Si substrate or in glass plate before carrying out anodic bonding. Micro-channels were characterized using stylus and optical profiler. Surface roughness of the channel was observed to increase with increasing channel depth. The devices were packaged in a polycarbonate housing and pressure drop versus flow rate measurements were carried out. Reynolds number and friction factor were calculated for devices with 82 µm deep channels. It was observed that up to 25 sccm of gas and 10 ml/min of liquid, the flow was laminar in nature. It is envisaged that using bonded silicon wafer pair and combination of RIE and wet etching, it is possible to get an etch stop at the SiO₂ layer of the bonded silicon interface with much smaller value of surface roughness rendering smooth channel surface.     

Anomalous pulse change in gravity-driven microfluidic oscillator and its application to photodiode switching

Electrofluidic analogy is useful because it provides a method to significantly reduce the reliance of microfluidic chips on dynamic off-chip controllers. Among the functions developed by the analogy, conversion from constant to pulsatile pressure is critical and is yet to be studied. Here, unlike its counterpart electrical oscillator generating square pulses more slowly with decreasing the input voltage, we report that a microfluidic oscillator generates sawtooth pressure pulses more rapidly with decreasing the input pressure (P_I) at 1–2 kPa. Further, with decreasing P_I, the oscillator generates square pulses at P_I > 3.4 kPa, but its operation unexpectedly stops at 2.1 < P_I < 3.4 kPa. We analyze its underlying mechanism with a sophisticated model including a dynamic interaction of the oscillator components and reveal the critical role of the dynamic property of oscillator valves. Additionally, we show electrofluidic switching of a photodiode with the oscillator. The understanding obtained in this study would be essential for developing microfluidic circuits using electrofluidic analogy.     

Simple fabrication of an uncooled Al/SiO2 microcantilever IR detector based on bulk micromachining

A simple microfabrication process to make an uncooled aluminum/silicon dioxide bi-material microcantilever infrared (IR) detector using silicon bulk micromachining technology is presented in this work. This detector is based on high banding of the microcantilever due to the large dissimilar in thermal expansion coefficients between the two materials. It consists of a 1 μm SiO₂ layer deposited by 200 nm thin Al layer. Since no sacrificial layer is used in this process, complexity related to releasing sacrificial layer is avoided. Moreover Al is protected in Si etchant using dual-doped tetramethyl ammonium hydroxide. The other advantage of this process is that only three masks are used with four photolithography process. Thermal and thermal mechanical behaviors of this structure are obtained using finite element analysis, and the maximum temperature and displacement at the end of cantilever at 100 pW/μm² absorbed IR power density on top surface are 7.82°K and 1.924 μm, respectively.